@conference{ffcbef544f204bbf92746291d671c543,
title = "Tribological properties of atomic layer deposited thin films against silicon",
keywords = "atomic layer deposition, thin films, tribology, friction, wear",
author = "Lauri Kilpi and Oili Ylivaara and Anssi Vaajoki and Xuwen Liu and Ville Rontu and Sakari Sintonen and Eero Haimi and Markus Bosund and Marko Tuominen and Timo Sajavaara and Harri Lipsanen and Simo-Pekka Hannula and Riikka Puurunen and Ronkainen Helena",
note = "Poster presentation - only abstract reviewed; 17th Nordic Symposium on Tribology, NORDTRIB 2016, NORDTRIB 2016 ; Conference date: 14-06-2016 Through 17-06-2016",
year = "2016",
language = "English",
}