Traceable quasi-dynamic stroboscopic scanning white light interferometry

Ville Vili Heikkinen; Anton Nolvi; Tor Paulin; Jeremias Seppä; Ivan Kassamakov; Antti Lassila; Edward Hæggström

doi:10.1007/978-3-642-36359-7_86

Traceable quasi-dynamic stroboscopic scanning white light interferometry

Ville Vili Heikkinen, Anton Nolvi, Tor Paulin, Jeremias Seppä, Ivan Kassamakov, Antti Lassila, Edward Hæggström

University of Helsinki

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

We addressed the question of how to assign confidence limits to the measured trajectory of a moving MEMS membrane. This was done by calibrating our SSWLI setup using a traceable piezoelectric transducer as a transfer standard. We calibrated our SSWLI setup for quasi-dynamic measurements of vertical movements up to 14 μm with standard uncertainty of 9.4 nm.

Original language	English
Title of host publication	Fringe 2013
Subtitle of host publication	7th International Workshop on Advanced Optical Imaging and Metrology
Publisher	Springer
Pages	491-496
ISBN (Electronic)	978-3-642-36359-7
ISBN (Print)	978-3-642-36358-0
DOIs	https://doi.org/10.1007/978-3-642-36359-7_86
Publication status	Published - 1 Jan 2014
MoE publication type	A4 Article in a conference publication
Event	7th International Workshop on Advanced Optical Imaging and Metrology, Fringe 2013 - Nurtingen, Germany Duration: 1 Jan 2014 → 1 Jan 2014

Conference

Conference	7th International Workshop on Advanced Optical Imaging and Metrology, Fringe 2013
Country/Territory	Germany
City	Nurtingen
Period	1/01/14 → 1/01/14

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10.1007/978-3-642-36359-7_86

Cite this

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title = "Traceable quasi-dynamic stroboscopic scanning white light interferometry",

abstract = "We addressed the question of how to assign confidence limits to the measured trajectory of a moving MEMS membrane. This was done by calibrating our SSWLI setup using a traceable piezoelectric transducer as a transfer standard. We calibrated our SSWLI setup for quasi-dynamic measurements of vertical movements up to 14 μm with standard uncertainty of 9.4 nm.",

author = "Heikkinen, {Ville Vili} and Anton Nolvi and Tor Paulin and Jeremias Sepp{\"a} and Ivan Kassamakov and Antti Lassila and Edward H{\ae}ggstr{\"o}m",

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Heikkinen, VV, Nolvi, A, Paulin, T, Seppä, J, Kassamakov, I, Lassila, A & Hæggström, E 2014, Traceable quasi-dynamic stroboscopic scanning white light interferometry. in Fringe 2013: 7th International Workshop on Advanced Optical Imaging and Metrology. Springer, pp. 491-496, 7th International Workshop on Advanced Optical Imaging and Metrology, Fringe 2013, Nurtingen, Germany, 1/01/14. https://doi.org/10.1007/978-3-642-36359-7_86

Traceable quasi-dynamic stroboscopic scanning white light interferometry. / Heikkinen, Ville Vili; Nolvi, Anton; Paulin, Tor et al.
Fringe 2013: 7th International Workshop on Advanced Optical Imaging and Metrology. Springer, 2014. p. 491-496.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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AU - Heikkinen, Ville Vili

AU - Nolvi, Anton

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AU - Lassila, Antti

AU - Hæggström, Edward

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AB - We addressed the question of how to assign confidence limits to the measured trajectory of a moving MEMS membrane. This was done by calibrating our SSWLI setup using a traceable piezoelectric transducer as a transfer standard. We calibrated our SSWLI setup for quasi-dynamic measurements of vertical movements up to 14 μm with standard uncertainty of 9.4 nm.

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T2 - 7th International Workshop on Advanced Optical Imaging and Metrology, Fringe 2013

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Traceable quasi-dynamic stroboscopic scanning white light interferometry

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