Ultra-High Sensitivity Surface-Micromachined Capacitive Differential Pressure Sensor for Low-Pressure Applications

Research output: Contribution to journalArticleScientificpeer-review

Abstract

An ultra-high sensitivity surface-micromachined capacitive differential pressure sensor and capacitance bridge readout circuit, with amplitude balancing for differential low-pressure gas measurement applications, was designed, fabricated, and characterized. The sensor membrane has a diameter of 800 <inline-formula> <tex-math notation="LaTeX">$\mu$</tex-math> </inline-formula>m with a thickness of 1 <inline-formula> <tex-math notation="LaTeX">$\mu$</tex-math> </inline-formula>m and the chip size is <inline-formula> <tex-math notation="LaTeX">$1.5\times2\times0.6$</tex-math> </inline-formula> mm<inline-formula> <tex-math notation="LaTeX">$^{3}$</tex-math> </inline-formula>. The characterized sensor pressure range is 0&#x2013;2000 Pa, with a full-scale capacitance difference span of 0.95 pF. Typical pressure error within the pressure range of 0&#x2013;2000 Pa is <inline-formula> <tex-math notation="LaTeX">$\pm$</tex-math> </inline-formula>0.5%, and the temperature coefficient is 0.044%/<inline-formula> <tex-math notation="LaTeX">$^{\circ}$</tex-math> </inline-formula>C, both respectively from the pressure reading.2022-0017

Original languageEnglish
Pages (from-to)1-8
Number of pages8
JournalJournal of Microelectromechanical Systems
DOIs
Publication statusAccepted/In press - 2022
MoE publication typeA1 Journal article-refereed

Keywords

  • Bridge circuits
  • Capacitance
  • capacitive
  • differential
  • high sensitivity
  • low pressure
  • MEMS
  • Micromechanical devices
  • Pressure sensors
  • Sensitivity
  • Silicon
  • Temperature measurement

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