Tribology and mechanical properties of excimer laser processed Ti-silicon nitride surfaces

Titanium films were mixed, using excimer laser radiation, into the surface of bulk Si3N4 materials. The tribological and mechanical properties of these surfaces were then evaluated using pin-on-disk and nanoindenter techniques, respectively. Reduced friction and a change in the wear mechanism that resulted in a more benign failure mode were observed. These results are interpreted as resulting from the establishment of a transfer film, changes in the compliance of the surface which reduces instantaneous stresses in the surface, and toughening of the surface, all results of the laser process.