Traceability of internal length scale in PillarHall thin film conformality test chips

Virpi Korpelainen, Feng Gao, Mari Laamanen, Oili M.E. Ylivaara, Jonas Sundqvist, Mikko Utriainen, Riikka L. Puurunen

Research output: Contribution to conferenceConference AbstractScientific

Original languageEnglish
Publication statusPublished - 2017
Event5th Dresden Nanoanalysis Symposium "In-situ Microscopy" - Dresden, Germany
Duration: 1 Sep 2017 → …

Conference

Conference5th Dresden Nanoanalysis Symposium "In-situ Microscopy"
CountryGermany
CityDresden
Period1/09/17 → …

Cite this

Korpelainen, V., Gao, F., Laamanen, M., Ylivaara, O. M. E., Sundqvist, J., Utriainen, M., & Puurunen, R. L. (2017). Traceability of internal length scale in PillarHall thin film conformality test chips. Abstract from 5th Dresden Nanoanalysis Symposium "In-situ Microscopy", Dresden, Germany.
Korpelainen, Virpi ; Gao, Feng ; Laamanen, Mari ; Ylivaara, Oili M.E. ; Sundqvist, Jonas ; Utriainen, Mikko ; Puurunen, Riikka L. / Traceability of internal length scale in PillarHall thin film conformality test chips. Abstract from 5th Dresden Nanoanalysis Symposium "In-situ Microscopy", Dresden, Germany.
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title = "Traceability of internal length scale in PillarHall thin film conformality test chips",
author = "Virpi Korpelainen and Feng Gao and Mari Laamanen and Ylivaara, {Oili M.E.} and Jonas Sundqvist and Mikko Utriainen and Puurunen, {Riikka L.}",
note = "Project code: 114596 ; 5th Dresden Nanoanalysis Symposium {"}In-situ Microscopy{"} ; Conference date: 01-09-2017",
year = "2017",
language = "English",

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Korpelainen, V, Gao, F, Laamanen, M, Ylivaara, OME, Sundqvist, J, Utriainen, M & Puurunen, RL 2017, 'Traceability of internal length scale in PillarHall thin film conformality test chips' 5th Dresden Nanoanalysis Symposium "In-situ Microscopy", Dresden, Germany, 1/09/17, .

Traceability of internal length scale in PillarHall thin film conformality test chips. / Korpelainen, Virpi; Gao, Feng; Laamanen, Mari; Ylivaara, Oili M.E.; Sundqvist, Jonas; Utriainen, Mikko; Puurunen, Riikka L.

2017. Abstract from 5th Dresden Nanoanalysis Symposium "In-situ Microscopy", Dresden, Germany.

Research output: Contribution to conferenceConference AbstractScientific

TY - CONF

T1 - Traceability of internal length scale in PillarHall thin film conformality test chips

AU - Korpelainen, Virpi

AU - Gao, Feng

AU - Laamanen, Mari

AU - Ylivaara, Oili M.E.

AU - Sundqvist, Jonas

AU - Utriainen, Mikko

AU - Puurunen, Riikka L.

N1 - Project code: 114596

PY - 2017

Y1 - 2017

M3 - Conference Abstract

ER -

Korpelainen V, Gao F, Laamanen M, Ylivaara OME, Sundqvist J, Utriainen M et al. Traceability of internal length scale in PillarHall thin film conformality test chips. 2017. Abstract from 5th Dresden Nanoanalysis Symposium "In-situ Microscopy", Dresden, Germany.