Traceability of internal length scale in PillarHall thin film conformality test chips

Virpi Korpelainen, Feng Gao, Mari Laamanen, Oili M.E. Ylivaara, Jonas Sundqvist, Mikko Utriainen, Riikka L. Puurunen

Research output: Contribution to conferenceConference AbstractScientific

Search results