Third-order intermodulation in microelectromechanical filters coupled with capacitive transducers

A.T. Alastalo, V. Kaajakari

Research output: Contribution to journalArticleScientificpeer-review

22 Citations (Scopus)
Original languageEnglish
Pages (from-to)141-148
Number of pages8
JournalJournal of Microelectromechanical Systems
Issue number1
Publication statusPublished - 2006
MoE publication typeA1 Journal article-refereed


  • filters
  • harmonic analysis
  • intermodulation distortion
  • micromechanical devices
  • transducers
  • capacitive transducers
  • communication systems
  • mechanical resonator nonlinearities
  • microelectromechanical filters
  • numerical harmonic balance simulations
  • parallel-plate transducers
  • third-order intermodulation

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