Traceability of internal length scale in PillarHall thin film conformality test chips

Virpi Korpelainen, Feng Gao, Mari Laamanen, Oili M.E. Ylivaara, Jonas Sundqvist, Mikko Utriainen, Riikka L. Puurunen

    Research output: Contribution to conferenceConference AbstractScientific

    Original languageEnglish
    Publication statusPublished - 2017
    MoE publication typeNot Eligible
    Event5th Dresden Nanoanalysis Symposium "In-situ Microscopy" - Dresden, Germany
    Duration: 1 Sep 2017 → …

    Conference

    Conference5th Dresden Nanoanalysis Symposium "In-situ Microscopy"
    Country/TerritoryGermany
    CityDresden
    Period1/09/17 → …

    Keywords

    • OtaNano

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