Tribological properties of atomic layer deposited thin films against silicon

Lauri Kilpi; Oili Ylivaara; Anssi Vaajoki; Xuwen Liu; Ville Rontu; Sakari Sintonen; Eero Haimi; Markus Bosund; Marko Tuominen; Timo Sajavaara; Harri Lipsanen; Simo-Pekka Hannula; Riikka Puurunen; Ronkainen Helena

Tribological properties of atomic layer deposited thin films against silicon

Lauri Kilpi^*, Oili Ylivaara, Anssi Vaajoki, Xuwen Liu, Ville Rontu, Sakari Sintonen, Eero Haimi, Markus Bosund, Marko Tuominen, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula, Riikka Puurunen, Ronkainen Helena

^*Corresponding author for this work

Research output: Contribution to conference › Conference Poster › Scientific

Original language	English
Publication status	Published - 2016
MoE publication type	Not Eligible
Event	17th Nordic Symposium on Tribology, NORDTRIB 2016 - Hämeenlinna, Finland Duration: 14 Jun 2016 → 17 Jun 2016

Conference

Conference	17th Nordic Symposium on Tribology, NORDTRIB 2016
Abbreviated title	NORDTRIB 2016
Country/Territory	Finland
City	Hämeenlinna
Period	14/06/16 → 17/06/16

Keywords

atomic layer deposition
thin films
tribology
friction
wear

Cite this

@conference{ffcbef544f204bbf92746291d671c543,

title = "Tribological properties of atomic layer deposited thin films against silicon",

keywords = "atomic layer deposition, thin films, tribology, friction, wear",

author = "Lauri Kilpi and Oili Ylivaara and Anssi Vaajoki and Xuwen Liu and Ville Rontu and Sakari Sintonen and Eero Haimi and Markus Bosund and Marko Tuominen and Timo Sajavaara and Harri Lipsanen and Simo-Pekka Hannula and Riikka Puurunen and Ronkainen Helena",

note = "Poster presentation - only abstract reviewed; 17th Nordic Symposium on Tribology, NORDTRIB 2016, NORDTRIB 2016 ; Conference date: 14-06-2016 Through 17-06-2016",

year = "2016",

language = "English",

}

TY - CONF

T1 - Tribological properties of atomic layer deposited thin films against silicon

AU - Kilpi, Lauri

AU - Ylivaara, Oili

AU - Vaajoki, Anssi

AU - Liu, Xuwen

AU - Rontu, Ville

AU - Sintonen, Sakari

AU - Haimi, Eero

AU - Bosund, Markus

AU - Tuominen, Marko

AU - Sajavaara, Timo

AU - Lipsanen, Harri

AU - Hannula, Simo-Pekka

AU - Puurunen, Riikka

AU - Helena, Ronkainen

N1 - Poster presentation - only abstract reviewed

PY - 2016

Y1 - 2016

KW - atomic layer deposition

KW - thin films

KW - tribology

KW - friction

KW - wear

M3 - Conference Poster

T2 - 17th Nordic Symposium on Tribology, NORDTRIB 2016

Y2 - 14 June 2016 through 17 June 2016

ER -