TY - JOUR
T1 - Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level
AU - Arezki, Yassir
AU - Su, Rong
AU - Heikkinen, Ville
AU - Leprete, François
AU - Posta, Pavel
AU - Bitou, Youichi
AU - Schober, Christian
AU - Mehdi-Souzani, Charyar
AU - Alzahrani, Bandar Abdulrahman Mohammed
AU - Zhang, Xiangchao
AU - Kondo, Yohan
AU - Pruss, Christof
AU - Ledl, Vit
AU - Anwer, Nabil
AU - Bouazizi, Mohamed Lamjed
AU - Leach, Richard
AU - Nouira, Hichem
N1 - Funding Information:
Acknowledgments: The authors extend their appreciation to the Deputyship for Research & Innovation, Ministry of Education in Saudi Arabia for funding this research work through the project number 369.
Publisher Copyright:
© 2021 by the authors. Licensee MDPI, Basel, Switzerland.
Copyright:
Copyright 2021 Elsevier B.V., All rights reserved.
PY - 2021/2/5
Y1 - 2021/2/5
N2 - The design of innovative reference aspheric and freeform optical elements was investi-gated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the val-ues of form error. Agreement among the results of several partners was observed, which demon-strates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.
AB - The design of innovative reference aspheric and freeform optical elements was investi-gated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the val-ues of form error. Agreement among the results of several partners was observed, which demon-strates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.
KW - Aspheric and freeform optical elements
KW - Dimensional metrology
KW - Measured data evaluation
KW - Robust reference minimum zone (Hybrid Trust Region) fitting
KW - Ultra-high precision measuring machine
KW - Uncertainty
UR - http://www.scopus.com/inward/record.url?scp=85100456319&partnerID=8YFLogxK
U2 - 10.3390/s21041103
DO - 10.3390/s21041103
M3 - Article
C2 - 33562598
AN - SCOPUS:85100456319
VL - 21
SP - 1
EP - 19
JO - Sensors
JF - Sensors
SN - 1424-8220
IS - 4
M1 - 1103
ER -