Towards roll-to-roll manufacturing: organic thin film transistors based on nanoimprinting lithography technique

Teemu Ruotsalainen, Kimmo Solehmainen, Johanna Hiitola-Keinänen, Jukka Hast, Markku Känsäkoski, Herbert Gold, Martin König, Cédric Rolin

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

In this paper bottom gate bottom contact organic thin film transistors utilizing R2R-processes for gate manufacturing, application of dielectric, application of imprint resist, and hot-embossing of source-drain patterns are demonstrated. Also the other process steps involved in the manufacturing process i.e. dry etching, evaporation of source-drain electrodes, lift-off, and evaporation of semiconductor can be made in a roll-to-roll fashion, thus making the manufacturing route roll-to-roll compatible. The work presented in this paper demonstrates that roll-to-roll NIL is applicable to create source-drain structures with channel lengths much smaller than achieved by other traditional R2R-printing techniques.
Original languageEnglish
Title of host publicationProceedings of the 8th International Conference on Multi-Material Micro Manufacture, 4M 2011
PublisherResearch publishing services
Pages325-327
ISBN (Print)978-981-07-0319-6
DOIs
Publication statusPublished - 2011
MoE publication typeA4 Article in a conference publication
Event8th International Conference on Multi-Material Micro Manufacture, 4M 2011 - Stuttgart, Germany
Duration: 8 Nov 201110 Nov 2011

Conference

Conference8th International Conference on Multi-Material Micro Manufacture, 4M 2011
Abbreviated title4M 2011
CountryGermany
CityStuttgart
Period8/11/1110/11/11

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Keywords

  • Organic transistor
  • roll-to-roll
  • printing
  • hot-embossing
  • NIL

Cite this

Ruotsalainen, T., Solehmainen, K., Hiitola-Keinänen, J., Hast, J., Känsäkoski, M., Gold, H., König, M., & Rolin, C. (2011). Towards roll-to-roll manufacturing: organic thin film transistors based on nanoimprinting lithography technique. In Proceedings of the 8th International Conference on Multi-Material Micro Manufacture, 4M 2011 (pp. 325-327). Research publishing services. https://doi.org/10.3850/978-981-07-0319-6_239