Transfer printing of CVD graphene FETs on patterned substrates

T. S. Abhilash, R. De Alba, N. Zhelev, H. G. Craighead, J. M. Parpia

Research output: Contribution to journalArticleScientificpeer-review

11 Citations (Scopus)

Abstract

We describe a simple and scalable method for the transfer of CVD graphene for the fabrication of field effect transistors. This is a dry process that uses a modified RCA-cleaning step to improve the surface quality. In contrast to conventional fabrication routes where lithographic steps are performed after the transfer, here graphene is transferred to a pre-patterned substrate. The resulting FET devices display nearly zero Dirac voltage, and the contact resistance between the graphene and metal contacts is on the order of 910 ± 340 Ω μm. This approach enables formation of conducting graphene channel lengths up to one millimeter. The resist-free transfer process provides a clean graphene surface that is promising for use in high sensitivity graphene FET biosensors.

Original languageEnglish
Pages (from-to)14109-14113
Number of pages5
JournalNanoscale
Volume7
Issue number33
DOIs
Publication statusPublished - 7 Sep 2015
MoE publication typeA1 Journal article-refereed

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Graphite
Field effect transistors
Graphene
Printing
Chemical vapor deposition
Substrates
Fabrication
Contact resistance
Biosensors
Surface properties
Cleaning
Metals
Display devices
Electric potential

Cite this

Abhilash, T. S., De Alba, R., Zhelev, N., Craighead, H. G., & Parpia, J. M. (2015). Transfer printing of CVD graphene FETs on patterned substrates. Nanoscale, 7(33), 14109-14113. https://doi.org/10.1039/c5nr03501e
Abhilash, T. S. ; De Alba, R. ; Zhelev, N. ; Craighead, H. G. ; Parpia, J. M. / Transfer printing of CVD graphene FETs on patterned substrates. In: Nanoscale. 2015 ; Vol. 7, No. 33. pp. 14109-14113.
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Abhilash, TS, De Alba, R, Zhelev, N, Craighead, HG & Parpia, JM 2015, 'Transfer printing of CVD graphene FETs on patterned substrates', Nanoscale, vol. 7, no. 33, pp. 14109-14113. https://doi.org/10.1039/c5nr03501e

Transfer printing of CVD graphene FETs on patterned substrates. / Abhilash, T. S.; De Alba, R.; Zhelev, N.; Craighead, H. G.; Parpia, J. M.

In: Nanoscale, Vol. 7, No. 33, 07.09.2015, p. 14109-14113.

Research output: Contribution to journalArticleScientificpeer-review

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Abhilash TS, De Alba R, Zhelev N, Craighead HG, Parpia JM. Transfer printing of CVD graphene FETs on patterned substrates. Nanoscale. 2015 Sep 7;7(33):14109-14113. https://doi.org/10.1039/c5nr03501e