Transformation of spatial characteristics of excimer laser radiation

E. V. Gavrilov, A. P. Zhevlakov, S. V. Kascheev, Veli Kujanpää, T. Savinainen

Research output: Contribution to journalArticleScientificpeer-review

Abstract

An optical attachment of an excimer laser beam that enables the transformation and optimization of spatial characteristics of a coherent UV beam was studied in an experimental setting. Experiments revealed that a rectangular 3 × 20 mm laser beam with the a divergence of 2 × 5 mrad attains a square shape of 20 × 20 mm and a divergence of 5 × 5 mrad in orthogonal directions after passing through the beam attachment. It is demonstrated that the application of a beam attachment in installations for material microprocessing simplifies optical layout of the illumination module allows one to obtain optimal homogeneity of sample illumination (under 2%) upon the projection of the image on the processing plane of the sample with submicron precision and to reduce the radiation load on optical elements via the elimination of hot spots.
Original languageEnglish
Pages (from-to)145-149
Number of pages5
JournalOptics and Spectroscopy
Volume110
Issue number1
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

Fingerprint

Excimer lasers
Laser radiation
excimer lasers
Laser beams
attachment
Lighting
laser beams
divergence
Optical devices
illumination
Radiation
layouts
installing
homogeneity
elimination
Processing
modules
projection
optimization
Experiments

Cite this

Gavrilov, E. V., Zhevlakov, A. P., Kascheev, S. V., Kujanpää, V., & Savinainen, T. (2011). Transformation of spatial characteristics of excimer laser radiation. Optics and Spectroscopy, 110(1), 145-149. https://doi.org/10.1134/S0030400X11010048
Gavrilov, E. V. ; Zhevlakov, A. P. ; Kascheev, S. V. ; Kujanpää, Veli ; Savinainen, T. / Transformation of spatial characteristics of excimer laser radiation. In: Optics and Spectroscopy. 2011 ; Vol. 110, No. 1. pp. 145-149.
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Gavrilov, EV, Zhevlakov, AP, Kascheev, SV, Kujanpää, V & Savinainen, T 2011, 'Transformation of spatial characteristics of excimer laser radiation', Optics and Spectroscopy, vol. 110, no. 1, pp. 145-149. https://doi.org/10.1134/S0030400X11010048

Transformation of spatial characteristics of excimer laser radiation. / Gavrilov, E. V.; Zhevlakov, A. P.; Kascheev, S. V.; Kujanpää, Veli; Savinainen, T.

In: Optics and Spectroscopy, Vol. 110, No. 1, 2011, p. 145-149.

Research output: Contribution to journalArticleScientificpeer-review

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AU - Gavrilov, E. V.

AU - Zhevlakov, A. P.

AU - Kascheev, S. V.

AU - Kujanpää, Veli

AU - Savinainen, T.

PY - 2011

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AB - An optical attachment of an excimer laser beam that enables the transformation and optimization of spatial characteristics of a coherent UV beam was studied in an experimental setting. Experiments revealed that a rectangular 3 × 20 mm laser beam with the a divergence of 2 × 5 mrad attains a square shape of 20 × 20 mm and a divergence of 5 × 5 mrad in orthogonal directions after passing through the beam attachment. It is demonstrated that the application of a beam attachment in installations for material microprocessing simplifies optical layout of the illumination module allows one to obtain optimal homogeneity of sample illumination (under 2%) upon the projection of the image on the processing plane of the sample with submicron precision and to reduce the radiation load on optical elements via the elimination of hot spots.

U2 - 10.1134/S0030400X11010048

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Gavrilov EV, Zhevlakov AP, Kascheev SV, Kujanpää V, Savinainen T. Transformation of spatial characteristics of excimer laser radiation. Optics and Spectroscopy. 2011;110(1):145-149. https://doi.org/10.1134/S0030400X11010048