Ultra-High-Q Racetrack on Thick SOI Platform through Hydrogen Annealing

Yisbel E. Marin; Arijit Bera; Matteo Cherchi; Timo Aalto

Ultra-High-Q Racetrack on Thick SOI Platform through Hydrogen Annealing

Yisbel E. Marin (Corresponding author), Arijit Bera, Matteo Cherchi, Timo Aalto

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

We experimentally demonstrate a racetrack resonator consisting of rib waveguides and strip-waveguide-based Euler bends on thick SOI platform, with an intrinsic quality factor of 14 million, corresponding to a propagation loss of 2.7 dB/m. This result was achieved through sidewall roughness smoothing using hydrogen annealing.

Original language	English
Title of host publication	2022 European Conference on Optical Communication, ECOC 2022
Publisher	IEEE Institute of Electrical and Electronic Engineers
Number of pages	4
ISBN (Electronic)	978-1-957171-15-9
ISBN (Print)	978-1-6654-7557-0
Publication status	Published - 2022
MoE publication type	A4 Article in a conference publication
Event	2022 European Conference on Optical Communication, ECOC 2022 - Basel, Switzerland Duration: 18 Sept 2022 → 22 Sept 2022

Conference

Conference	2022 European Conference on Optical Communication, ECOC 2022
Country/Territory	Switzerland
City	Basel
Period	18/09/22 → 22/09/22

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@inproceedings{99e7d2c1847b4add95e4783504f68b59,

title = "Ultra-High-Q Racetrack on Thick SOI Platform through Hydrogen Annealing",

abstract = "We experimentally demonstrate a racetrack resonator consisting of rib waveguides and strip-waveguide-based Euler bends on thick SOI platform, with an intrinsic quality factor of 14 million, corresponding to a propagation loss of 2.7 dB/m. This result was achieved through sidewall roughness smoothing using hydrogen annealing. ",

author = "Marin, {Yisbel E.} and Arijit Bera and Matteo Cherchi and Timo Aalto",

note = "Funding Information: The work is part of the Academy of Finland Flagship Programme, Photonics Research and Innovation (PREIN), decision number 320168. Publisher Copyright: {\textcopyright} 2022 Optica.; 2022 European Conference on Optical Communication, ECOC 2022 ; Conference date: 18-09-2022 Through 22-09-2022",

year = "2022",

language = "English",

isbn = "978-1-6654-7557-0",

booktitle = "2022 European Conference on Optical Communication, ECOC 2022",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

}

Marin, YE , Bera, A, Cherchi, M & Aalto, T 2022, Ultra-High-Q Racetrack on Thick SOI Platform through Hydrogen Annealing. in 2022 European Conference on Optical Communication, ECOC 2022. IEEE Institute of Electrical and Electronic Engineers, 2022 European Conference on Optical Communication, ECOC 2022, Basel, Switzerland, 18/09/22. <https://ieeexplore.ieee.org/document/9979391>

Ultra-High-Q Racetrack on Thick SOI Platform through Hydrogen Annealing. / Marin, Yisbel E. (Corresponding author); Bera, Arijit; Cherchi, Matteo et al.

2022 European Conference on Optical Communication, ECOC 2022. IEEE Institute of Electrical and Electronic Engineers, 2022.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Ultra-High-Q Racetrack on Thick SOI Platform through Hydrogen Annealing

AU - Marin, Yisbel E.

AU - Bera, Arijit

AU - Cherchi, Matteo

AU - Aalto, Timo

PY - 2022

Y1 - 2022

N2 - We experimentally demonstrate a racetrack resonator consisting of rib waveguides and strip-waveguide-based Euler bends on thick SOI platform, with an intrinsic quality factor of 14 million, corresponding to a propagation loss of 2.7 dB/m. This result was achieved through sidewall roughness smoothing using hydrogen annealing.

AB - We experimentally demonstrate a racetrack resonator consisting of rib waveguides and strip-waveguide-based Euler bends on thick SOI platform, with an intrinsic quality factor of 14 million, corresponding to a propagation loss of 2.7 dB/m. This result was achieved through sidewall roughness smoothing using hydrogen annealing.

UR - http://www.scopus.com/inward/record.url?scp=85144005439&partnerID=8YFLogxK

M3 - Conference article in proceedings

AN - SCOPUS:85144005439

SN - 978-1-6654-7557-0

BT - 2022 European Conference on Optical Communication, ECOC 2022

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - 2022 European Conference on Optical Communication, ECOC 2022

Y2 - 18 September 2022 through 22 September 2022

ER -

Ultra-High-Q Racetrack on Thick SOI Platform through Hydrogen Annealing

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