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Two-dimensional metallic state in silicon-on-insulator structures

  • Johannes Kepler University of Linz

Research output: Contribution to journalArticleScientificpeer-review

Abstract

In silicon-on-insulator metal oxide semiconductor structures with a peak mobility of 25,000 cm2 / V s a strong drop of the resistivity towards low temperature has been observed. This metallic effect can be fitted by a linear-in-T term, which can be interpreted with both, the ballistic interaction corrections and the temperature dependent screening of impurity scattering. At low temperature and density in addition a strong increase of the resistivity towards lower T was observed, which is attributed to the contact regions of the sample.
Original languageEnglish
Pages (from-to)252-255
JournalPhysica E: Low-Dimensional Systems and Nanostructures
Volume22
Issue number1-3
DOIs
Publication statusPublished - 2004
MoE publication typeA1 Journal article-refereed

Keywords

  • 2D metal-insulator transition
  • Si inversion layer
  • silicon-on-insulator
  • semiconductors
  • metal oxides

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