Titanium nitride by atomic layer deposition: mechanical properties

Riikka L. Puurunen; Oili Ylivaara; Xuwen Liu; Dieter Schneider; Jaakko Julin; Sakari Sintonen; B. Marchand; Pasi Jalkanen; Eero Haimi; Marko Tuominen; Jyrki Räisänen; Timo Sajavaara; Harri Lipsanen; Simo-Pekka Hannula

Titanium nitride by atomic layer deposition: mechanical properties

Riikka L. Puurunen^*
, Oili Ylivaara
, Xuwen Liu
, Dieter Schneider
, Jaakko Julin
, Sakari Sintonen
, B. Marchand
, Pasi Jalkanen
, Eero Haimi
, Marko Tuominen
, Jyrki Räisänen
, Timo Sajavaara
, Harri Lipsanen
, Simo-Pekka Hannula

^*Corresponding author for this work

Aalto University
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
University of Jyväskylä
University of Helsinki

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	Technical Program & Abstracts
Publisher	American Vacuum Society (AVS)
Publication status	Published - 2014
MoE publication type	Not Eligible
Event	14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan Duration: 15 Jun 2014 → 18 Jun 2014 Conference number: 14

Conference

Conference	14th International Conference on Atomic Layer Deposition, ALD 2014
Abbreviated title	ALD 2014
Country/Territory	Japan
City	Kyoto
Period	15/06/14 → 18/06/14

Cite this

@inbook{2e4c72ae52f14cf9ba12af519c92a82b,

title = "Titanium nitride by atomic layer deposition: mechanical properties ",

author = "Puurunen, \{Riikka L.\} and Oili Ylivaara and Xuwen Liu and Dieter Schneider and Jaakko Julin and Sakari Sintonen and B. Marchand and Pasi Jalkanen and Eero Haimi and Marko Tuominen and Jyrki R{\"a}is{\"a}nen and Timo Sajavaara and Harri Lipsanen and Simo-Pekka Hannula",

note = "Published abstract of a poster Project 74717 MECHALD; 14th International Conference on Atomic Layer Deposition, ALD 2014, ALD 2014 ; Conference date: 15-06-2014 Through 18-06-2014",

year = "2014",

language = "English",

booktitle = "Technical Program \& Abstracts",

publisher = "American Vacuum Society (AVS)",

address = "United States",

}

Puurunen, RL, Ylivaara, O, Liu, X, Schneider, D, Julin, J, Sintonen, S, Marchand, B, Jalkanen, P, Haimi, E, Tuominen, M, Räisänen, J, Sajavaara, T, Lipsanen, H & Hannula, S-P 2014, Titanium nitride by atomic layer deposition: mechanical properties . in Technical Program & Abstracts. American Vacuum Society (AVS), 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan, 15/06/14.

TY - CHAP

T1 - Titanium nitride by atomic layer deposition

T2 - 14th International Conference on Atomic Layer Deposition, ALD 2014

AU - Puurunen, Riikka L.

AU - Ylivaara, Oili

AU - Liu, Xuwen

AU - Schneider, Dieter

AU - Julin, Jaakko

AU - Sintonen, Sakari

AU - Marchand, B.

AU - Jalkanen, Pasi

AU - Haimi, Eero

AU - Tuominen, Marko

AU - Räisänen, Jyrki

AU - Sajavaara, Timo

AU - Lipsanen, Harri

AU - Hannula, Simo-Pekka

N1 - Conference code: 14

PY - 2014

Y1 - 2014

M3 - Conference abstract in proceedings

BT - Technical Program & Abstracts

PB - American Vacuum Society (AVS)

Y2 - 15 June 2014 through 18 June 2014

ER -