Transfer of thin Si layers by cold and thermal ion cutting

Kimmo Henttinen, Tommi Suni, Arto Nurmela, Hannu Luoto, Ilkka Suni, Veli-Matti Airaksinen, Suvi Karirinne, M. Cai, S.S Lau

Research output: Contribution to journal › Article › Scientific › peer-review

6 Citations (Scopus)

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