| Original language | English |
|---|---|
| Pages (from-to) | 141-148 |
| Number of pages | 8 |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 15 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2006 |
| MoE publication type | A1 Journal article-refereed |
Keywords
- filters
- harmonic analysis
- intermodulation distortion
- micromechanical devices
- transducers
- capacitive transducers
- communication systems
- mechanical resonator nonlinearities
- microelectromechanical filters
- numerical harmonic balance simulations
- parallel-plate transducers
- third-order intermodulation
Cite this
}
Third-order intermodulation in microelectromechanical filters coupled with capacitive transducers. / Alastalo, A.T.; Kaajakari, V.
In: Journal of Microelectromechanical Systems, Vol. 15, No. 1, 2006, p. 141-148.Research output: Contribution to journal › Article › Scientific › peer-review
TY - JOUR
T1 - Third-order intermodulation in microelectromechanical filters coupled with capacitive transducers
AU - Alastalo, A.T.
AU - Kaajakari, V.
N1 - Cited By :19 Export Date: 16 May 2018
PY - 2006
Y1 - 2006
KW - filters
KW - harmonic analysis
KW - intermodulation distortion
KW - micromechanical devices
KW - transducers
KW - capacitive transducers
KW - communication systems
KW - mechanical resonator nonlinearities
KW - microelectromechanical filters
KW - numerical harmonic balance simulations
KW - parallel-plate transducers
KW - third-order intermodulation
U2 - 10.1109/JMEMS.2005.863705
DO - 10.1109/JMEMS.2005.863705
M3 - Article
VL - 15
SP - 141
EP - 148
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
SN - 1057-7157
IS - 1
ER -