Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

9 Citations (Scopus)

Abstract

Total internal reflection (TIR) mirrors represent an ultra-compact and flexible method to turn light in a photonic integrated circuit (PIC). These can also have very broadband and polarisation independent operation. This paper presents results from 90 degree strip waveguide turning mirrors with novel geometry on a 3 µm SOI waveguide platform. The new TIR mirrors have record-low insertion loss of 0.08 dB/mirror. They are compared with previous designs that have demonstrated insertion losses down to 0.15 dB/mirror. The test structures consisted of up to 96 consecutive mirrors and were fabricated in a multi-project wafer run. The multi-moded test devices only propagate light in the fundamental mode. The mirrors can be used in single-mode PICs that combine low losses, small polarisation dependency, wide bandwidth and small footprint.
Original languageEnglish
Title of host publicationSilicon Photonics X
EditorsGraham T. Reed, Michael R. Watts
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)978-1-6284-1457-8
DOIs
Publication statusPublished - 27 Feb 2015
MoE publication typeA4 Article in a conference publication
EventSilicon Photonics X - San Francisco, United States
Duration: 9 Feb 201512 Feb 2015

Publication series

SeriesProceedings of SPIE
Volume9367
ISSN0277-786X

Conference

ConferenceSilicon Photonics X
Abbreviated titleSPIE OPTO
CountryUnited States
CitySan Francisco
Period9/02/1512/02/15

Fingerprint

SOI (semiconductors)
mirrors
waveguides
insertion loss
footprints
polarization
integrated circuits
strip
platforms
wafers
photonics
broadband
bandwidth
geometry

Keywords

  • elliptic mirror
  • photonic integrated circuit
  • PIC
  • slicon photonics
  • silicon-on-insulator
  • SOI
  • TIR
  • total internal reflection
  • waveguide mirror

Cite this

Aalto, T., Harjanne, M., Ylinen, S., Kapulainen, M., Vehmas, T., & Cherchi, M. (2015). Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides. In G. T. Reed, & M. R. Watts (Eds.), Silicon Photonics X [93670B] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 9367 https://doi.org/10.1117/12.2079748
Aalto, Timo ; Harjanne, Mikko ; Ylinen, Sami ; Kapulainen, Markku ; Vehmas, Tapani ; Cherchi, Matteo. / Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides. Silicon Photonics X. editor / Graham T. Reed ; Michael R. Watts. International Society for Optics and Photonics SPIE, 2015. (Proceedings of SPIE, Vol. 9367).
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title = "Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides",
abstract = "Total internal reflection (TIR) mirrors represent an ultra-compact and flexible method to turn light in a photonic integrated circuit (PIC). These can also have very broadband and polarisation independent operation. This paper presents results from 90 degree strip waveguide turning mirrors with novel geometry on a 3 µm SOI waveguide platform. The new TIR mirrors have record-low insertion loss of 0.08 dB/mirror. They are compared with previous designs that have demonstrated insertion losses down to 0.15 dB/mirror. The test structures consisted of up to 96 consecutive mirrors and were fabricated in a multi-project wafer run. The multi-moded test devices only propagate light in the fundamental mode. The mirrors can be used in single-mode PICs that combine low losses, small polarisation dependency, wide bandwidth and small footprint.",
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author = "Timo Aalto and Mikko Harjanne and Sami Ylinen and Markku Kapulainen and Tapani Vehmas and Matteo Cherchi",
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Aalto, T, Harjanne, M, Ylinen, S, Kapulainen, M, Vehmas, T & Cherchi, M 2015, Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides. in GT Reed & MR Watts (eds), Silicon Photonics X., 93670B, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 9367, Silicon Photonics X, San Francisco, United States, 9/02/15. https://doi.org/10.1117/12.2079748

Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides. / Aalto, Timo; Harjanne, Mikko; Ylinen, Sami; Kapulainen, Markku; Vehmas, Tapani; Cherchi, Matteo.

Silicon Photonics X. ed. / Graham T. Reed; Michael R. Watts. International Society for Optics and Photonics SPIE, 2015. 93670B (Proceedings of SPIE, Vol. 9367).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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T1 - Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides

AU - Aalto, Timo

AU - Harjanne, Mikko

AU - Ylinen, Sami

AU - Kapulainen, Markku

AU - Vehmas, Tapani

AU - Cherchi, Matteo

PY - 2015/2/27

Y1 - 2015/2/27

N2 - Total internal reflection (TIR) mirrors represent an ultra-compact and flexible method to turn light in a photonic integrated circuit (PIC). These can also have very broadband and polarisation independent operation. This paper presents results from 90 degree strip waveguide turning mirrors with novel geometry on a 3 µm SOI waveguide platform. The new TIR mirrors have record-low insertion loss of 0.08 dB/mirror. They are compared with previous designs that have demonstrated insertion losses down to 0.15 dB/mirror. The test structures consisted of up to 96 consecutive mirrors and were fabricated in a multi-project wafer run. The multi-moded test devices only propagate light in the fundamental mode. The mirrors can be used in single-mode PICs that combine low losses, small polarisation dependency, wide bandwidth and small footprint.

AB - Total internal reflection (TIR) mirrors represent an ultra-compact and flexible method to turn light in a photonic integrated circuit (PIC). These can also have very broadband and polarisation independent operation. This paper presents results from 90 degree strip waveguide turning mirrors with novel geometry on a 3 µm SOI waveguide platform. The new TIR mirrors have record-low insertion loss of 0.08 dB/mirror. They are compared with previous designs that have demonstrated insertion losses down to 0.15 dB/mirror. The test structures consisted of up to 96 consecutive mirrors and were fabricated in a multi-project wafer run. The multi-moded test devices only propagate light in the fundamental mode. The mirrors can be used in single-mode PICs that combine low losses, small polarisation dependency, wide bandwidth and small footprint.

KW - elliptic mirror

KW - photonic integrated circuit

KW - PIC

KW - slicon photonics

KW - silicon-on-insulator

KW - SOI

KW - TIR

KW - total internal reflection

KW - waveguide mirror

U2 - 10.1117/12.2079748

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M3 - Conference article in proceedings

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Aalto T, Harjanne M, Ylinen S, Kapulainen M, Vehmas T, Cherchi M. Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides. In Reed GT, Watts MR, editors, Silicon Photonics X. International Society for Optics and Photonics SPIE. 2015. 93670B. (Proceedings of SPIE, Vol. 9367). https://doi.org/10.1117/12.2079748