Transformation of spatial characteristics of excimer laser radiation

E. V. Gavrilov, A. P. Zhevlakov, S. V. Kascheev, Veli Kujanpää, T. Savinainen

    Research output: Contribution to journalArticleScientificpeer-review

    Abstract

    An optical attachment of an excimer laser beam that enables the transformation and optimization of spatial characteristics of a coherent UV beam was studied in an experimental setting. Experiments revealed that a rectangular 3 × 20 mm laser beam with the a divergence of 2 × 5 mrad attains a square shape of 20 × 20 mm and a divergence of 5 × 5 mrad in orthogonal directions after passing through the beam attachment. It is demonstrated that the application of a beam attachment in installations for material microprocessing simplifies optical layout of the illumination module allows one to obtain optimal homogeneity of sample illumination (under 2%) upon the projection of the image on the processing plane of the sample with submicron precision and to reduce the radiation load on optical elements via the elimination of hot spots.
    Original languageEnglish
    Pages (from-to)145-149
    Number of pages5
    JournalOptics and Spectroscopy
    Volume110
    Issue number1
    DOIs
    Publication statusPublished - 2011
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Excimer lasers
    Laser radiation
    excimer lasers
    Laser beams
    attachment
    Lighting
    laser beams
    divergence
    Optical devices
    illumination
    Radiation
    layouts
    installing
    homogeneity
    elimination
    Processing
    modules
    projection
    optimization
    Experiments

    Cite this

    Gavrilov, E. V., Zhevlakov, A. P., Kascheev, S. V., Kujanpää, V., & Savinainen, T. (2011). Transformation of spatial characteristics of excimer laser radiation. Optics and Spectroscopy, 110(1), 145-149. https://doi.org/10.1134/S0030400X11010048
    Gavrilov, E. V. ; Zhevlakov, A. P. ; Kascheev, S. V. ; Kujanpää, Veli ; Savinainen, T. / Transformation of spatial characteristics of excimer laser radiation. In: Optics and Spectroscopy. 2011 ; Vol. 110, No. 1. pp. 145-149.
    @article{4be5573164ea480bb4ce3ffe4f86420e,
    title = "Transformation of spatial characteristics of excimer laser radiation",
    abstract = "An optical attachment of an excimer laser beam that enables the transformation and optimization of spatial characteristics of a coherent UV beam was studied in an experimental setting. Experiments revealed that a rectangular 3 × 20 mm laser beam with the a divergence of 2 × 5 mrad attains a square shape of 20 × 20 mm and a divergence of 5 × 5 mrad in orthogonal directions after passing through the beam attachment. It is demonstrated that the application of a beam attachment in installations for material microprocessing simplifies optical layout of the illumination module allows one to obtain optimal homogeneity of sample illumination (under 2{\%}) upon the projection of the image on the processing plane of the sample with submicron precision and to reduce the radiation load on optical elements via the elimination of hot spots.",
    author = "Gavrilov, {E. V.} and Zhevlakov, {A. P.} and Kascheev, {S. V.} and Veli Kujanp{\"a}{\"a} and T. Savinainen",
    year = "2011",
    doi = "10.1134/S0030400X11010048",
    language = "English",
    volume = "110",
    pages = "145--149",
    journal = "Optics and Spectroscopy",
    issn = "0030-400X",
    publisher = "Maik Nauka Publishing / Springer SBM",
    number = "1",

    }

    Gavrilov, EV, Zhevlakov, AP, Kascheev, SV, Kujanpää, V & Savinainen, T 2011, 'Transformation of spatial characteristics of excimer laser radiation', Optics and Spectroscopy, vol. 110, no. 1, pp. 145-149. https://doi.org/10.1134/S0030400X11010048

    Transformation of spatial characteristics of excimer laser radiation. / Gavrilov, E. V.; Zhevlakov, A. P.; Kascheev, S. V.; Kujanpää, Veli; Savinainen, T.

    In: Optics and Spectroscopy, Vol. 110, No. 1, 2011, p. 145-149.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Transformation of spatial characteristics of excimer laser radiation

    AU - Gavrilov, E. V.

    AU - Zhevlakov, A. P.

    AU - Kascheev, S. V.

    AU - Kujanpää, Veli

    AU - Savinainen, T.

    PY - 2011

    Y1 - 2011

    N2 - An optical attachment of an excimer laser beam that enables the transformation and optimization of spatial characteristics of a coherent UV beam was studied in an experimental setting. Experiments revealed that a rectangular 3 × 20 mm laser beam with the a divergence of 2 × 5 mrad attains a square shape of 20 × 20 mm and a divergence of 5 × 5 mrad in orthogonal directions after passing through the beam attachment. It is demonstrated that the application of a beam attachment in installations for material microprocessing simplifies optical layout of the illumination module allows one to obtain optimal homogeneity of sample illumination (under 2%) upon the projection of the image on the processing plane of the sample with submicron precision and to reduce the radiation load on optical elements via the elimination of hot spots.

    AB - An optical attachment of an excimer laser beam that enables the transformation and optimization of spatial characteristics of a coherent UV beam was studied in an experimental setting. Experiments revealed that a rectangular 3 × 20 mm laser beam with the a divergence of 2 × 5 mrad attains a square shape of 20 × 20 mm and a divergence of 5 × 5 mrad in orthogonal directions after passing through the beam attachment. It is demonstrated that the application of a beam attachment in installations for material microprocessing simplifies optical layout of the illumination module allows one to obtain optimal homogeneity of sample illumination (under 2%) upon the projection of the image on the processing plane of the sample with submicron precision and to reduce the radiation load on optical elements via the elimination of hot spots.

    U2 - 10.1134/S0030400X11010048

    DO - 10.1134/S0030400X11010048

    M3 - Article

    VL - 110

    SP - 145

    EP - 149

    JO - Optics and Spectroscopy

    JF - Optics and Spectroscopy

    SN - 0030-400X

    IS - 1

    ER -

    Gavrilov EV, Zhevlakov AP, Kascheev SV, Kujanpää V, Savinainen T. Transformation of spatial characteristics of excimer laser radiation. Optics and Spectroscopy. 2011;110(1):145-149. https://doi.org/10.1134/S0030400X11010048