Tribological Performance of ALD Al2O3, TiO2 and ATO nanolaminate coatings

Lauri Kilpi; Antti Vaajoki; Simo Varjus; Oili Ylivaara; Riikka L. Puurunen; Helena Ronkainen

Tribological Performance of ALD Al₂O₃, TiO₂ and ATO nanolaminate coatings

Lauri Kilpi (Corresponding author), Antti Vaajoki, Simo Varjus, Oili Ylivaara, Riikka L. Puurunen, Helena Ronkainen

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	BALD2014 Abstract book
Publication status	Published - 2014
Event	12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014 - Helsinki, Finland Duration: 12 May 2014 → 13 May 2014 Conference number: 12 http://www.aldcoe.fi/bald2014/program.pdf (Program) http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

Conference

Conference	12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014
Abbreviated title	Baltic ALD 2014
Country/Territory	Finland
City	Helsinki
Period	12/05/14 → 13/05/14
Other	Abstracts reviewed and published.
Internet address	http://www.aldcoe.fi/bald2014/program.pdf (Program) http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

Cite this

@inbook{a68a19874c8d4001978691d9fac1c0ae,

title = "Tribological Performance of ALD Al2O3, TiO2 and ATO nanolaminate coatings",

author = "Lauri Kilpi and Antti Vaajoki and Simo Varjus and Oili Ylivaara and Puurunen, {Riikka L.} and Helena Ronkainen",

note = "Published abstract of a poster presentation Project 74717 MECHALD; 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014, Baltic ALD 2014 ; Conference date: 12-05-2014 Through 13-05-2014",

year = "2014",

language = "English",

booktitle = "BALD2014 Abstract book",

url = "http://www.aldcoe.fi/bald2014/program.pdf, http://www.aldcoe.fi/bald2014/posters.pdf",

}

TY - CHAP

T1 - Tribological Performance of ALD Al2O3, TiO2 and ATO nanolaminate coatings

AU - Kilpi, Lauri

AU - Vaajoki, Antti

AU - Varjus, Simo

AU - Ylivaara, Oili

AU - Puurunen, Riikka L.

AU - Ronkainen, Helena

N1 - Conference code: 12

PY - 2014

Y1 - 2014

M3 - Conference abstract in proceedings

BT - BALD2014 Abstract book

T2 - 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014

Y2 - 12 May 2014 through 13 May 2014

ER -