Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level

Yassir Arezki; Rong Su; Ville Heikkinen; François Leprete; Pavel Posta; Youichi Bitou; Christian Schober; Charyar Mehdi-Souzani; Bandar Abdulrahman Mohammed Alzahrani; Xiangchao Zhang; Yohan Kondo; Christof Pruss; Vit Ledl; Nabil Anwer; Mohamed Lamjed Bouazizi; Richard Leach; Hichem Nouira

doi:10.3390/s21041103

Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level

Yassir Arezki, Rong Su, Ville Heikkinen, François Leprete, Pavel Posta, Youichi Bitou, Christian Schober, Charyar Mehdi-Souzani (Corresponding Author), Bandar Abdulrahman Mohammed Alzahrani, Xiangchao Zhang, Yohan Kondo, Christof Pruss, Vit Ledl, Nabil Anwer, Mohamed Lamjed Bouazizi, Richard Leach, Hichem Nouira (Corresponding Author)

BA6601 Length metrology

Research output: Contribution to journal › Article › Scientific › peer-review

46 Downloads (Pure)

Abstract

The design of innovative reference aspheric and freeform optical elements was investi-gated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the val-ues of form error. Agreement among the results of several partners was observed, which demon-strates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.

Original language	English
Article number	1103
Pages (from-to)	1-19
Number of pages	19
Journal	Sensors (Switzerland)
Volume	21
Issue number	4
DOIs	https://doi.org/10.3390/s21041103
Publication status	Published - 5 Feb 2021
MoE publication type	A1 Journal article-refereed

Keywords

Aspheric and freeform optical elements
Dimensional metrology
Measured data evaluation
Robust reference minimum zone (Hybrid Trust Region) fitting
Ultra-high precision measuring machine
Uncertainty

Access to Document

10.3390/s21041103Licence: CC BY

s21041103Final published version, 6.08 MBLicence: CC BY

Cite this

Arezki, Y., Su, R., Heikkinen, V., Leprete, F., Posta, P., Bitou, Y., Schober, C., Mehdi-Souzani, C., Alzahrani, B. A. M., Zhang, X., Kondo, Y., Pruss, C., Ledl, V., Anwer, N., Bouazizi, M. L., Leach, R., & Nouira, H. (2021). Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level. Sensors (Switzerland), 21(4), 1-19. [1103]. https://doi.org/10.3390/s21041103

Arezki, Yassir ; Su, Rong ; Heikkinen, Ville ; Leprete, François ; Posta, Pavel ; Bitou, Youichi ; Schober, Christian ; Mehdi-Souzani, Charyar ; Alzahrani, Bandar Abdulrahman Mohammed ; Zhang, Xiangchao ; Kondo, Yohan ; Pruss, Christof ; Ledl, Vit ; Anwer, Nabil ; Bouazizi, Mohamed Lamjed ; Leach, Richard ; Nouira, Hichem. / Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level. In: Sensors (Switzerland). 2021 ; Vol. 21, No. 4. pp. 1-19.

@article{3d9fd85913854c4db5ff5e81c30c6ae4,

title = "Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level",

abstract = "The design of innovative reference aspheric and freeform optical elements was investi-gated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the val-ues of form error. Agreement among the results of several partners was observed, which demon-strates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.",

keywords = "Aspheric and freeform optical elements, Dimensional metrology, Measured data evaluation, Robust reference minimum zone (Hybrid Trust Region) fitting, Ultra-high precision measuring machine, Uncertainty",

author = "Yassir Arezki and Rong Su and Ville Heikkinen and Fran{\c c}ois Leprete and Pavel Posta and Youichi Bitou and Christian Schober and Charyar Mehdi-Souzani and Alzahrani, {Bandar Abdulrahman Mohammed} and Xiangchao Zhang and Yohan Kondo and Christof Pruss and Vit Ledl and Nabil Anwer and Bouazizi, {Mohamed Lamjed} and Richard Leach and Hichem Nouira",

note = "Funding Information: Acknowledgments: The authors extend their appreciation to the Deputyship for Research & Innovation, Ministry of Education in Saudi Arabia for funding this research work through the project number 369. Publisher Copyright: {\textcopyright} 2021 by the authors. Licensee MDPI, Basel, Switzerland. Copyright: Copyright 2021 Elsevier B.V., All rights reserved.",

year = "2021",

month = feb,

day = "5",

doi = "10.3390/s21041103",

language = "English",

volume = "21",

pages = "1--19",

journal = "Sensors",

issn = "1424-8220",

publisher = "MDPI",

number = "4",

}

Arezki, Y, Su, R, Heikkinen, V, Leprete, F, Posta, P, Bitou, Y, Schober, C, Mehdi-Souzani, C, Alzahrani, BAM, Zhang, X, Kondo, Y, Pruss, C, Ledl, V, Anwer, N, Bouazizi, ML, Leach, R & Nouira, H 2021, 'Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level', Sensors (Switzerland), vol. 21, no. 4, 1103, pp. 1-19. https://doi.org/10.3390/s21041103

Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level. / Arezki, Yassir; Su, Rong; Heikkinen, Ville; Leprete, François; Posta, Pavel; Bitou, Youichi; Schober, Christian; Mehdi-Souzani, Charyar (Corresponding Author); Alzahrani, Bandar Abdulrahman Mohammed; Zhang, Xiangchao; Kondo, Yohan; Pruss, Christof; Ledl, Vit; Anwer, Nabil; Bouazizi, Mohamed Lamjed; Leach, Richard; Nouira, Hichem (Corresponding Author).

In: Sensors (Switzerland), Vol. 21, No. 4, 1103, 05.02.2021, p. 1-19.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level

AU - Arezki, Yassir

AU - Su, Rong

AU - Heikkinen, Ville

AU - Leprete, François

AU - Posta, Pavel

AU - Bitou, Youichi

AU - Schober, Christian

AU - Mehdi-Souzani, Charyar

AU - Alzahrani, Bandar Abdulrahman Mohammed

AU - Zhang, Xiangchao

AU - Kondo, Yohan

AU - Pruss, Christof

AU - Ledl, Vit

AU - Anwer, Nabil

AU - Bouazizi, Mohamed Lamjed

AU - Leach, Richard

AU - Nouira, Hichem

N1 - Funding Information: Acknowledgments: The authors extend their appreciation to the Deputyship for Research & Innovation, Ministry of Education in Saudi Arabia for funding this research work through the project number 369. Publisher Copyright: © 2021 by the authors. Licensee MDPI, Basel, Switzerland. Copyright: Copyright 2021 Elsevier B.V., All rights reserved.

PY - 2021/2/5

Y1 - 2021/2/5

N2 - The design of innovative reference aspheric and freeform optical elements was investi-gated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the val-ues of form error. Agreement among the results of several partners was observed, which demon-strates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.

AB - The design of innovative reference aspheric and freeform optical elements was investi-gated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the val-ues of form error. Agreement among the results of several partners was observed, which demon-strates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.

KW - Aspheric and freeform optical elements

KW - Dimensional metrology

KW - Measured data evaluation

KW - Robust reference minimum zone (Hybrid Trust Region) fitting

KW - Ultra-high precision measuring machine

KW - Uncertainty

UR - http://www.scopus.com/inward/record.url?scp=85100456319&partnerID=8YFLogxK

U2 - 10.3390/s21041103

DO - 10.3390/s21041103

M3 - Article

C2 - 33562598

AN - SCOPUS:85100456319

VL - 21

SP - 1

EP - 19

JO - Sensors

JF - Sensors

SN - 1424-8220

IS - 4

M1 - 1103

ER -

Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this