Tribological properties of atomic layer deposited thin films against silicon

Lauri Kilpi (Corresponding author), Oili Ylivaara, Anssi Vaajoki, Xuwen Liu, Ville Rontu, Sakari Sintonen, Eero Haimi, Markus Bosund, Marko Tuominen, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula, Riikka Puurunen, Ronkainen Helena

    Research output: Contribution to conferenceConference PosterScientific

    Original languageEnglish
    Publication statusPublished - 2016
    MoE publication typeNot Eligible
    Event17th Nordic Symposium on Tribology, NORDTRIB 2016 - Hämeenlinna, Finland
    Duration: 14 Jun 201617 Jun 2016

    Conference

    Conference17th Nordic Symposium on Tribology, NORDTRIB 2016
    Abbreviated titleNORDTRIB 2016
    CountryFinland
    CityHämeenlinna
    Period14/06/1617/06/16

    Keywords

    • atomic layer deposition
    • thin films
    • tribology
    • friction
    • wear

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