Third-order intermodulation in microelectromechanical filters coupled with capacitive transducers

A.T. Alastalo, V. Kaajakari

Research output: Contribution to journalArticleScientificpeer-review

22 Citations (Scopus)
Original languageEnglish
Pages (from-to)141-148
Number of pages8
JournalJournal of Microelectromechanical Systems
Volume15
Issue number1
DOIs
Publication statusPublished - 2006
MoE publication typeA1 Journal article-refereed

Keywords

  • filters
  • harmonic analysis
  • intermodulation distortion
  • micromechanical devices
  • transducers
  • capacitive transducers
  • communication systems
  • mechanical resonator nonlinearities
  • microelectromechanical filters
  • numerical harmonic balance simulations
  • parallel-plate transducers
  • third-order intermodulation

Cite this

@article{e48125a60e234bd3a4a2e62051b90a1f,
title = "Third-order intermodulation in microelectromechanical filters coupled with capacitive transducers",
keywords = "filters, harmonic analysis, intermodulation distortion, micromechanical devices, transducers, capacitive transducers, communication systems, mechanical resonator nonlinearities, microelectromechanical filters, numerical harmonic balance simulations, parallel-plate transducers, third-order intermodulation",
author = "A.T. Alastalo and V. Kaajakari",
note = "Cited By :19 Export Date: 16 May 2018",
year = "2006",
doi = "10.1109/JMEMS.2005.863705",
language = "English",
volume = "15",
pages = "141--148",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Wiley",
number = "1",

}

Third-order intermodulation in microelectromechanical filters coupled with capacitive transducers. / Alastalo, A.T.; Kaajakari, V.

In: Journal of Microelectromechanical Systems, Vol. 15, No. 1, 2006, p. 141-148.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Third-order intermodulation in microelectromechanical filters coupled with capacitive transducers

AU - Alastalo, A.T.

AU - Kaajakari, V.

N1 - Cited By :19 Export Date: 16 May 2018

PY - 2006

Y1 - 2006

KW - filters

KW - harmonic analysis

KW - intermodulation distortion

KW - micromechanical devices

KW - transducers

KW - capacitive transducers

KW - communication systems

KW - mechanical resonator nonlinearities

KW - microelectromechanical filters

KW - numerical harmonic balance simulations

KW - parallel-plate transducers

KW - third-order intermodulation

U2 - 10.1109/JMEMS.2005.863705

DO - 10.1109/JMEMS.2005.863705

M3 - Article

VL - 15

SP - 141

EP - 148

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 1

ER -