Abstract
| Original language | English |
|---|---|
| Pages (from-to) | 2483-2488 |
| Number of pages | 6 |
| Journal | Applied Optics |
| Volume | 56 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 20 Mar 2017 |
| MoE publication type | A1 Journal article-refereed |
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Transfer standard for traceable dynamic calibration of stroboscopic scanning white light interferometer. / Kassamakov, Ivan; Tureanu, Anca; Heikkinen, Ville; Hæggström, Edward.
In: Applied Optics, Vol. 56, No. 9, 20.03.2017, p. 2483-2488.Research output: Contribution to journal › Article › Scientific › peer-review
TY - JOUR
T1 - Transfer standard for traceable dynamic calibration of stroboscopic scanning white light interferometer
AU - Kassamakov, Ivan
AU - Tureanu, Anca
AU - Heikkinen, Ville
AU - Hæggström, Edward
PY - 2017/3/20
Y1 - 2017/3/20
N2 - The reconstructed image of a moving sample always shows a distorted representation of reality. Therefore, one needs to calibrate, for example, out-of-plane nano-videos for quality control of nano-microelectromechanical systems (N-MEMS). Here we discuss how to calibrate and obtain confidence limits for stroboscopic scanning white light interferometry (SSWLI) data when there are differences in speed and amplitude across the field of view. Many N-MEMS devices rely on oscillating structures; consequently, one must calibrate movie recordings of these structures to have global standards and to allow inter-device comparison. We propose to use a quartz tuning fork driven off-resonance as a transfer standard. This approach allows a broad range of traceable frequencies and out-of-plane amplitudes to be introduced into selected parts of the field of view of the SSWLI device featuring similar optical surface properties to many N-MEMS devices without demanding an additional reference surface.
AB - The reconstructed image of a moving sample always shows a distorted representation of reality. Therefore, one needs to calibrate, for example, out-of-plane nano-videos for quality control of nano-microelectromechanical systems (N-MEMS). Here we discuss how to calibrate and obtain confidence limits for stroboscopic scanning white light interferometry (SSWLI) data when there are differences in speed and amplitude across the field of view. Many N-MEMS devices rely on oscillating structures; consequently, one must calibrate movie recordings of these structures to have global standards and to allow inter-device comparison. We propose to use a quartz tuning fork driven off-resonance as a transfer standard. This approach allows a broad range of traceable frequencies and out-of-plane amplitudes to be introduced into selected parts of the field of view of the SSWLI device featuring similar optical surface properties to many N-MEMS devices without demanding an additional reference surface.
UR - http://www.scopus.com/inward/record.url?scp=85016030745&partnerID=8YFLogxK
U2 - 10.1364/AO.56.002483
DO - 10.1364/AO.56.002483
M3 - Article
VL - 56
SP - 2483
EP - 2488
JO - Applied Optics
JF - Applied Optics
SN - 1559-128X
IS - 9
ER -