Traceable quasi-dynamic stroboscopic scanning white light interferometry

Ville Vili Heikkinen, Anton Nolvi, Tor Paulin, Jeremias Seppä, Ivan Kassamakov, Antti Lassila, Edward Hæggström

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    We addressed the question of how to assign confidence limits to the measured trajectory of a moving MEMS membrane. This was done by calibrating our SSWLI setup using a traceable piezoelectric transducer as a transfer standard. We calibrated our SSWLI setup for quasi-dynamic measurements of vertical movements up to 14 μm with standard uncertainty of 9.4 nm.

    Original languageEnglish
    Title of host publicationFringe 2013
    Subtitle of host publication7th International Workshop on Advanced Optical Imaging and Metrology
    PublisherSpringer
    Pages491-496
    Number of pages6
    ISBN (Electronic)978-3-642-36359-7
    ISBN (Print)978-3-642-36358-0
    DOIs
    Publication statusPublished - 1 Jan 2014
    MoE publication typeA4 Article in a conference publication
    Event7th International Workshop on Advanced Optical Imaging and Metrology, Fringe 2013 - Nurtingen, Germany
    Duration: 1 Jan 20141 Jan 2014

    Conference

    Conference7th International Workshop on Advanced Optical Imaging and Metrology, Fringe 2013
    Country/TerritoryGermany
    CityNurtingen
    Period1/01/141/01/14

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