Traceability of internal length scale in PillarHall thin film conformality test chips

Virpi Korpelainen; Feng Gao; Mari Laamanen; Oili M.E. Ylivaara; Jonas Sundqvist; Mikko Utriainen; Riikka L. Puurunen

Traceability of internal length scale in PillarHall thin film conformality test chips

Virpi Korpelainen, Feng Gao, Mari Laamanen, Oili M.E. Ylivaara, Jonas Sundqvist, Mikko Utriainen, Riikka L. Puurunen

Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.

Research output: Contribution to conference › Conference Abstract › Scientific

Original language	English
Publication status	Published - 2017
MoE publication type	Not Eligible
Event	5th Dresden Nanoanalysis Symposium "In-situ Microscopy" - Dresden, Germany Duration: 1 Sept 2017 → …

Conference

Conference	5th Dresden Nanoanalysis Symposium "In-situ Microscopy"
Country/Territory	Germany
City	Dresden
Period	1/09/17 → …

Keywords

OtaNano

Access to Document

https://www.nanoanalytik.fraunhofer.de/content/dam/nanoanalytik/de/documents/5th_Dresden_Nanoanalysis_Symposium_abstracts.pdf

OtaNano
VTT Technical Research Centre of Finland
Facility/equipment: Facility

Cite this

Korpelainen, V., Gao, F., Laamanen, M., Ylivaara, O. M. E., Sundqvist, J., Utriainen, M., & Puurunen, R. L. (2017). Traceability of internal length scale in PillarHall thin film conformality test chips. Abstract from 5th Dresden Nanoanalysis Symposium "In-situ Microscopy", Dresden, Germany. https://www.nanoanalytik.fraunhofer.de/content/dam/nanoanalytik/de/documents/5th_Dresden_Nanoanalysis_Symposium_abstracts.pdf

@conference{597c4e5779b24b36979e24d4a7b20202,

title = "Traceability of internal length scale in PillarHall thin film conformality test chips",

keywords = "OtaNano",

author = "Virpi Korpelainen and Feng Gao and Mari Laamanen and Ylivaara, {Oili M.E.} and Jonas Sundqvist and Mikko Utriainen and Puurunen, {Riikka L.}",

note = "Project code: 114596 ; 5th Dresden Nanoanalysis Symposium {"}In-situ Microscopy{"} ; Conference date: 01-09-2017",

year = "2017",

language = "English",

}

Korpelainen, V, Gao, F, Laamanen, M, Ylivaara, OME, Sundqvist, J, Utriainen, M & Puurunen, RL 2017, 'Traceability of internal length scale in PillarHall thin film conformality test chips', 5th Dresden Nanoanalysis Symposium "In-situ Microscopy", Dresden, Germany, 1/09/17. <https://www.nanoanalytik.fraunhofer.de/content/dam/nanoanalytik/de/documents/5th_Dresden_Nanoanalysis_Symposium_abstracts.pdf>

TY - CONF

T1 - Traceability of internal length scale in PillarHall thin film conformality test chips

AU - Korpelainen, Virpi

AU - Gao, Feng

AU - Laamanen, Mari

AU - Ylivaara, Oili M.E.

AU - Sundqvist, Jonas

AU - Utriainen, Mikko

AU - Puurunen, Riikka L.

N1 - Project code: 114596

PY - 2017

Y1 - 2017

KW - OtaNano

M3 - Conference Abstract

T2 - 5th Dresden Nanoanalysis Symposium "In-situ Microscopy"

Y2 - 1 September 2017

ER -

Traceability of internal length scale in PillarHall thin film conformality test chips

Conference

Keywords

Access to Document

Equipment

OtaNano

Cite this