Ultra-High Sensitivity Surface-Micromachined Capacitive Differential Pressure Sensor for Low-Pressure Applications

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Abstract

An ultra-high sensitivity surface-micromachined capacitive differential pressure sensor and capacitance bridge readout circuit, with amplitude balancing for differential low-pressure gas measurement applications, was designed, fabricated, and characterized. The sensor membrane has a diameter of 800μm with a thickness of 1μm and the chip size is 1.5× 2×0.6mm3. The characterized sensor pressure range is 0-2000 Pa, with a full-scale capacitance difference span of 0.95 pF. Typical pressure error within the pressure range of 0-2000 Pa is ±0.5%, and the temperature coefficient is 0.044%/°C, both respectively from the pressure reading.

Original languageEnglish
Pages (from-to)74-81
Number of pages8
JournalJournal of Microelectromechanical Systems
Volume32
Issue number1
DOIs
Publication statusPublished - 1 Feb 2023
MoE publication typeA1 Journal article-refereed

Keywords

  • Bridge circuits
  • Capacitance
  • capacitive
  • differential
  • high sensitivity
  • low pressure
  • MEMS
  • Micromechanical devices
  • Pressure sensors
  • Sensitivity
  • Silicon
  • Temperature measurement

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