Ultra-high-Q-factor racetrack resonators on thick SOI platform through sidewall roughness improvement by hydrogen annealing

Yisbel E. Marin, Arijit Bera, Matteo Cherchi, Timo Aalto

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

We designed and experimentally demonstrated racetrack resonators on a 3 μm thick SOI platform with intrinsic quality factors above 10 million. The racetrack configuration consists of a combination of straight sections based on rib waveguides and bend sections based on strip waveguides following a so-called Euler curve to achieve a compact footprint. The ultra-high-Q factors were achieved through a significant sidewall roughness reduction by controlled annealing in a hydrogen atmosphere, allowing to achieve propagation losses for 3 μm wide rib waveguides down to ~3 dB/m. The process potentially enables emerging PIC applications demanding ultra-low propagation losses.
Original languageEnglish
Title of host publicationLaser Resonators, Microresonators, and Beam Control XXV
EditorsVladimir S. Ilchenko, Andrea M. Armani, Julia V. Sheldakova
PublisherInternational Society for Optics and Photonics SPIE
Number of pages5
ISBN (Electronic)978-1-5106-5919-3
DOIs
Publication statusPublished - 2023
MoE publication typeA4 Article in a conference publication
EventLaser Resonators, Microresonators, and Beam Control XXV, SPIE LASE 2023 - San Francisco, United States
Duration: 28 Jan 20233 Feb 2023

Publication series

SeriesProceedings of SPIE
Volume12407
ISSN0277-786X

Conference

ConferenceLaser Resonators, Microresonators, and Beam Control XXV, SPIE LASE 2023
Country/TerritoryUnited States
CitySan Francisco
Period28/01/233/02/23

Keywords

  • Low-loss waveguides
  • microresonators
  • silicon photonics

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