Third-order intermodulation in microelectromechanical filters coupled with capacitive transducers

A.T. Alastalo, V. Kaajakari

    Research output: Contribution to journalArticleScientificpeer-review

    22 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)141-148
    Number of pages8
    JournalJournal of Microelectromechanical Systems
    Volume15
    Issue number1
    DOIs
    Publication statusPublished - 2006
    MoE publication typeA1 Journal article-refereed

    Keywords

    • filters
    • harmonic analysis
    • intermodulation distortion
    • micromechanical devices
    • transducers
    • capacitive transducers
    • communication systems
    • mechanical resonator nonlinearities
    • microelectromechanical filters
    • numerical harmonic balance simulations
    • parallel-plate transducers
    • third-order intermodulation

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