Traceability for surface roughness measurements by metrology AFM

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Abstract

The aim of the study was to achieve traceability for micrometre-range surface roughness measurements made with a stylus instrument. Profile of the same sawtooth surface roughness standard of ISO type B was measured with both a metrology atomic force microscope (MAFM) and a stylus instrument. The effect of a larger tip size of the stylus instrument was corrected. The results for amplitude and wavelength were in good agreement, providing confidence for the measurement area of the instrument used for micrometre-range calibrations. The deviation at an amplitude of 1.5 μm was 27 nm.

Original languageEnglish
Title of host publicationProceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
EditorsHendrik Van Brussel, Theresa Burke, H. Spaan, E. Brinksmeier, Theresa Burke, Theresa Burke
PublisherEuspen
Pages243-246
Number of pages4
Volume2
ISBN (Print)978-095530826-0
Publication statusPublished - 1 Jan 2009
MoE publication typeA4 Article in a conference publication
Event9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 - San Sebastian, Spain
Duration: 2 Jun 20095 Jun 2009

Conference

Conference9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
CountrySpain
CitySan Sebastian
Period2/06/095/06/09

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Hemming, B., Korpelainen, V., Seppä, J., & Lassila, A. (2009). Traceability for surface roughness measurements by metrology AFM. In H. Van Brussel, T. Burke, H. Spaan, E. Brinksmeier, T. Burke, & T. Burke (Eds.), Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 (Vol. 2, pp. 243-246). Euspen.