@article{e48125a60e234bd3a4a2e62051b90a1f,
title = "Third-order intermodulation in microelectromechanical filters coupled with capacitive transducers",
keywords = "filters, harmonic analysis, intermodulation distortion, micromechanical devices, transducers, capacitive transducers, communication systems, mechanical resonator nonlinearities, microelectromechanical filters, numerical harmonic balance simulations, parallel-plate transducers, third-order intermodulation",
author = "A.T. Alastalo and V. Kaajakari",
note = "Cited By :19 Export Date: 16 May 2018",
year = "2006",
doi = "10.1109/JMEMS.2005.863705",
language = "English",
volume = "15",
pages = "141--148",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Wiley",
number = "1",
}