Traceable quasi-dynamic stroboscopic scanning white light interferometry

Ville Vili Heikkinen, Anton Nolvi, Tor Paulin, Jeremias Seppä, Ivan Kassamakov, Antti Lassila, Edward Hæggström

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

We addressed the question of how to assign confidence limits to the measured trajectory of a moving MEMS membrane. This was done by calibrating our SSWLI setup using a traceable piezoelectric transducer as a transfer standard. We calibrated our SSWLI setup for quasi-dynamic measurements of vertical movements up to 14 μm with standard uncertainty of 9.4 nm.

Original languageEnglish
Title of host publicationFringe 2013
Subtitle of host publication7th International Workshop on Advanced Optical Imaging and Metrology
PublisherSpringer
Pages491-496
Number of pages6
ISBN (Electronic)978-3-642-36359-7
ISBN (Print)978-3-642-36358-0
DOIs
Publication statusPublished - 1 Jan 2014
MoE publication typeA4 Article in a conference publication
Event7th International Workshop on Advanced Optical Imaging and Metrology, Fringe 2013 - Nurtingen, Germany
Duration: 1 Jan 20141 Jan 2014

Conference

Conference7th International Workshop on Advanced Optical Imaging and Metrology, Fringe 2013
CountryGermany
CityNurtingen
Period1/01/141/01/14

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  • Cite this

    Heikkinen, V. V., Nolvi, A., Paulin, T., Seppä, J., Kassamakov, I., Lassila, A., & Hæggström, E. (2014). Traceable quasi-dynamic stroboscopic scanning white light interferometry. In Fringe 2013: 7th International Workshop on Advanced Optical Imaging and Metrology (pp. 491-496). Springer. https://doi.org/10.1007/978-3-642-36359-7_86