Traceability of internal length scale in PillarHall thin film conformality test chips

Virpi Korpelainen; Feng Gao; Mari Laamanen; Oili M.E. Ylivaara; Jonas Sundqvist; Mikko Utriainen; Riikka L. Puurunen

Traceability of internal length scale in PillarHall thin film conformality test chips

Virpi Korpelainen
, Feng Gao
, Mari Laamanen
, Oili M.E. Ylivaara
, Jonas Sundqvist
, Mikko Utriainen
, Riikka L. Puurunen

Research output: Contribution to conference › Conference Abstract › Scientific

Original language	English
Publication status	Published - 2017
MoE publication type	Not Eligible
Event	5th Dresden Nanoanalysis Symposium "In-situ Microscopy" - Dresden, Germany Duration: 1 Sept 2017 → …

Conference

Conference	5th Dresden Nanoanalysis Symposium "In-situ Microscopy"
Country/Territory	Germany
City	Dresden
Period	1/09/17 → …

Keywords

OtaNano

Access to Document

https://www.nanoanalytik.fraunhofer.de/content/dam/nanoanalytik/de/documents/5th_Dresden_Nanoanalysis_Symposium_abstracts.pdf

OtaNano
VTT Technical Research Centre of Finland
Facility/equipment: Facility

Cite this

Korpelainen, V., Gao, F., Laamanen, M., Ylivaara, O. M. E., Sundqvist, J., Utriainen, M., & Puurunen, R. L. (2017). Traceability of internal length scale in PillarHall thin film conformality test chips. Abstract from 5th Dresden Nanoanalysis Symposium "In-situ Microscopy", Dresden, Germany. https://www.nanoanalytik.fraunhofer.de/content/dam/nanoanalytik/de/documents/5th_Dresden_Nanoanalysis_Symposium_abstracts.pdf

@conference{597c4e5779b24b36979e24d4a7b20202,

title = "Traceability of internal length scale in PillarHall thin film conformality test chips",

keywords = "OtaNano",

author = "Virpi Korpelainen and Feng Gao and Mari Laamanen and Ylivaara, \{Oili M.E.\} and Jonas Sundqvist and Mikko Utriainen and Puurunen, \{Riikka L.\}",

note = "Project code: 114596 ; 5th Dresden Nanoanalysis Symposium {"}In-situ Microscopy{"} ; Conference date: 01-09-2017",

year = "2017",

language = "English",

}

Korpelainen, V, Gao, F, Laamanen, M, Ylivaara, OME, Sundqvist, J, Utriainen, M & Puurunen, RL 2017, 'Traceability of internal length scale in PillarHall thin film conformality test chips', 5th Dresden Nanoanalysis Symposium "In-situ Microscopy", Dresden, Germany, 1/09/17. <https://www.nanoanalytik.fraunhofer.de/content/dam/nanoanalytik/de/documents/5th_Dresden_Nanoanalysis_Symposium_abstracts.pdf>

TY - CONF

T1 - Traceability of internal length scale in PillarHall thin film conformality test chips

AU - Korpelainen, Virpi

AU - Gao, Feng

AU - Laamanen, Mari

AU - Ylivaara, Oili M.E.

AU - Sundqvist, Jonas

AU - Utriainen, Mikko

AU - Puurunen, Riikka L.

N1 - Project code: 114596

PY - 2017

Y1 - 2017

KW - OtaNano

M3 - Conference Abstract

T2 - 5th Dresden Nanoanalysis Symposium "In-situ Microscopy"

Y2 - 1 September 2017

ER -

Traceability of internal length scale in PillarHall thin film conformality test chips

Conference

Keywords

Access to Document

Equipment

OtaNano

Cite this