Traceability for surface roughness measurements by metrology AFM

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)

Abstract

The aim of the study was to achieve traceability for micrometre-range surface roughness measurements made with a stylus instrument. Profile of the same sawtooth surface roughness standard of ISO type B was measured with both a metrology atomic force microscope (MAFM) and a stylus instrument. The effect of a larger tip size of the stylus instrument was corrected. The results for amplitude and wavelength were in good agreement, providing confidence for the measurement area of the instrument used for micrometre-range calibrations. The deviation at an amplitude of 1.5 μm was 27 nm.

Original languageEnglish
Title of host publicationProceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
EditorsHendrik Van Brussel, Theresa Burke, H. Spaan, E. Brinksmeier, Theresa Burke, Theresa Burke
PublisherEuspen
Pages243-246
Number of pages4
Volume2
ISBN (Print)978-095530826-0
Publication statusPublished - 1 Jan 2009
MoE publication typeA4 Article in a conference publication
Event9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 - San Sebastian, Spain
Duration: 2 Jun 20095 Jun 2009

Conference

Conference9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
CountrySpain
CitySan Sebastian
Period2/06/095/06/09

Fingerprint

Roughness measurement
Surface measurement
metrology
surface roughness
Surface roughness
atomic force microscopy
micrometers
confidence
Microscopes
microscopes
Calibration
deviation
Wavelength
profiles
wavelengths

Cite this

Hemming, B., Korpelainen, V., Seppä, J., & Lassila, A. (2009). Traceability for surface roughness measurements by metrology AFM. In H. Van Brussel, T. Burke, H. Spaan, E. Brinksmeier, T. Burke, & T. Burke (Eds.), Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 (Vol. 2, pp. 243-246). Euspen.
Hemming, B. ; Korpelainen, V. ; Seppä, J. ; Lassila, A. / Traceability for surface roughness measurements by metrology AFM. Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009. editor / Hendrik Van Brussel ; Theresa Burke ; H. Spaan ; E. Brinksmeier ; Theresa Burke ; Theresa Burke. Vol. 2 Euspen, 2009. pp. 243-246
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Hemming, B, Korpelainen, V, Seppä, J & Lassila, A 2009, Traceability for surface roughness measurements by metrology AFM. in H Van Brussel, T Burke, H Spaan, E Brinksmeier, T Burke & T Burke (eds), Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009. vol. 2, Euspen, pp. 243-246, 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009, San Sebastian, Spain, 2/06/09.

Traceability for surface roughness measurements by metrology AFM. / Hemming, B.; Korpelainen, V.; Seppä, J.; Lassila, A.

Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009. ed. / Hendrik Van Brussel; Theresa Burke; H. Spaan; E. Brinksmeier; Theresa Burke; Theresa Burke. Vol. 2 Euspen, 2009. p. 243-246.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Hemming B, Korpelainen V, Seppä J, Lassila A. Traceability for surface roughness measurements by metrology AFM. In Van Brussel H, Burke T, Spaan H, Brinksmeier E, Burke T, Burke T, editors, Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009. Vol. 2. Euspen. 2009. p. 243-246