Abstract
We present three different time-domain characterization techniques for resistive metal-oxide gas sensors. They are based on electric resistance transients induced by small step changes in either temperature, bias voltage, or concentration of reducing gas. Conduction model of granular semiconductors and an electronic trapping (adatom ionization) rate equation at the grain boundaries are employed. Fitting of the presented analytical transient models to the experimental data allows calculation of the time constant of the electronic trapping process, the height of the grain-boundary-potential barrier, the relative change of the occupied grain-boundary states, the resistance coefficient, and the effective number of grain-boundaries between the electrodes of the sensor. These values can be further used for studying the underlying physicochemical phenomena and increasing the selectivity of the sensor. Fitting of a simple model to the measured transient values yields the energies associated with the electronic trapping process and the reducing gas reaction with the preadsorbed oxygen, as well as the rate constant of the trap releasing and the reducing-gas parameter. The use of the proposed techniques is verified in experiments with commercial resistive WO3 and SnO 2-based gas sensors in clean and humid air and in acetone and isopropyl alcohol vapours. The experiments were performed using a pulsing system for chemical vapours and a sensor-temperature-control system based on a field-programmable gate array (FPGA) processor. In the SnO2-based sensor the grain-boundary-potential barrier is 0.35 V at 270 °C and 0.49 V at 350 °C. At 80% relative humidity these values increase to 0.41 V and 0.52 V. In dry clean air the electronic trapping and releasing energies are 0.94 eV and 0.86 eV.
| Original language | English |
|---|---|
| Pages (from-to) | 12-26 |
| Journal | Sensors and Actuators B: Chemical |
| Volume | 159 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 28 Nov 2011 |
| MoE publication type | A1 Journal article-refereed |
Funding
Fruitful discussions with Juha Sinkkonen, David C. Cameron, and Charlotta Tuovinen, Environics Oy for providing the sample sensors, and the financial support from the Academy of Finland are gratefully acknowledged. Aapo Varpula received his Master’s degree with distinction in Engineering Physics and Mathematics in 2006 from the Helsinki University of Technology (TKK) in Espoo, Finland. Since the beginning of 2006 he has been working on his doctoral thesis on metal-oxide based gas sensors in the Electron Physics Group of the Department of Micro and Nanosciences at Aalto University (formerly TKK), where he obtained his Licentiate’s degree in 2009. His main research interests are the physical and chemical modelling of metal-oxide based gas sensors, development of measurement techniques of sensors, impedance spectroscopy, and characterization of sensor materials. Sergey Novikov received his Master’s degree in Physical chemistry from Leningrad Institute of Technology (USSR) in 1982. He obtained his Ph.D. from the A.F. Ioffe Institute (St. Petersburg, Russia) in 1994 on the growth and characterization of the alkali-earth fluorides on silicon and gallium arsenide. Since 1995 he has been working in the Electron Physics Group of the Department of Micro and Nanosciences at the Aalto University, where he is currently the senior research scientist. His main fields of interest are growth of II–IV compounds and epitaxial oxides. Antti Haarahiltunen received his M.Sc. (Tech.) and D.Sc. (Tech.) degrees in electrical engineering from the Helsinki University of Technology (TKK), Finland, in 2002 and 2007, respectively. He is currently a Research Scientist at the Department of Micro and Nanosciences, Aalto University, Finland. His current research interests include gettering and surface passivation in silicon PV and the stability of capacitive MEMS components. Pekka Kuivalainen (M.Sc. 1976, D.Sc.1980) has been a professor in the Electron Physics Group at the Department of Micro and Nanosciences at Aalto University since 1995. His main research interests are modelling of semiconductor devices and semiconductor spintronics.
Keywords
- Conduction model
- Granular semiconductor
- Metal-oxide gas sensor
- Surface-state model
- Transient
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