Tunable MOEMS Fabry-Perot interferometer for miniaturized spectral sensing in near-infrared

Anna Rissanen, Rami Mannila, Mikko Tuohiniemi, Jarkko Antila

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    16 Citations (Scopus)


    This paper presents a novel MOEMS Fabry-Perot interferometer (FPI) process platform for the range of 800–1050 nm. Simulation results including design and optimization of device properties in terms of transmission peak width, tuning range and electrical properties are discussed. Process flow for the device fabrication is presented, with overall process integration and backend dicing steps resulting in successful fabrication yield. The mirrors of the FPI consist of LPCVD (low-pressure chemical vapor) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapor. Silicon substrate below the optical aperture is removed by inductively coupled plasma (ICP) etching to ensure transmission in the visible – near infra-red (NIR), which is below silicon transmission range. The characterized optical properties of the chips are compared to the simulated values. Achieved optical aperture diameter size enables utilization of the chips in both imaging as well as single-point spectral sensors.
    Original languageEnglish
    Title of host publicationMOEMS and Miniaturized Systems XIII
    EditorsWibool Piyawattanametha, Yong-Hwa Park
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)978-0-8194-9890-8
    Publication statusPublished - 2014
    MoE publication typeA4 Article in a conference publication
    EventMOEMS and Miniaturized Systems XIII - San Francisco, CA, United States
    Duration: 3 Feb 20146 Feb 2014

    Publication series

    SeriesProceedings of SPIE


    ConferenceMOEMS and Miniaturized Systems XIII
    Country/TerritoryUnited States
    CitySan Francisco, CA


    • Fabry-Perot interferometers
    • microopto electromechanical systems
    • silicon
    • etching
    • microspectrometers
    • miniature hyperspectral imagers
    • MOEMS
    • near infrared


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