Abstract
The design of innovative reference aspheric and freeform optical elements was investi-gated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the val-ues of form error. Agreement among the results of several partners was observed, which demon-strates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.
| Original language | English |
|---|---|
| Article number | 1103 |
| Pages (from-to) | 1-19 |
| Number of pages | 19 |
| Journal | Sensors |
| Volume | 21 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 5 Feb 2021 |
| MoE publication type | A1 Journal article-refereed |
Funding
The authors extend their appreciation to the Deputyship for Research & Innovation, Ministry of Education in Saudi Arabia for funding this research work through the project number 369.
Keywords
- Aspheric and freeform optical elements
- Dimensional metrology
- Measured data evaluation
- Robust reference minimum zone (Hybrid Trust Region) fitting
- Ultra-high precision measuring machine
- Uncertainty