Tribological properties of atomic layer deposited thin films against silicon

Lauri Kilpi (Corresponding author), Oili Ylivaara, Anssi Vaajoki, Xuwen Liu, Ville Rontu, Sakari Sintonen, Eero Haimi, Markus Bosund, Marko Tuominen, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula, Riikka Puurunen, Ronkainen Helena

Research output: Contribution to conferenceConference PosterScientific

Original languageEnglish
Publication statusPublished - 2016
MoE publication typeNot Eligible
Event17th Nordic Symposium on Tribology, NORDTRIB 2016 - Hämeenlinna, Finland
Duration: 14 Jun 201617 Jun 2016

Conference

Conference17th Nordic Symposium on Tribology, NORDTRIB 2016
Abbreviated titleNORDTRIB 2016
CountryFinland
CityHämeenlinna
Period14/06/1617/06/16

Keywords

  • atomic layer deposition
  • thin films
  • tribology
  • friction
  • wear

Cite this

Kilpi, L., Ylivaara, O., Vaajoki, A., Liu, X., Rontu, V., Sintonen, S., ... Helena, R. (2016). Tribological properties of atomic layer deposited thin films against silicon. Poster session presented at 17th Nordic Symposium on Tribology, NORDTRIB 2016, Hämeenlinna, Finland.
Kilpi, Lauri ; Ylivaara, Oili ; Vaajoki, Anssi ; Liu, Xuwen ; Rontu, Ville ; Sintonen, Sakari ; Haimi, Eero ; Bosund, Markus ; Tuominen, Marko ; Sajavaara, Timo ; Lipsanen, Harri ; Hannula, Simo-Pekka ; Puurunen, Riikka ; Helena, Ronkainen. / Tribological properties of atomic layer deposited thin films against silicon. Poster session presented at 17th Nordic Symposium on Tribology, NORDTRIB 2016, Hämeenlinna, Finland.
@conference{ffcbef544f204bbf92746291d671c543,
title = "Tribological properties of atomic layer deposited thin films against silicon",
keywords = "atomic layer deposition, thin films, tribology, friction, wear",
author = "Lauri Kilpi and Oili Ylivaara and Anssi Vaajoki and Xuwen Liu and Ville Rontu and Sakari Sintonen and Eero Haimi and Markus Bosund and Marko Tuominen and Timo Sajavaara and Harri Lipsanen and Simo-Pekka Hannula and Riikka Puurunen and Ronkainen Helena",
note = "Poster presentation - only abstract reviewed; 17th Nordic Symposium on Tribology, NORDTRIB 2016, NORDTRIB 2016 ; Conference date: 14-06-2016 Through 17-06-2016",
year = "2016",
language = "English",

}

Kilpi, L, Ylivaara, O, Vaajoki, A, Liu, X, Rontu, V, Sintonen, S, Haimi, E, Bosund, M, Tuominen, M, Sajavaara, T, Lipsanen, H, Hannula, S-P, Puurunen, R & Helena, R 2016, 'Tribological properties of atomic layer deposited thin films against silicon' 17th Nordic Symposium on Tribology, NORDTRIB 2016, Hämeenlinna, Finland, 14/06/16 - 17/06/16, .

Tribological properties of atomic layer deposited thin films against silicon. / Kilpi, Lauri (Corresponding author); Ylivaara, Oili; Vaajoki, Anssi; Liu, Xuwen; Rontu, Ville; Sintonen, Sakari; Haimi, Eero; Bosund, Markus; Tuominen, Marko; Sajavaara, Timo; Lipsanen, Harri; Hannula, Simo-Pekka; Puurunen, Riikka; Helena, Ronkainen.

2016. Poster session presented at 17th Nordic Symposium on Tribology, NORDTRIB 2016, Hämeenlinna, Finland.

Research output: Contribution to conferenceConference PosterScientific

TY - CONF

T1 - Tribological properties of atomic layer deposited thin films against silicon

AU - Kilpi, Lauri

AU - Ylivaara, Oili

AU - Vaajoki, Anssi

AU - Liu, Xuwen

AU - Rontu, Ville

AU - Sintonen, Sakari

AU - Haimi, Eero

AU - Bosund, Markus

AU - Tuominen, Marko

AU - Sajavaara, Timo

AU - Lipsanen, Harri

AU - Hannula, Simo-Pekka

AU - Puurunen, Riikka

AU - Helena, Ronkainen

N1 - Poster presentation - only abstract reviewed

PY - 2016

Y1 - 2016

KW - atomic layer deposition

KW - thin films

KW - tribology

KW - friction

KW - wear

M3 - Conference Poster

ER -

Kilpi L, Ylivaara O, Vaajoki A, Liu X, Rontu V, Sintonen S et al. Tribological properties of atomic layer deposited thin films against silicon. 2016. Poster session presented at 17th Nordic Symposium on Tribology, NORDTRIB 2016, Hämeenlinna, Finland.