Traceable characterization of a bending millimetre scale cantilever for nanoforce sensing

Leena Stenlund; Kari Riski; Jeremias Seppä; M. Pudas; M. Vähäsöyrinki; v. Tuhkanen; J. Röning

doi:10.1088/0957-0233/21/7/075102

Traceable characterization of a bending millimetre scale cantilever for nanoforce sensing

Leena Stenlund, Kari Riski, Jeremias Seppä, M. Pudas, M. Vähäsöyrinki, v. Tuhkanen, J. Röning

University of Oulu

Research output: Contribution to journal › Article › Scientific › peer-review

6 Citations (Scopus)

Abstract

We have developed and characterized a force measuring system that is able to measure small forces down to 50 nN. The force measuring system and the characterizing method are described, thoroughly tested and analysed. The force measuring system consists of a linear positioner, a bending cantilever and an optical detection system for detecting the bending of the cantilever displacement. Characterization was carried out with a microbalance and a laser interferometer. The characterized measurement range of the system is from 50 nN to 1.5 mN. The performance of the system is limited by the linearity of the positioner and the noise of the optical sensor detecting the cantilever bending. The characterization system was found to be adequate for force sensors in the nanonewton range. The results are traceable to mass and acceleration of gravity, which makes the measurements reliable and comparable to other force measurements and applications.

Original language	English
Number of pages	9
Journal	Measurement Science and Technology
Volume	21
Issue number	7
DOIs	https://doi.org/10.1088/0957-0233/21/7/075102
Publication status	Published - 2010
MoE publication type	A1 Journal article-refereed

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title = "Traceable characterization of a bending millimetre scale cantilever for nanoforce sensing",

abstract = "We have developed and characterized a force measuring system that is able to measure small forces down to 50 nN. The force measuring system and the characterizing method are described, thoroughly tested and analysed. The force measuring system consists of a linear positioner, a bending cantilever and an optical detection system for detecting the bending of the cantilever displacement. Characterization was carried out with a microbalance and a laser interferometer. The characterized measurement range of the system is from 50 nN to 1.5 mN. The performance of the system is limited by the linearity of the positioner and the noise of the optical sensor detecting the cantilever bending. The characterization system was found to be adequate for force sensors in the nanonewton range. The results are traceable to mass and acceleration of gravity, which makes the measurements reliable and comparable to other force measurements and applications.",

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T1 - Traceable characterization of a bending millimetre scale cantilever for nanoforce sensing

AU - Stenlund, Leena

AU - Riski, Kari

AU - Seppä, Jeremias

AU - Pudas, M.

AU - Vähäsöyrinki, M.

AU - Tuhkanen, v.

AU - Röning, J.

PY - 2010

Y1 - 2010

N2 - We have developed and characterized a force measuring system that is able to measure small forces down to 50 nN. The force measuring system and the characterizing method are described, thoroughly tested and analysed. The force measuring system consists of a linear positioner, a bending cantilever and an optical detection system for detecting the bending of the cantilever displacement. Characterization was carried out with a microbalance and a laser interferometer. The characterized measurement range of the system is from 50 nN to 1.5 mN. The performance of the system is limited by the linearity of the positioner and the noise of the optical sensor detecting the cantilever bending. The characterization system was found to be adequate for force sensors in the nanonewton range. The results are traceable to mass and acceleration of gravity, which makes the measurements reliable and comparable to other force measurements and applications.

AB - We have developed and characterized a force measuring system that is able to measure small forces down to 50 nN. The force measuring system and the characterizing method are described, thoroughly tested and analysed. The force measuring system consists of a linear positioner, a bending cantilever and an optical detection system for detecting the bending of the cantilever displacement. Characterization was carried out with a microbalance and a laser interferometer. The characterized measurement range of the system is from 50 nN to 1.5 mN. The performance of the system is limited by the linearity of the positioner and the noise of the optical sensor detecting the cantilever bending. The characterization system was found to be adequate for force sensors in the nanonewton range. The results are traceable to mass and acceleration of gravity, which makes the measurements reliable and comparable to other force measurements and applications.

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DO - 10.1088/0957-0233/21/7/075102

M3 - Article

SN - 0957-0233

VL - 21

JO - Measurement Science and Technology

JF - Measurement Science and Technology

IS - 7

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Traceable characterization of a bending millimetre scale cantilever for nanoforce sensing

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