Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level

Yassir Arezki, Rong Su, Ville Heikkinen, François Leprete, Pavel Posta, Youichi Bitou, Christian Schober, Charyar Mehdi-Souzani (Corresponding Author), Bandar Abdulrahman Mohammed Alzahrani, Xiangchao Zhang, Yohan Kondo, Christof Pruss, Vit Ledl, Nabil Anwer, Mohamed Lamjed Bouazizi, Richard Leach, Hichem Nouira (Corresponding Author)

Research output: Contribution to journalArticleScientificpeer-review

46 Downloads (Pure)

Abstract

The design of innovative reference aspheric and freeform optical elements was investi-gated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the val-ues of form error. Agreement among the results of several partners was observed, which demon-strates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.
Original languageEnglish
Article number1103
Pages (from-to)1-19
Number of pages19
JournalSensors (Switzerland)
Volume21
Issue number4
DOIs
Publication statusPublished - 5 Feb 2021
MoE publication typeA1 Journal article-refereed

Keywords

  • Aspheric and freeform optical elements
  • Dimensional metrology
  • Measured data evaluation
  • Robust reference minimum zone (Hybrid Trust Region) fitting
  • Ultra-high precision measuring machine
  • Uncertainty

Fingerprint

Dive into the research topics of 'Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level'. Together they form a unique fingerprint.

Cite this