Abstract
Acoustic wave filter devices are disclosed. A device includes a layer providing or on a topmost layer of an acoustic reflector. The intermediary layer has a first region and a second region. The first region has a first layer thickness and the second region has a second layer thickness different from the first layer thickness. The device includes a first multilayer stack on the first region and a second multilayer stack on the second region of the intermediary layer. Each of the first and the second stacks includes a piezoelectric layer on a counter electrode that is located on the respective region, an input and an output electrode. Application of a radio frequency voltage between the input electrode and the counter electrode layer of the first stack creates acoustic resonance modes in the piezoelectric layer between the input and output electrodes of the first and the second stack.
Patent family as of 16.12.2021
CN112673569 A 20210416 CN201980058693 20190906
EP3847749 A1 20210714 EP20190765723 20190906
US10630256 BB 20200421 US20180125637 20180907
US2020083860 AA 20200312 US20180125637 20180907
US11057013 BB 20210706 US20200850909 20200416
US2020244245 AA 20200730 US20200850909 20200416
WO20049171 A1 20200312 WO2019EP73891 20190906
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| Original language | English |
|---|---|
| Patent number | US2020083860 |
| IPC | H03H 9/ 17 A I |
| Priority date | 7/09/18 |
| Publication status | Published - 12 Mar 2020 |
| MoE publication type | H1 Granted patent |