Titanium nitride by atomic layer deposition: mechanical properties

Riikka L. Puurunen (Corresponding author), Oili Ylivaara, Xuwen Liu, Dieter Schneider, Jaakko Julin, Sakari Sintonen, B. Marchand, Pasi Jalkanen, Eero Haimi, Marko Tuominen, Jyrki Räisänen, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publicationTechnical Program & Abstracts
PublisherAmerican Vacuum Society AVS
Publication statusPublished - 2014
Event14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan
Duration: 15 Jun 201418 Jun 2014
Conference number: 14

Conference

Conference14th International Conference on Atomic Layer Deposition, ALD 2014
Abbreviated titleALD 2014
CountryJapan
CityKyoto
Period15/06/1418/06/14

Cite this

Puurunen, R. L., Ylivaara, O., Liu, X., Schneider, D., Julin, J., Sintonen, S., ... Hannula, S-P. (2014). Titanium nitride by atomic layer deposition: mechanical properties . In Technical Program & Abstracts American Vacuum Society AVS.
Puurunen, Riikka L. ; Ylivaara, Oili ; Liu, Xuwen ; Schneider, Dieter ; Julin, Jaakko ; Sintonen, Sakari ; Marchand, B. ; Jalkanen, Pasi ; Haimi, Eero ; Tuominen, Marko ; Räisänen, Jyrki ; Sajavaara, Timo ; Lipsanen, Harri ; Hannula, Simo-Pekka. / Titanium nitride by atomic layer deposition : mechanical properties . Technical Program & Abstracts. American Vacuum Society AVS, 2014.
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title = "Titanium nitride by atomic layer deposition: mechanical properties",
author = "Puurunen, {Riikka L.} and Oili Ylivaara and Xuwen Liu and Dieter Schneider and Jaakko Julin and Sakari Sintonen and B. Marchand and Pasi Jalkanen and Eero Haimi and Marko Tuominen and Jyrki R{\"a}is{\"a}nen and Timo Sajavaara and Harri Lipsanen and Simo-Pekka Hannula",
note = "Published abstract of a poster Project 74717 MECHALD",
year = "2014",
language = "English",
booktitle = "Technical Program & Abstracts",
publisher = "American Vacuum Society AVS",
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Puurunen, RL, Ylivaara, O, Liu, X, Schneider, D, Julin, J, Sintonen, S, Marchand, B, Jalkanen, P, Haimi, E, Tuominen, M, Räisänen, J, Sajavaara, T, Lipsanen, H & Hannula, S-P 2014, Titanium nitride by atomic layer deposition: mechanical properties . in Technical Program & Abstracts. American Vacuum Society AVS, 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan, 15/06/14.

Titanium nitride by atomic layer deposition : mechanical properties . / Puurunen, Riikka L. (Corresponding author); Ylivaara, Oili; Liu, Xuwen; Schneider, Dieter; Julin, Jaakko; Sintonen, Sakari; Marchand, B.; Jalkanen, Pasi; Haimi, Eero; Tuominen, Marko; Räisänen, Jyrki; Sajavaara, Timo; Lipsanen, Harri; Hannula, Simo-Pekka.

Technical Program & Abstracts. American Vacuum Society AVS, 2014.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

TY - CHAP

T1 - Titanium nitride by atomic layer deposition

T2 - mechanical properties

AU - Puurunen, Riikka L.

AU - Ylivaara, Oili

AU - Liu, Xuwen

AU - Schneider, Dieter

AU - Julin, Jaakko

AU - Sintonen, Sakari

AU - Marchand, B.

AU - Jalkanen, Pasi

AU - Haimi, Eero

AU - Tuominen, Marko

AU - Räisänen, Jyrki

AU - Sajavaara, Timo

AU - Lipsanen, Harri

AU - Hannula, Simo-Pekka

N1 - Published abstract of a poster Project 74717 MECHALD

PY - 2014

Y1 - 2014

M3 - Conference abstract in proceedings

BT - Technical Program & Abstracts

PB - American Vacuum Society AVS

ER -

Puurunen RL, Ylivaara O, Liu X, Schneider D, Julin J, Sintonen S et al. Titanium nitride by atomic layer deposition: mechanical properties . In Technical Program & Abstracts. American Vacuum Society AVS. 2014