Abstract
An ultra-high sensitivity surface-micromachined capacitive differential pressure sensor and capacitance bridge readout circuit, with amplitude balancing for differential low-pressure gas measurement applications, was designed, fabricated, and characterized. The sensor membrane has a diameter of 800μm with a thickness of 1μm and the chip size is 1.5× 2×0.6mm3. The characterized sensor pressure range is 0-2000 Pa, with a full-scale capacitance difference span of 0.95 pF. Typical pressure error within the pressure range of 0-2000 Pa is ±0.5%, and the temperature coefficient is 0.044%/°C, both respectively from the pressure reading.
| Original language | English |
|---|---|
| Pages (from-to) | 74-81 |
| Number of pages | 8 |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 32 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 1 Feb 2023 |
| MoE publication type | A1 Journal article-refereed |
Keywords
- Bridge circuits
- Capacitance
- capacitive
- differential
- high sensitivity
- low pressure
- MEMS
- Micromechanical devices
- Pressure sensors
- Sensitivity
- Silicon
- Temperature measurement