@inproceedings{a7d0fa1d50a548e29180ee3711f2aa37,
title = "Ultra-high-Q-factor racetrack resonators on thick SOI platform through sidewall roughness improvement by hydrogen annealing",
abstract = "We designed and experimentally demonstrated racetrack resonators on a 3 μm thick SOI platform with intrinsic quality factors above 10 million. The racetrack configuration consists of a combination of straight sections based on rib waveguides and bend sections based on strip waveguides following a so-called Euler curve to achieve a compact footprint. The ultra-high-Q factors were achieved through a significant sidewall roughness reduction by controlled annealing in a hydrogen atmosphere, allowing to achieve propagation losses for 3 μm wide rib waveguides down to \textasciitilde{}3 dB/m. The process potentially enables emerging PIC applications demanding ultra-low propagation losses.",
keywords = "Low-loss waveguides, microresonators, silicon photonics",
author = "Marin, \{Yisbel E.\} and Arijit Bera and Matteo Cherchi and Timo Aalto",
note = "Publisher Copyright: {\textcopyright} 2023 SPIE.; Laser Resonators, Microresonators, and Beam Control XXV, SPIE LASE 2023 ; Conference date: 28-01-2023 Through 03-02-2023",
year = "2023",
doi = "10.1117/12.2650143",
language = "English",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
editor = "Ilchenko, \{Vladimir S.\} and Armani, \{Andrea M.\} and Sheldakova, \{Julia V.\}",
booktitle = "Laser Resonators, Microresonators, and Beam Control XXV",
address = "United States",
}