Third-order intermodulation in microelectromechanical filters coupled with capacitive transducers

Ari T. Alastalo; Ville Kaajakari

doi:10.1109/JMEMS.2005.863705

Third-order intermodulation in microelectromechanical filters coupled with capacitive transducers

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	141-148
Number of pages	8
Journal	Journal of Microelectromechanical Systems
Volume	15
Issue number	1
DOIs	https://doi.org/10.1109/JMEMS.2005.863705
Publication status	Published - 2006
MoE publication type	A1 Journal article-refereed

Keywords

filters
harmonic analysis
intermodulation distortion
micromechanical devices
transducers
capacitive transducers
communication systems
mechanical resonator nonlinearities
microelectromechanical filters
numerical harmonic balance simulations
parallel-plate transducers
third-order intermodulation

Access to Document

10.1109/JMEMS.2005.863705

https://www.scopus.com/inward/record.uri?eid=2-s2.0-32244432176&doi=10.1109%2fJMEMS.2005.863705&partnerID=40&md5=05c8e5a7b5ed00b3e3ed04484c5e3a24

Cite this

@article{e48125a60e234bd3a4a2e62051b90a1f,

title = "Third-order intermodulation in microelectromechanical filters coupled with capacitive transducers",

keywords = "filters, harmonic analysis, intermodulation distortion, micromechanical devices, transducers, capacitive transducers, communication systems, mechanical resonator nonlinearities, microelectromechanical filters, numerical harmonic balance simulations, parallel-plate transducers, third-order intermodulation",

author = "Alastalo, {Ari T.} and Ville Kaajakari",

note = "Cited By :19 Export Date: 16 May 2018",

year = "2006",

doi = "10.1109/JMEMS.2005.863705",

language = "English",

volume = "15",

pages = "141--148",

journal = "Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "Wiley",

number = "1",

}

TY - JOUR

T1 - Third-order intermodulation in microelectromechanical filters coupled with capacitive transducers

AU - Alastalo, Ari T.

AU - Kaajakari, Ville

N1 - Cited By :19 Export Date: 16 May 2018

PY - 2006

Y1 - 2006

KW - filters

KW - harmonic analysis

KW - intermodulation distortion

KW - micromechanical devices

KW - transducers

KW - capacitive transducers

KW - communication systems

KW - mechanical resonator nonlinearities

KW - microelectromechanical filters

KW - numerical harmonic balance simulations

KW - parallel-plate transducers

KW - third-order intermodulation

U2 - 10.1109/JMEMS.2005.863705

DO - 10.1109/JMEMS.2005.863705

M3 - Article

VL - 15

SP - 141

EP - 148

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 1

ER -