Towards wafer-scale 2D material sensors

Peter G. Steeneken; Miika Soikkeli; Sanna Arpiainen; Arto Rantala; Raivo Jaaniso; Roberto Pezone; Sten Vollebregt; Sebastian Lukas; Satender Kataria; Maurits J.A. Houmes; Ruslan Álvarez-Diduk; Kangho Lee; Hutomo Suryo Wasisto; Sebastian Anzinger; Marc Fueldner; Gerard J. Verbiest; Farbod Alijani; Dong Hoon Shin; Ermin Malic; Richard van Rijn; Tarja K. Nevanen; Alba Centeno; Amaia Zurutuza; Herre S.J. van der Zant; Arben Merkoçi; Georg S. Duesberg; Max C. Lemme

doi:10.1088/2053-1583/adac73

Towards wafer-scale 2D material sensors

Peter G. Steeneken^*, Miika Soikkeli, Sanna Arpiainen, Arto Rantala, Raivo Jaaniso, Roberto Pezone, Sten Vollebregt, Sebastian Lukas, Satender Kataria, Maurits J.A. Houmes, Ruslan Álvarez-Diduk, Kangho Lee, Hutomo Suryo Wasisto, Sebastian Anzinger, Marc Fueldner, Gerard J. Verbiest, Farbod Alijani, Dong Hoon Shin, Ermin Malic, Richard van RijnTarja K. Nevanen, Alba Centeno, Amaia Zurutuza, Herre S.J. van der Zant, Arben Merkoçi, Georg S. Duesberg, Max C. Lemme

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

Abstract

The unique properties of two-dimensional (2D) materials bring great promise to improve sensor performance and realise novel sensing principles. However, to enable their high-volume production, wafer-scale processes that allow integration with electronic readout circuits need to be developed. In this perspective, we review recent progress in on-chip 2D material sensors, and compare their performance to the state-of-the-art, with a focus on results achieved in the Graphene Flagship programme. We discuss transfer-based and transfer-free production flows and routes for complementary metal-oxide-semiconductor integration and prototype development. Finally, we give an outlook on the future of 2D material sensors, and sketch a roadmap towards realising their industrial and societal impact.

Original language	English
Article number	023002
Journal	2D Materials
Volume	12
Issue number	2
DOIs	https://doi.org/10.1088/2053-1583/adac73
Publication status	Published - 1 Apr 2025
MoE publication type	A1 Journal article-refereed

Funding

This work has received funding from European Union's Horizon 2020 research and innovation programme under Grant Agreement 881603 (Graphene Flagship Core 3). The ICN2 is funded by the CERCA programme/Generalitat de Catalunya. The ICN2 is supported by the Severo Ochoa Centres of Excellence programme, Grant CEX2021-001214-S, funded by MCIN/AEI/10.13039.501100011033.

Keywords

2D materials
CMOS
graphene
MEMS
NEMS
sensor
waferscale

Access to Document

10.1088/2053-1583/adac73Licence: CC BY

Cite this

Steeneken, P. G., Soikkeli, M., Arpiainen, S., Rantala, A., Jaaniso, R., Pezone, R., Vollebregt, S., Lukas, S., Kataria, S., Houmes, M. J. A., Álvarez-Diduk, R., Lee, K., Suryo Wasisto, H., Anzinger, S., Fueldner, M., Verbiest, G. J., Alijani, F., Hoon Shin, D., Malic, E., ... Lemme, M. C. (2025). Towards wafer-scale 2D material sensors. 2D Materials, 12(2), Article 023002. https://doi.org/10.1088/2053-1583/adac73

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abstract = "The unique properties of two-dimensional (2D) materials bring great promise to improve sensor performance and realise novel sensing principles. However, to enable their high-volume production, wafer-scale processes that allow integration with electronic readout circuits need to be developed. In this perspective, we review recent progress in on-chip 2D material sensors, and compare their performance to the state-of-the-art, with a focus on results achieved in the Graphene Flagship programme. We discuss transfer-based and transfer-free production flows and routes for complementary metal-oxide-semiconductor integration and prototype development. Finally, we give an outlook on the future of 2D material sensors, and sketch a roadmap towards realising their industrial and societal impact.",

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author = "Steeneken, {Peter G.} and Miika Soikkeli and Sanna Arpiainen and Arto Rantala and Raivo Jaaniso and Roberto Pezone and Sten Vollebregt and Sebastian Lukas and Satender Kataria and Houmes, {Maurits J.A.} and Ruslan {\'A}lvarez-Diduk and Kangho Lee and {Suryo Wasisto}, Hutomo and Sebastian Anzinger and Marc Fueldner and Verbiest, {Gerard J.} and Farbod Alijani and {Hoon Shin}, Dong and Ermin Malic and {van Rijn}, Richard and Nevanen, {Tarja K.} and Alba Centeno and Amaia Zurutuza and {van der Zant}, {Herre S.J.} and Arben Merko{\c c}i and Duesberg, {Georg S.} and Lemme, {Max C.}",

year = "2025",

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Steeneken, PG, Soikkeli, M, Arpiainen, S, Rantala, A, Jaaniso, R, Pezone, R, Vollebregt, S, Lukas, S, Kataria, S, Houmes, MJA, Álvarez-Diduk, R, Lee, K, Suryo Wasisto, H, Anzinger, S, Fueldner, M, Verbiest, GJ, Alijani, F, Hoon Shin, D, Malic, E, van Rijn, R, Nevanen, TK, Centeno, A, Zurutuza, A, van der Zant, HSJ, Merkoçi, A, Duesberg, GS & Lemme, MC 2025, 'Towards wafer-scale 2D material sensors', 2D Materials, vol. 12, no. 2, 023002. https://doi.org/10.1088/2053-1583/adac73

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AU - Soikkeli, Miika

AU - Arpiainen, Sanna

AU - Rantala, Arto

AU - Jaaniso, Raivo

AU - Pezone, Roberto

AU - Vollebregt, Sten

AU - Lukas, Sebastian

AU - Kataria, Satender

AU - Houmes, Maurits J.A.

AU - Álvarez-Diduk, Ruslan

AU - Lee, Kangho

AU - Suryo Wasisto, Hutomo

AU - Anzinger, Sebastian

AU - Fueldner, Marc

AU - Verbiest, Gerard J.

AU - Alijani, Farbod

AU - Hoon Shin, Dong

AU - Malic, Ermin

AU - van Rijn, Richard

AU - Nevanen, Tarja K.

AU - Centeno, Alba

AU - Zurutuza, Amaia

AU - van der Zant, Herre S.J.

AU - Merkoçi, Arben

AU - Duesberg, Georg S.

AU - Lemme, Max C.

PY - 2025/4/1

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N2 - The unique properties of two-dimensional (2D) materials bring great promise to improve sensor performance and realise novel sensing principles. However, to enable their high-volume production, wafer-scale processes that allow integration with electronic readout circuits need to be developed. In this perspective, we review recent progress in on-chip 2D material sensors, and compare their performance to the state-of-the-art, with a focus on results achieved in the Graphene Flagship programme. We discuss transfer-based and transfer-free production flows and routes for complementary metal-oxide-semiconductor integration and prototype development. Finally, we give an outlook on the future of 2D material sensors, and sketch a roadmap towards realising their industrial and societal impact.

AB - The unique properties of two-dimensional (2D) materials bring great promise to improve sensor performance and realise novel sensing principles. However, to enable their high-volume production, wafer-scale processes that allow integration with electronic readout circuits need to be developed. In this perspective, we review recent progress in on-chip 2D material sensors, and compare their performance to the state-of-the-art, with a focus on results achieved in the Graphene Flagship programme. We discuss transfer-based and transfer-free production flows and routes for complementary metal-oxide-semiconductor integration and prototype development. Finally, we give an outlook on the future of 2D material sensors, and sketch a roadmap towards realising their industrial and societal impact.

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KW - graphene

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SN - 2053-1583

VL - 12

JO - 2D Materials

JF - 2D Materials

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ER -

Towards wafer-scale 2D material sensors

Abstract

Funding

Keywords

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GrapheneCore3: Graphene Flagship Core Project 3

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Towards wafer-scale 2D material sensors

Abstract

Funding

Keywords

Access to Document

Other files and links

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Projects

GrapheneCore3: Graphene Flagship Core Project 3

Cite this