Traceability for surface roughness measurements by metrology AFM

B. Hemming; V. Korpelainen; J. Seppä; A. Lassila

Traceability for surface roughness measurements by metrology AFM

B. Hemming, V. Korpelainen, J. Seppä, A. Lassila

Centre for Metrology and Accreditation Finland (MIKES)

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

3 Citations (Scopus)

Abstract

The aim of the study was to achieve traceability for micrometre-range surface roughness measurements made with a stylus instrument. Profile of the same sawtooth surface roughness standard of ISO type B was measured with both a metrology atomic force microscope (MAFM) and a stylus instrument. The effect of a larger tip size of the stylus instrument was corrected. The results for amplitude and wavelength were in good agreement, providing confidence for the measurement area of the instrument used for micrometre-range calibrations. The deviation at an amplitude of 1.5 μm was 27 nm.

Original language	English
Title of host publication	Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
Editors	Hendrik Van Brussel, Theresa Burke, H. Spaan, E. Brinksmeier, Theresa Burke, Theresa Burke
Publisher	Euspen
Pages	243-246
Number of pages	4
Volume	2
ISBN (Print)	978-095530826-0
Publication status	Published - 1 Jan 2009
MoE publication type	A4 Article in a conference publication
Event	9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 - San Sebastian, Spain Duration: 2 Jun 2009 → 5 Jun 2009

Conference

Conference	9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
Country/Territory	Spain
City	San Sebastian
Period	2/06/09 → 5/06/09

Cite this

Hemming, B., Korpelainen, V., Seppä, J., & Lassila, A. (2009). Traceability for surface roughness measurements by metrology AFM. In H. Van Brussel, T. Burke, H. Spaan, E. Brinksmeier, T. Burke, & T. Burke (Eds.), Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 (Vol. 2, pp. 243-246). Euspen.

Hemming, B. ; Korpelainen, V. ; Seppä, J. et al. / Traceability for surface roughness measurements by metrology AFM. Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009. editor / Hendrik Van Brussel ; Theresa Burke ; H. Spaan ; E. Brinksmeier ; Theresa Burke ; Theresa Burke. Vol. 2 Euspen, 2009. pp. 243-246

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title = "Traceability for surface roughness measurements by metrology AFM",

abstract = "The aim of the study was to achieve traceability for micrometre-range surface roughness measurements made with a stylus instrument. Profile of the same sawtooth surface roughness standard of ISO type B was measured with both a metrology atomic force microscope (MAFM) and a stylus instrument. The effect of a larger tip size of the stylus instrument was corrected. The results for amplitude and wavelength were in good agreement, providing confidence for the measurement area of the instrument used for micrometre-range calibrations. The deviation at an amplitude of 1.5 μm was 27 nm.",

author = "B. Hemming and V. Korpelainen and J. Sepp{\"a} and A. Lassila",

year = "2009",

month = jan,

day = "1",

language = "English",

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volume = "2",

pages = "243--246",

editor = "{Van Brussel}, Hendrik and Theresa Burke and H. Spaan and E. Brinksmeier and Theresa Burke and Theresa Burke",

booktitle = "Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009",

publisher = "Euspen",

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note = "9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 ; Conference date: 02-06-2009 Through 05-06-2009",

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Hemming, B , Korpelainen, V , Seppä, J & Lassila, A 2009, Traceability for surface roughness measurements by metrology AFM. in H Van Brussel, T Burke, H Spaan, E Brinksmeier, T Burke & T Burke (eds), Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009. vol. 2, Euspen, pp. 243-246, 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009, San Sebastian, Spain, 2/06/09.

Traceability for surface roughness measurements by metrology AFM. / Hemming, B.; Korpelainen, V.; Seppä, J. et al.
Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009. ed. / Hendrik Van Brussel; Theresa Burke; H. Spaan; E. Brinksmeier; Theresa Burke; Theresa Burke. Vol. 2 Euspen, 2009. p. 243-246.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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T1 - Traceability for surface roughness measurements by metrology AFM

AU - Hemming, B.

AU - Korpelainen, V.

AU - Seppä, J.

AU - Lassila, A.

PY - 2009/1/1

Y1 - 2009/1/1

N2 - The aim of the study was to achieve traceability for micrometre-range surface roughness measurements made with a stylus instrument. Profile of the same sawtooth surface roughness standard of ISO type B was measured with both a metrology atomic force microscope (MAFM) and a stylus instrument. The effect of a larger tip size of the stylus instrument was corrected. The results for amplitude and wavelength were in good agreement, providing confidence for the measurement area of the instrument used for micrometre-range calibrations. The deviation at an amplitude of 1.5 μm was 27 nm.

AB - The aim of the study was to achieve traceability for micrometre-range surface roughness measurements made with a stylus instrument. Profile of the same sawtooth surface roughness standard of ISO type B was measured with both a metrology atomic force microscope (MAFM) and a stylus instrument. The effect of a larger tip size of the stylus instrument was corrected. The results for amplitude and wavelength were in good agreement, providing confidence for the measurement area of the instrument used for micrometre-range calibrations. The deviation at an amplitude of 1.5 μm was 27 nm.

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M3 - Conference article in proceedings

AN - SCOPUS:84908218915

SN - 978-095530826-0

VL - 2

SP - 243

EP - 246

BT - Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009

A2 - Van Brussel, Hendrik

A2 - Burke, Theresa

A2 - Spaan, H.

A2 - Brinksmeier, E.

A2 - Burke, Theresa

PB - Euspen

T2 - 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009

Y2 - 2 June 2009 through 5 June 2009

ER -

Traceability for surface roughness measurements by metrology AFM

Abstract

Conference

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