Traceability for surface roughness measurements by metrology AFM

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    2 Citations (Scopus)

    Abstract

    The aim of the study was to achieve traceability for micrometre-range surface roughness measurements made with a stylus instrument. Profile of the same sawtooth surface roughness standard of ISO type B was measured with both a metrology atomic force microscope (MAFM) and a stylus instrument. The effect of a larger tip size of the stylus instrument was corrected. The results for amplitude and wavelength were in good agreement, providing confidence for the measurement area of the instrument used for micrometre-range calibrations. The deviation at an amplitude of 1.5 μm was 27 nm.

    Original languageEnglish
    Title of host publicationProceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
    EditorsHendrik Van Brussel, Theresa Burke, H. Spaan, E. Brinksmeier, Theresa Burke, Theresa Burke
    PublisherEuspen
    Pages243-246
    Number of pages4
    Volume2
    ISBN (Print)978-095530826-0
    Publication statusPublished - 1 Jan 2009
    MoE publication typeA4 Article in a conference publication
    Event9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 - San Sebastian, Spain
    Duration: 2 Jun 20095 Jun 2009

    Conference

    Conference9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
    Country/TerritorySpain
    CitySan Sebastian
    Period2/06/095/06/09

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