Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    9 Citations (Scopus)

    Abstract

    Total internal reflection (TIR) mirrors represent an ultra-compact and flexible method to turn light in a photonic integrated circuit (PIC). These can also have very broadband and polarisation independent operation. This paper presents results from 90 degree strip waveguide turning mirrors with novel geometry on a 3 µm SOI waveguide platform. The new TIR mirrors have record-low insertion loss of 0.08 dB/mirror. They are compared with previous designs that have demonstrated insertion losses down to 0.15 dB/mirror. The test structures consisted of up to 96 consecutive mirrors and were fabricated in a multi-project wafer run. The multi-moded test devices only propagate light in the fundamental mode. The mirrors can be used in single-mode PICs that combine low losses, small polarisation dependency, wide bandwidth and small footprint.
    Original languageEnglish
    Title of host publicationSilicon Photonics X
    EditorsGraham T. Reed, Michael R. Watts
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)978-1-6284-1457-8
    DOIs
    Publication statusPublished - 27 Feb 2015
    MoE publication typeA4 Article in a conference publication
    EventSilicon Photonics X - San Francisco, United States
    Duration: 9 Feb 201512 Feb 2015

    Publication series

    SeriesProceedings of SPIE
    Volume9367
    ISSN0277-786X

    Conference

    ConferenceSilicon Photonics X
    Abbreviated titleSPIE OPTO
    CountryUnited States
    CitySan Francisco
    Period9/02/1512/02/15

    Fingerprint

    SOI (semiconductors)
    mirrors
    waveguides
    insertion loss
    footprints
    polarization
    integrated circuits
    strip
    platforms
    wafers
    photonics
    broadband
    bandwidth
    geometry

    Keywords

    • elliptic mirror
    • photonic integrated circuit
    • PIC
    • slicon photonics
    • silicon-on-insulator
    • SOI
    • TIR
    • total internal reflection
    • waveguide mirror

    Cite this

    Aalto, T., Harjanne, M., Ylinen, S., Kapulainen, M., Vehmas, T., & Cherchi, M. (2015). Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides. In G. T. Reed, & M. R. Watts (Eds.), Silicon Photonics X [93670B] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 9367 https://doi.org/10.1117/12.2079748
    Aalto, Timo ; Harjanne, Mikko ; Ylinen, Sami ; Kapulainen, Markku ; Vehmas, Tapani ; Cherchi, Matteo. / Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides. Silicon Photonics X. editor / Graham T. Reed ; Michael R. Watts. International Society for Optics and Photonics SPIE, 2015. (Proceedings of SPIE, Vol. 9367).
    @inproceedings{0eb880003b8c4b1799af990d42570404,
    title = "Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides",
    abstract = "Total internal reflection (TIR) mirrors represent an ultra-compact and flexible method to turn light in a photonic integrated circuit (PIC). These can also have very broadband and polarisation independent operation. This paper presents results from 90 degree strip waveguide turning mirrors with novel geometry on a 3 µm SOI waveguide platform. The new TIR mirrors have record-low insertion loss of 0.08 dB/mirror. They are compared with previous designs that have demonstrated insertion losses down to 0.15 dB/mirror. The test structures consisted of up to 96 consecutive mirrors and were fabricated in a multi-project wafer run. The multi-moded test devices only propagate light in the fundamental mode. The mirrors can be used in single-mode PICs that combine low losses, small polarisation dependency, wide bandwidth and small footprint.",
    keywords = "elliptic mirror, photonic integrated circuit, PIC, slicon photonics, silicon-on-insulator, SOI, TIR, total internal reflection, waveguide mirror",
    author = "Timo Aalto and Mikko Harjanne and Sami Ylinen and Markku Kapulainen and Tapani Vehmas and Matteo Cherchi",
    year = "2015",
    month = "2",
    day = "27",
    doi = "10.1117/12.2079748",
    language = "English",
    isbn = "978-1-6284-1457-8",
    series = "Proceedings of SPIE",
    publisher = "International Society for Optics and Photonics SPIE",
    editor = "Reed, {Graham T.} and Watts, {Michael R.}",
    booktitle = "Silicon Photonics X",
    address = "United States",

    }

    Aalto, T, Harjanne, M, Ylinen, S, Kapulainen, M, Vehmas, T & Cherchi, M 2015, Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides. in GT Reed & MR Watts (eds), Silicon Photonics X., 93670B, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 9367, Silicon Photonics X, San Francisco, United States, 9/02/15. https://doi.org/10.1117/12.2079748

    Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides. / Aalto, Timo; Harjanne, Mikko; Ylinen, Sami; Kapulainen, Markku; Vehmas, Tapani; Cherchi, Matteo.

    Silicon Photonics X. ed. / Graham T. Reed; Michael R. Watts. International Society for Optics and Photonics SPIE, 2015. 93670B (Proceedings of SPIE, Vol. 9367).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    TY - GEN

    T1 - Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides

    AU - Aalto, Timo

    AU - Harjanne, Mikko

    AU - Ylinen, Sami

    AU - Kapulainen, Markku

    AU - Vehmas, Tapani

    AU - Cherchi, Matteo

    PY - 2015/2/27

    Y1 - 2015/2/27

    N2 - Total internal reflection (TIR) mirrors represent an ultra-compact and flexible method to turn light in a photonic integrated circuit (PIC). These can also have very broadband and polarisation independent operation. This paper presents results from 90 degree strip waveguide turning mirrors with novel geometry on a 3 µm SOI waveguide platform. The new TIR mirrors have record-low insertion loss of 0.08 dB/mirror. They are compared with previous designs that have demonstrated insertion losses down to 0.15 dB/mirror. The test structures consisted of up to 96 consecutive mirrors and were fabricated in a multi-project wafer run. The multi-moded test devices only propagate light in the fundamental mode. The mirrors can be used in single-mode PICs that combine low losses, small polarisation dependency, wide bandwidth and small footprint.

    AB - Total internal reflection (TIR) mirrors represent an ultra-compact and flexible method to turn light in a photonic integrated circuit (PIC). These can also have very broadband and polarisation independent operation. This paper presents results from 90 degree strip waveguide turning mirrors with novel geometry on a 3 µm SOI waveguide platform. The new TIR mirrors have record-low insertion loss of 0.08 dB/mirror. They are compared with previous designs that have demonstrated insertion losses down to 0.15 dB/mirror. The test structures consisted of up to 96 consecutive mirrors and were fabricated in a multi-project wafer run. The multi-moded test devices only propagate light in the fundamental mode. The mirrors can be used in single-mode PICs that combine low losses, small polarisation dependency, wide bandwidth and small footprint.

    KW - elliptic mirror

    KW - photonic integrated circuit

    KW - PIC

    KW - slicon photonics

    KW - silicon-on-insulator

    KW - SOI

    KW - TIR

    KW - total internal reflection

    KW - waveguide mirror

    U2 - 10.1117/12.2079748

    DO - 10.1117/12.2079748

    M3 - Conference article in proceedings

    SN - 978-1-6284-1457-8

    T3 - Proceedings of SPIE

    BT - Silicon Photonics X

    A2 - Reed, Graham T.

    A2 - Watts, Michael R.

    PB - International Society for Optics and Photonics SPIE

    ER -

    Aalto T, Harjanne M, Ylinen S, Kapulainen M, Vehmas T, Cherchi M. Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides. In Reed GT, Watts MR, editors, Silicon Photonics X. International Society for Optics and Photonics SPIE. 2015. 93670B. (Proceedings of SPIE, Vol. 9367). https://doi.org/10.1117/12.2079748