Transfer printing of CVD graphene FETs on patterned substrates

T. S. Abhilash, R. De Alba, N. Zhelev, H. G. Craighead, J. M. Parpia

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13 Citations (Scopus)

Abstract

We describe a simple and scalable method for the transfer of CVD graphene for the fabrication of field effect transistors. This is a dry process that uses a modified RCA-cleaning step to improve the surface quality. In contrast to conventional fabrication routes where lithographic steps are performed after the transfer, here graphene is transferred to a pre-patterned substrate. The resulting FET devices display nearly zero Dirac voltage, and the contact resistance between the graphene and metal contacts is on the order of 910 ± 340 Ω μm. This approach enables formation of conducting graphene channel lengths up to one millimeter. The resist-free transfer process provides a clean graphene surface that is promising for use in high sensitivity graphene FET biosensors.

Original languageEnglish
Pages (from-to)14109-14113
Number of pages5
JournalNanoscale
Volume7
Issue number33
DOIs
Publication statusPublished - 7 Sep 2015
MoE publication typeA1 Journal article-refereed

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    Abhilash, T. S., De Alba, R., Zhelev, N., Craighead, H. G., & Parpia, J. M. (2015). Transfer printing of CVD graphene FETs on patterned substrates. Nanoscale, 7(33), 14109-14113. https://doi.org/10.1039/c5nr03501e