Towards large-area roll-to-roll printed nanophotonic sensors

Pentti Karioja, Jussi Hiltunen, Sanna Aikio, Teemu Alajoki, Jarkko Tuominen, Marianne Hiltunen, Samuli Siitonen, Ville Kontturi, K. Böhlen, R. Hauser, M. Charlton, Arjen Boersma, Peter Lieberzeit, T. Felder, D. Eustace, E. Haskal

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

6 Citations (Scopus)

Abstract

Polymers have become an important material group in fabricating discrete photonic components and integrated optical devices. This is due to their good properties: high optical transmittance, versatile processability at relative low temperatures and potential for low-cost production. Recently, nanoimprinting or nanoimprint lithography (NIL) has obtained a plenty of research interest. In NIL, a mould is pressed against a substrate coated with a moldable material. After deformation of the material, the mold is separated and a replica of the mold is formed. Compared with conventional lithographic methods, imprinting is simple to carry out, requires less-complicated equipment and can provide high-resolution with high throughput. Nanoimprint lithography has shown potential to become a method for low-cost and high-throughput fabrication of nanostructures. We show the development process of nano-structured, large-area multi-parameter sensors using Photonic Crystal (PC) and Surface Enhanced Raman Scattering (SERS) methodologies for environmental and pharmaceutical applications. We address these challenges by developing roll-to-roll (R2R) UV-nanoimprint fabrication methods. Our development steps are the following: Firstly, the proof of concept structures are fabricated by the use of wafer-level processes in Si-based materials. Secondly, the master molds of successful designs are fabricated, and they are used to transfer the nanophotonic structures into polymer materials using sheet-level UV-nanoimprinting. Thirdly, the sheet-level nanoimprinting processes are transferred to roll-to-roll fabrication. In order to enhance roll-to-roll manufacturing capabilities, silicone-based polymer material development was carried out. In the different development phases, Photonic Crystal and SERS sensor structures with increasing complexities were fabricated using polymer materials in order to enhance sheet-level and roll-to-roll manufacturing processes. In addition, chemical and molecular imprint (MIP) functionalization methods were applied in the sensor demonstrators. In this paper, the process flow in fabricating large-area nanophotonic structures by the use of sheet-level and roll-to-roll UV- nanoimprinting is reported.
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationSPIE 9141, Optical Sensing and Detection III, 91410D, 2014
Place of PublicationBellingham
PublisherInternational Society for Optics and Photonics SPIE
Number of pages12
Volume9141
ISBN (Print)978-1-6284-1089-1
DOIs
Publication statusPublished - 2014
MoE publication typeA4 Article in a conference publication
EventSPIE Photonics Europe, Optical Sensing and Detection III - Brussels, Belgium
Duration: 14 Apr 201417 Apr 2014

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume9141

Conference

ConferenceSPIE Photonics Europe, Optical Sensing and Detection III
CountryBelgium
CityBrussels
Period14/04/1417/04/14

Fingerprint

Nanophotonics
Nanoimprint lithography
Sensors
Polymers
Photonic crystals
Fabrication
Raman scattering
Throughput
Opacity
Molds
Silicones
Optical devices
Photonics
Costs
Nanostructures
Substrates
Pharmaceutical Preparations

Cite this

Karioja, P., Hiltunen, J., Aikio, S., Alajoki, T., Tuominen, J., Hiltunen, M., ... Haskal, E. (2014). Towards large-area roll-to-roll printed nanophotonic sensors. In Proceedings: SPIE 9141, Optical Sensing and Detection III, 91410D, 2014 (Vol. 9141). Bellingham: International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 9141 https://doi.org/10.1117/12.2052496
Karioja, Pentti ; Hiltunen, Jussi ; Aikio, Sanna ; Alajoki, Teemu ; Tuominen, Jarkko ; Hiltunen, Marianne ; Siitonen, Samuli ; Kontturi, Ville ; Böhlen, K. ; Hauser, R. ; Charlton, M. ; Boersma, Arjen ; Lieberzeit, Peter ; Felder, T. ; Eustace, D. ; Haskal, E. / Towards large-area roll-to-roll printed nanophotonic sensors. Proceedings: SPIE 9141, Optical Sensing and Detection III, 91410D, 2014. Vol. 9141 Bellingham : International Society for Optics and Photonics SPIE, 2014. (Proceedings of SPIE, Vol. 9141).
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author = "Pentti Karioja and Jussi Hiltunen and Sanna Aikio and Teemu Alajoki and Jarkko Tuominen and Marianne Hiltunen and Samuli Siitonen and Ville Kontturi and K. B{\"o}hlen and R. Hauser and M. Charlton and Arjen Boersma and Peter Lieberzeit and T. Felder and D. Eustace and E. Haskal",
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Karioja, P, Hiltunen, J, Aikio, S, Alajoki, T, Tuominen, J, Hiltunen, M, Siitonen, S, Kontturi, V, Böhlen, K, Hauser, R, Charlton, M, Boersma, A, Lieberzeit, P, Felder, T, Eustace, D & Haskal, E 2014, Towards large-area roll-to-roll printed nanophotonic sensors. in Proceedings: SPIE 9141, Optical Sensing and Detection III, 91410D, 2014. vol. 9141, International Society for Optics and Photonics SPIE, Bellingham, Proceedings of SPIE, vol. 9141, SPIE Photonics Europe, Optical Sensing and Detection III, Brussels, Belgium, 14/04/14. https://doi.org/10.1117/12.2052496

Towards large-area roll-to-roll printed nanophotonic sensors. / Karioja, Pentti; Hiltunen, Jussi; Aikio, Sanna; Alajoki, Teemu; Tuominen, Jarkko; Hiltunen, Marianne; Siitonen, Samuli; Kontturi, Ville; Böhlen, K.; Hauser, R.; Charlton, M.; Boersma, Arjen; Lieberzeit, Peter; Felder, T.; Eustace, D.; Haskal, E.

Proceedings: SPIE 9141, Optical Sensing and Detection III, 91410D, 2014. Vol. 9141 Bellingham : International Society for Optics and Photonics SPIE, 2014. (Proceedings of SPIE, Vol. 9141).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AU - Karioja, Pentti

AU - Hiltunen, Jussi

AU - Aikio, Sanna

AU - Alajoki, Teemu

AU - Tuominen, Jarkko

AU - Hiltunen, Marianne

AU - Siitonen, Samuli

AU - Kontturi, Ville

AU - Böhlen, K.

AU - Hauser, R.

AU - Charlton, M.

AU - Boersma, Arjen

AU - Lieberzeit, Peter

AU - Felder, T.

AU - Eustace, D.

AU - Haskal, E.

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N2 - Polymers have become an important material group in fabricating discrete photonic components and integrated optical devices. This is due to their good properties: high optical transmittance, versatile processability at relative low temperatures and potential for low-cost production. Recently, nanoimprinting or nanoimprint lithography (NIL) has obtained a plenty of research interest. In NIL, a mould is pressed against a substrate coated with a moldable material. After deformation of the material, the mold is separated and a replica of the mold is formed. Compared with conventional lithographic methods, imprinting is simple to carry out, requires less-complicated equipment and can provide high-resolution with high throughput. Nanoimprint lithography has shown potential to become a method for low-cost and high-throughput fabrication of nanostructures. We show the development process of nano-structured, large-area multi-parameter sensors using Photonic Crystal (PC) and Surface Enhanced Raman Scattering (SERS) methodologies for environmental and pharmaceutical applications. We address these challenges by developing roll-to-roll (R2R) UV-nanoimprint fabrication methods. Our development steps are the following: Firstly, the proof of concept structures are fabricated by the use of wafer-level processes in Si-based materials. Secondly, the master molds of successful designs are fabricated, and they are used to transfer the nanophotonic structures into polymer materials using sheet-level UV-nanoimprinting. Thirdly, the sheet-level nanoimprinting processes are transferred to roll-to-roll fabrication. In order to enhance roll-to-roll manufacturing capabilities, silicone-based polymer material development was carried out. In the different development phases, Photonic Crystal and SERS sensor structures with increasing complexities were fabricated using polymer materials in order to enhance sheet-level and roll-to-roll manufacturing processes. In addition, chemical and molecular imprint (MIP) functionalization methods were applied in the sensor demonstrators. In this paper, the process flow in fabricating large-area nanophotonic structures by the use of sheet-level and roll-to-roll UV- nanoimprinting is reported.

AB - Polymers have become an important material group in fabricating discrete photonic components and integrated optical devices. This is due to their good properties: high optical transmittance, versatile processability at relative low temperatures and potential for low-cost production. Recently, nanoimprinting or nanoimprint lithography (NIL) has obtained a plenty of research interest. In NIL, a mould is pressed against a substrate coated with a moldable material. After deformation of the material, the mold is separated and a replica of the mold is formed. Compared with conventional lithographic methods, imprinting is simple to carry out, requires less-complicated equipment and can provide high-resolution with high throughput. Nanoimprint lithography has shown potential to become a method for low-cost and high-throughput fabrication of nanostructures. We show the development process of nano-structured, large-area multi-parameter sensors using Photonic Crystal (PC) and Surface Enhanced Raman Scattering (SERS) methodologies for environmental and pharmaceutical applications. We address these challenges by developing roll-to-roll (R2R) UV-nanoimprint fabrication methods. Our development steps are the following: Firstly, the proof of concept structures are fabricated by the use of wafer-level processes in Si-based materials. Secondly, the master molds of successful designs are fabricated, and they are used to transfer the nanophotonic structures into polymer materials using sheet-level UV-nanoimprinting. Thirdly, the sheet-level nanoimprinting processes are transferred to roll-to-roll fabrication. In order to enhance roll-to-roll manufacturing capabilities, silicone-based polymer material development was carried out. In the different development phases, Photonic Crystal and SERS sensor structures with increasing complexities were fabricated using polymer materials in order to enhance sheet-level and roll-to-roll manufacturing processes. In addition, chemical and molecular imprint (MIP) functionalization methods were applied in the sensor demonstrators. In this paper, the process flow in fabricating large-area nanophotonic structures by the use of sheet-level and roll-to-roll UV- nanoimprinting is reported.

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DO - 10.1117/12.2052496

M3 - Conference article in proceedings

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VL - 9141

T3 - Proceedings of SPIE

BT - Proceedings

PB - International Society for Optics and Photonics SPIE

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Karioja P, Hiltunen J, Aikio S, Alajoki T, Tuominen J, Hiltunen M et al. Towards large-area roll-to-roll printed nanophotonic sensors. In Proceedings: SPIE 9141, Optical Sensing and Detection III, 91410D, 2014. Vol. 9141. Bellingham: International Society for Optics and Photonics SPIE. 2014. (Proceedings of SPIE, Vol. 9141). https://doi.org/10.1117/12.2052496