Through-wafer polysilicon interconnect fabrication with in-situ boron doping

Ismo Luusua, Kimmo Henttinen, Panu Pekko, Tapani Vehmas, Hannu Luoto

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    3 Citations (Scopus)

    Fingerprint Dive into the research topics of 'Through-wafer polysilicon interconnect fabrication with in-situ boron doping'. Together they form a unique fingerprint.

    Physics & Astronomy