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Two-stage lateral bulk acoustic wave filter
Markku Ylilammi (Inventor)
,
Tapani Makkonen
(Inventor)
,
Tuomas Pensala
(Inventor)
Research output
:
Patent
›
Patent
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Keyphrases
Layer Thickness
100%
Bulk Acoustic Wave
100%
Acoustic Wave Filter
100%
Counter Electrode
66%
Multilayer Stack
66%
Piezoelectric Layer
66%
Intermediary Layer
66%
Radio Frequency
33%
Filter Device
33%
Patent Family
33%
Resonant Mode
33%
Acoustic Resonance
33%
Electrode Layer
33%
Acoustic Reflector
33%
INIS
layers
100%
filters
100%
sound waves
100%
electrodes
41%
stacks
41%
thickness
25%
devices
25%
output
16%
acoustics
16%
piezoelectricity
16%
applications
8%
voltage
8%
patents
8%
radiowave radiation
8%
resonance
8%