Tribological properties of atomic layer deposited thin films against silicon

Lauri Kilpi (Corresponding author), Oili Ylivaara, Anssi Vaajoki, Xuwen Liu, Ville Rontu, Sakari Sintonen, Eero Haimi, Markus Bosund, Marko Tuominen, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula, Riikka Puurunen, Ronkainen Helena

    Research output: Contribution to conferenceConference PosterScientific

    Original languageEnglish
    Publication statusPublished - 2016
    MoE publication typeNot Eligible
    Event17th Nordic Symposium on Tribology, NORDTRIB 2016 - Hämeenlinna, Finland
    Duration: 14 Jun 201617 Jun 2016

    Conference

    Conference17th Nordic Symposium on Tribology, NORDTRIB 2016
    Abbreviated titleNORDTRIB 2016
    CountryFinland
    CityHämeenlinna
    Period14/06/1617/06/16

    Keywords

    • atomic layer deposition
    • thin films
    • tribology
    • friction
    • wear

    Cite this

    Kilpi, L., Ylivaara, O., Vaajoki, A., Liu, X., Rontu, V., Sintonen, S., ... Helena, R. (2016). Tribological properties of atomic layer deposited thin films against silicon. Poster session presented at 17th Nordic Symposium on Tribology, NORDTRIB 2016, Hämeenlinna, Finland.
    Kilpi, Lauri ; Ylivaara, Oili ; Vaajoki, Anssi ; Liu, Xuwen ; Rontu, Ville ; Sintonen, Sakari ; Haimi, Eero ; Bosund, Markus ; Tuominen, Marko ; Sajavaara, Timo ; Lipsanen, Harri ; Hannula, Simo-Pekka ; Puurunen, Riikka ; Helena, Ronkainen. / Tribological properties of atomic layer deposited thin films against silicon. Poster session presented at 17th Nordic Symposium on Tribology, NORDTRIB 2016, Hämeenlinna, Finland.
    @conference{ffcbef544f204bbf92746291d671c543,
    title = "Tribological properties of atomic layer deposited thin films against silicon",
    keywords = "atomic layer deposition, thin films, tribology, friction, wear",
    author = "Lauri Kilpi and Oili Ylivaara and Anssi Vaajoki and Xuwen Liu and Ville Rontu and Sakari Sintonen and Eero Haimi and Markus Bosund and Marko Tuominen and Timo Sajavaara and Harri Lipsanen and Simo-Pekka Hannula and Riikka Puurunen and Ronkainen Helena",
    note = "Poster presentation - only abstract reviewed; 17th Nordic Symposium on Tribology, NORDTRIB 2016, NORDTRIB 2016 ; Conference date: 14-06-2016 Through 17-06-2016",
    year = "2016",
    language = "English",

    }

    Kilpi, L, Ylivaara, O, Vaajoki, A, Liu, X, Rontu, V, Sintonen, S, Haimi, E, Bosund, M, Tuominen, M, Sajavaara, T, Lipsanen, H, Hannula, S-P, Puurunen, R & Helena, R 2016, 'Tribological properties of atomic layer deposited thin films against silicon', 17th Nordic Symposium on Tribology, NORDTRIB 2016, Hämeenlinna, Finland, 14/06/16 - 17/06/16.

    Tribological properties of atomic layer deposited thin films against silicon. / Kilpi, Lauri (Corresponding author); Ylivaara, Oili; Vaajoki, Anssi; Liu, Xuwen; Rontu, Ville; Sintonen, Sakari; Haimi, Eero; Bosund, Markus; Tuominen, Marko; Sajavaara, Timo; Lipsanen, Harri; Hannula, Simo-Pekka; Puurunen, Riikka; Helena, Ronkainen.

    2016. Poster session presented at 17th Nordic Symposium on Tribology, NORDTRIB 2016, Hämeenlinna, Finland.

    Research output: Contribution to conferenceConference PosterScientific

    TY - CONF

    T1 - Tribological properties of atomic layer deposited thin films against silicon

    AU - Kilpi, Lauri

    AU - Ylivaara, Oili

    AU - Vaajoki, Anssi

    AU - Liu, Xuwen

    AU - Rontu, Ville

    AU - Sintonen, Sakari

    AU - Haimi, Eero

    AU - Bosund, Markus

    AU - Tuominen, Marko

    AU - Sajavaara, Timo

    AU - Lipsanen, Harri

    AU - Hannula, Simo-Pekka

    AU - Puurunen, Riikka

    AU - Helena, Ronkainen

    N1 - Poster presentation - only abstract reviewed

    PY - 2016

    Y1 - 2016

    KW - atomic layer deposition

    KW - thin films

    KW - tribology

    KW - friction

    KW - wear

    M3 - Conference Poster

    ER -

    Kilpi L, Ylivaara O, Vaajoki A, Liu X, Rontu V, Sintonen S et al. Tribological properties of atomic layer deposited thin films against silicon. 2016. Poster session presented at 17th Nordic Symposium on Tribology, NORDTRIB 2016, Hämeenlinna, Finland.