Traceability of internal length scale in PillarHall thin film conformality test chips

Virpi Korpelainen, Feng Gao, Mari Laamanen, Oili M.E. Ylivaara, Jonas Sundqvist, Mikko Utriainen, Riikka L. Puurunen

Research output: Contribution to conferenceConference AbstractScientific

Original languageEnglish
Publication statusPublished - 2017
MoE publication typeNot Eligible
Event5th Dresden Nanoanalysis Symposium "In-situ Microscopy" - Dresden, Germany
Duration: 1 Sep 2017 → …

Conference

Conference5th Dresden Nanoanalysis Symposium "In-situ Microscopy"
CountryGermany
CityDresden
Period1/09/17 → …

Keywords

  • OtaNano

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