Titanium nitride by atomic layer deposition: mechanical properties

Riikka L. Puurunen (Corresponding author), Oili Ylivaara, Xuwen Liu, Dieter Schneider, Jaakko Julin, Sakari Sintonen, B. Marchand, Pasi Jalkanen, Eero Haimi, Marko Tuominen, Jyrki Räisänen, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationTechnical Program & Abstracts
    PublisherAmerican Vacuum Society AVS
    Publication statusPublished - 2014
    Event14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan
    Duration: 15 Jun 201418 Jun 2014
    Conference number: 14

    Conference

    Conference14th International Conference on Atomic Layer Deposition, ALD 2014
    Abbreviated titleALD 2014
    CountryJapan
    CityKyoto
    Period15/06/1418/06/14

    Cite this

    Puurunen, R. L., Ylivaara, O., Liu, X., Schneider, D., Julin, J., Sintonen, S., ... Hannula, S-P. (2014). Titanium nitride by atomic layer deposition: mechanical properties . In Technical Program & Abstracts American Vacuum Society AVS.
    Puurunen, Riikka L. ; Ylivaara, Oili ; Liu, Xuwen ; Schneider, Dieter ; Julin, Jaakko ; Sintonen, Sakari ; Marchand, B. ; Jalkanen, Pasi ; Haimi, Eero ; Tuominen, Marko ; Räisänen, Jyrki ; Sajavaara, Timo ; Lipsanen, Harri ; Hannula, Simo-Pekka. / Titanium nitride by atomic layer deposition : mechanical properties . Technical Program & Abstracts. American Vacuum Society AVS, 2014.
    @inbook{2e4c72ae52f14cf9ba12af519c92a82b,
    title = "Titanium nitride by atomic layer deposition: mechanical properties",
    author = "Puurunen, {Riikka L.} and Oili Ylivaara and Xuwen Liu and Dieter Schneider and Jaakko Julin and Sakari Sintonen and B. Marchand and Pasi Jalkanen and Eero Haimi and Marko Tuominen and Jyrki R{\"a}is{\"a}nen and Timo Sajavaara and Harri Lipsanen and Simo-Pekka Hannula",
    note = "Published abstract of a poster Project 74717 MECHALD",
    year = "2014",
    language = "English",
    booktitle = "Technical Program & Abstracts",
    publisher = "American Vacuum Society AVS",
    address = "United States",

    }

    Puurunen, RL, Ylivaara, O, Liu, X, Schneider, D, Julin, J, Sintonen, S, Marchand, B, Jalkanen, P, Haimi, E, Tuominen, M, Räisänen, J, Sajavaara, T, Lipsanen, H & Hannula, S-P 2014, Titanium nitride by atomic layer deposition: mechanical properties . in Technical Program & Abstracts. American Vacuum Society AVS, 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan, 15/06/14.

    Titanium nitride by atomic layer deposition : mechanical properties . / Puurunen, Riikka L. (Corresponding author); Ylivaara, Oili; Liu, Xuwen; Schneider, Dieter; Julin, Jaakko; Sintonen, Sakari; Marchand, B.; Jalkanen, Pasi; Haimi, Eero; Tuominen, Marko; Räisänen, Jyrki; Sajavaara, Timo; Lipsanen, Harri; Hannula, Simo-Pekka.

    Technical Program & Abstracts. American Vacuum Society AVS, 2014.

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    TY - CHAP

    T1 - Titanium nitride by atomic layer deposition

    T2 - mechanical properties

    AU - Puurunen, Riikka L.

    AU - Ylivaara, Oili

    AU - Liu, Xuwen

    AU - Schneider, Dieter

    AU - Julin, Jaakko

    AU - Sintonen, Sakari

    AU - Marchand, B.

    AU - Jalkanen, Pasi

    AU - Haimi, Eero

    AU - Tuominen, Marko

    AU - Räisänen, Jyrki

    AU - Sajavaara, Timo

    AU - Lipsanen, Harri

    AU - Hannula, Simo-Pekka

    N1 - Published abstract of a poster Project 74717 MECHALD

    PY - 2014

    Y1 - 2014

    M3 - Conference abstract in proceedings

    BT - Technical Program & Abstracts

    PB - American Vacuum Society AVS

    ER -

    Puurunen RL, Ylivaara O, Liu X, Schneider D, Julin J, Sintonen S et al. Titanium nitride by atomic layer deposition: mechanical properties . In Technical Program & Abstracts. American Vacuum Society AVS. 2014