## Abstract

An ultra-high sensitivity surface-micromachined capacitive differential pressure sensor and capacitance bridge readout circuit, with amplitude balancing for differential low-pressure gas measurement applications, was designed, fabricated, and characterized. The sensor membrane has a diameter of 800 <inline-formula> <tex-math notation="LaTeX">$\mu$</tex-math> </inline-formula>m with a thickness of 1 <inline-formula> <tex-math notation="LaTeX">$\mu$</tex-math> </inline-formula>m and the chip size is <inline-formula> <tex-math notation="LaTeX">$1.5\times2\times0.6$</tex-math> </inline-formula> mm<inline-formula> <tex-math notation="LaTeX">$^{3}$</tex-math> </inline-formula>. The characterized sensor pressure range is 0–2000 Pa, with a full-scale capacitance difference span of 0.95 pF. Typical pressure error within the pressure range of 0–2000 Pa is <inline-formula> <tex-math notation="LaTeX">$\pm$</tex-math> </inline-formula>0.5%, and the temperature coefficient is 0.044%/<inline-formula> <tex-math notation="LaTeX">$^{\circ}$</tex-math> </inline-formula>C, both respectively from the pressure reading.2022-0017

Original language | English |
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Pages (from-to) | 1-8 |

Number of pages | 8 |

Journal | Journal of Microelectromechanical Systems |

DOIs | |

Publication status | Accepted/In press - 2022 |

MoE publication type | A1 Journal article-refereed |

## Keywords

- Bridge circuits
- Capacitance
- capacitive
- differential
- high sensitivity
- low pressure
- MEMS
- Micromechanical devices
- Pressure sensors
- Sensitivity
- Silicon
- Temperature measurement