Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level

Yassir Arezki; Rong Su; Ville Heikkinen; François Leprete; Pavel Posta; Youichi Bitou; Christian Schober; Charyar Mehdi-Souzani; Bandar Abdulrahman Mohammed Alzahrani; Xiangchao Zhang; Yohan Kondo; Christof Pruss; Vit Ledl; Nabil Anwer; Mohamed Lamjed Bouazizi; Richard Leach; Hichem Nouira

doi:10.3390/s21041103

Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level

Yassir Arezki, Rong Su, Ville Heikkinen, François Leprete, Pavel Posta, Youichi Bitou, Christian Schober, Charyar Mehdi-Souzani^*, Bandar Abdulrahman Mohammed Alzahrani, Xiangchao Zhang, Yohan Kondo, Christof Pruss, Vit Ledl, Nabil Anwer, Mohamed Lamjed Bouazizi, Richard Leach, Hichem Nouira^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

3 Citations (Scopus)

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Abstract

The design of innovative reference aspheric and freeform optical elements was investi-gated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the val-ues of form error. Agreement among the results of several partners was observed, which demon-strates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.

Original language	English
Article number	1103
Pages (from-to)	1-19
Number of pages	19
Journal	Sensors
Volume	21
Issue number	4
DOIs	https://doi.org/10.3390/s21041103
Publication status	Published - 5 Feb 2021
MoE publication type	A1 Journal article-refereed

Funding

The authors extend their appreciation to the Deputyship for Research & Innovation, Ministry of Education in Saudi Arabia for funding this research work through the project number 369.

Keywords

Aspheric and freeform optical elements
Dimensional metrology
Measured data evaluation
Robust reference minimum zone (Hybrid Trust Region) fitting
Ultra-high precision measuring machine
Uncertainty

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s21041103Final published version, 6.08 MBLicence: CC BY

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Arezki, Y., Su, R., Heikkinen, V., Leprete, F., Posta, P., Bitou, Y., Schober, C., Mehdi-Souzani, C., Alzahrani, B. A. M., Zhang, X., Kondo, Y., Pruss, C., Ledl, V., Anwer, N., Bouazizi, M. L., Leach, R., & Nouira, H. (2021). Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level. Sensors, 21(4), 1-19. Article 1103. https://doi.org/10.3390/s21041103

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abstract = "The design of innovative reference aspheric and freeform optical elements was investi-gated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the val-ues of form error. Agreement among the results of several partners was observed, which demon-strates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.",

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Arezki, Y, Su, R, Heikkinen, V, Leprete, F, Posta, P, Bitou, Y, Schober, C, Mehdi-Souzani, C, Alzahrani, BAM, Zhang, X, Kondo, Y, Pruss, C, Ledl, V, Anwer, N, Bouazizi, ML, Leach, R & Nouira, H 2021, 'Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level', Sensors, vol. 21, no. 4, 1103, pp. 1-19. https://doi.org/10.3390/s21041103

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AU - Pruss, Christof

AU - Ledl, Vit

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Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level

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