Tribology and mechanical properties of excimer laser processed Ti-silicon nitride surfaces

Tom Jervis, Juha-Pekka Hirvonen, Michael Nastasi, Harriet Kung

Research output: Contribution to journalArticleScientific

Abstract

Titanium films were mixed, using excimer laser radiation, into the surface of bulk Si3N4 materials. The tribological and mechanical properties of these surfaces were then evaluated using pin-on-disk and nanoindenter techniques, respectively. Reduced friction and a change in the wear mechanism that resulted in a more benign failure mode were observed. These results are interpreted as resulting from the establishment of a transfer film, changes in the compliance of the surface which reduces instantaneous stresses in the surface, and toughening of the surface, all results of the laser process.
Original languageEnglish
Pages (from-to)1857-1860
JournalJournal of Materials Research
Volume10
Issue number8
DOIs
Publication statusPublished - 1995
MoE publication typeB1 Article in a scientific magazine

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