Ultra-high-Q-factor racetrack resonators on thick SOI platform through sidewall roughness improvement by hydrogen annealing

Yisbel E. Marin, Arijit Bera, Matteo Cherchi, Timo Aalto

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Engineering

Material Science

Physics

Earth and Planetary Sciences