TiN coating adhesion studies using the scratch test method

Juhani Valli, Ulla Mäkelä, Allan Matthews, Vladimir Murawa

VTT Technical Research Centre of Finland

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

141 Citations (Scopus)

141 Citations
1 Article

1 results

1985
TiN coating adhesion studies using the scratch test method
Valli, J., Mäkelä, U., Matthews, A. & Murawa, V., 1985, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 3, 6, p. 2411-2414
Research output: Contribution to journal › Article › Scientific › peer-review