Ultra-High-Q Racetrack on Thick SOI Platform through Hydrogen Annealing

Yisbel E. Marin (Corresponding author), Arijit Bera, Matteo Cherchi, Timo Aalto

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

Abstract

We experimentally demonstrate a racetrack resonator consisting of rib waveguides and strip-waveguide-based Euler bends on thick SOI platform, with an intrinsic quality factor of 14 million, corresponding to a propagation loss of 2.7 dB/m. This result was achieved through sidewall roughness smoothing using hydrogen annealing.
Original languageEnglish
Title of host publication2022 European Conference on Optical Communication, ECOC 2022
PublisherIEEE Institute of Electrical and Electronic Engineers
Number of pages4
ISBN (Electronic)978-1-957171-15-9
ISBN (Print)978-1-6654-7557-0
Publication statusPublished - 2022
MoE publication typeA4 Article in a conference publication
Event2022 European Conference on Optical Communication, ECOC 2022 - Basel, Switzerland
Duration: 18 Sept 202222 Sept 2022

Conference

Conference2022 European Conference on Optical Communication, ECOC 2022
Country/TerritorySwitzerland
CityBasel
Period18/09/2222/09/22

Fingerprint

Dive into the research topics of 'Ultra-High-Q Racetrack on Thick SOI Platform through Hydrogen Annealing'. Together they form a unique fingerprint.

Cite this