Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level

Yassir Arezki, Rong Su, Ville Heikkinen, François Leprete, Pavel Posta, Youichi Bitou, Christian Schober, Charyar Mehdi-Souzani*, Bandar Abdulrahman Mohammed Alzahrani, Xiangchao Zhang, Yohan Kondo, Christof Pruss, Vit Ledl, Nabil Anwer, Mohamed Lamjed Bouazizi, Richard Leach, Hichem Nouira*

*Corresponding author for this work

    Research output: Contribution to journalArticleScientificpeer-review

    3 Citations (Scopus)
    175 Downloads (Pure)

    Abstract

    The design of innovative reference aspheric and freeform optical elements was investi-gated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the val-ues of form error. Agreement among the results of several partners was observed, which demon-strates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.
    Original languageEnglish
    Article number1103
    Pages (from-to)1-19
    Number of pages19
    JournalSensors
    Volume21
    Issue number4
    DOIs
    Publication statusPublished - 5 Feb 2021
    MoE publication typeA1 Journal article-refereed

    Funding

    The authors extend their appreciation to the Deputyship for Research & Innovation, Ministry of Education in Saudi Arabia for funding this research work through the project number 369.

    Keywords

    • Aspheric and freeform optical elements
    • Dimensional metrology
    • Measured data evaluation
    • Robust reference minimum zone (Hybrid Trust Region) fitting
    • Ultra-high precision measuring machine
    • Uncertainty

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