Titanium nitride by atomic layer deposition: mechanical properties

Riikka L. Puurunen (Corresponding author), Oili Ylivaara, Xuwen Liu, Dieter Schneider, Jaakko Julin, Sakari Sintonen, B. Marchand, Pasi Jalkanen, Eero Haimi, Marko Tuominen, Jyrki Räisänen, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationTechnical Program & Abstracts
    PublisherAmerican Vacuum Society AVS
    Publication statusPublished - 2014
    Event14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan
    Duration: 15 Jun 201418 Jun 2014
    Conference number: 14

    Conference

    Conference14th International Conference on Atomic Layer Deposition, ALD 2014
    Abbreviated titleALD 2014
    CountryJapan
    CityKyoto
    Period15/06/1418/06/14

    Cite this

    Puurunen, R. L., Ylivaara, O., Liu, X., Schneider, D., Julin, J., Sintonen, S., Marchand, B., Jalkanen, P., Haimi, E., Tuominen, M., Räisänen, J., Sajavaara, T., Lipsanen, H., & Hannula, S-P. (2014). Titanium nitride by atomic layer deposition: mechanical properties . In Technical Program & Abstracts American Vacuum Society AVS.