Two-stage lateral bulk acoustic wave filter

Markku Ylilammi (Inventor), Tapani Makkonen (Inventor), Tuomas Pensala (Inventor)

    Research output: PatentPatent


    Acoustic wave filter devices are disclosed. A device includes a layer providing or on a topmost layer of an acoustic reflector. The intermediary layer has a first region and a second region. The first region has a first layer thickness and the second region has a second layer thickness different from the first layer thickness. The device includes a first multilayer stack on the first region and a second multilayer stack on the second region of the intermediary layer. Each of the first and the second stacks includes a piezoelectric layer on a counter electrode that is located on the respective region, an input and an output electrode. Application of a radio frequency voltage between the input electrode and the counter electrode layer of the first stack creates acoustic resonance modes in the piezoelectric layer between the input and output electrodes of the first and the second stack.

    Patent family as of 16.12.2021
    CN112673569 A 20210416 CN201980058693 20190906      
    EP3847749 A1 20210714 EP20190765723 20190906      
    US10630256 BB 20200421 US20180125637 20180907      
    US2020083860 AA 20200312 US20180125637 20180907      
    US11057013 BB 20210706 US20200850909 20200416      
    US2020244245 AA 20200730 US20200850909 20200416      
    WO20049171 A1 20200312 WO2019EP73891 20190906

    Link to currentpatent family on right 

    Original languageEnglish
    Patent numberUS2020083860
    IPCH03H 9/ 17 A I
    Priority date7/09/18
    Publication statusPublished - 12 Mar 2020
    MoE publication typeH1 Granted patent


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