Ultra-High Sensitivity Surface-Micromachined Capacitive Differential Pressure Sensor for Low-Pressure Applications

Tapio Pernu; Jaakko Saarilahti; Jukka Kyynarainen; Teuvo Sillanpaa

doi:10.1109/JMEMS.2022.3218857

Ultra-High Sensitivity Surface-Micromachined Capacitive Differential Pressure Sensor for Low-Pressure Applications

Tapio Pernu
, Jaakko Saarilahti
, Jukka Kyynarainen
, Teuvo Sillanpaa

Research output: Contribution to journal › Article › Scientific › peer-review

13 Citations (Scopus)

Abstract

An ultra-high sensitivity surface-micromachined capacitive differential pressure sensor and capacitance bridge readout circuit, with amplitude balancing for differential low-pressure gas measurement applications, was designed, fabricated, and characterized. The sensor membrane has a diameter of 800μm with a thickness of 1μm and the chip size is 1.5× 2×0.6mm3. The characterized sensor pressure range is 0-2000 Pa, with a full-scale capacitance difference span of 0.95 pF. Typical pressure error within the pressure range of 0-2000 Pa is ±0.5%, and the temperature coefficient is 0.044%/°C, both respectively from the pressure reading.

Original language	English
Pages (from-to)	74-81
Number of pages	8
Journal	Journal of Microelectromechanical Systems
Volume	32
Issue number	1
DOIs	https://doi.org/10.1109/JMEMS.2022.3218857
Publication status	Published - 1 Feb 2023
MoE publication type	A1 Journal article-refereed

Keywords

Bridge circuits
Capacitance
capacitive
differential
high sensitivity
low pressure
MEMS
Micromechanical devices
Pressure sensors
Sensitivity
Silicon
Temperature measurement

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10.1109/JMEMS.2022.3218857

Cite this

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title = "Ultra-High Sensitivity Surface-Micromachined Capacitive Differential Pressure Sensor for Low-Pressure Applications",

abstract = "An ultra-high sensitivity surface-micromachined capacitive differential pressure sensor and capacitance bridge readout circuit, with amplitude balancing for differential low-pressure gas measurement applications, was designed, fabricated, and characterized. The sensor membrane has a diameter of 800μm with a thickness of 1μm and the chip size is 1.5{\texttimes} 2{\texttimes}0.6mm3. The characterized sensor pressure range is 0-2000 Pa, with a full-scale capacitance difference span of 0.95 pF. Typical pressure error within the pressure range of 0-2000 Pa is ±0.5\%, and the temperature coefficient is 0.044\%/°C, both respectively from the pressure reading.",

keywords = "Bridge circuits, Capacitance, capacitive, differential, high sensitivity, low pressure, MEMS, Micromechanical devices, Pressure sensors, Sensitivity, Silicon, Temperature measurement",

author = "Tapio Pernu and Jaakko Saarilahti and Jukka Kyynarainen and Teuvo Sillanpaa",

note = "Funding Information: This work was supported in part by the Electronic Components and Systems for European Leadership Joint Undertaking (ECSEL JU) Project, European Packaging, Assembly and Test Pilot for Manufacturing of Advanced System-In-Package (EuroPAT-MASIP), through the European Union Horizon 2020 Research and Innovation Programme. Publisher Copyright: IEEE",

year = "2023",

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doi = "10.1109/JMEMS.2022.3218857",

language = "English",

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pages = "74--81",

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AU - Pernu, Tapio

AU - Saarilahti, Jaakko

AU - Kyynarainen, Jukka

AU - Sillanpaa, Teuvo

N1 - Funding Information: This work was supported in part by the Electronic Components and Systems for European Leadership Joint Undertaking (ECSEL JU) Project, European Packaging, Assembly and Test Pilot for Manufacturing of Advanced System-In-Package (EuroPAT-MASIP), through the European Union Horizon 2020 Research and Innovation Programme. Publisher Copyright: IEEE

PY - 2023/2/1

Y1 - 2023/2/1

N2 - An ultra-high sensitivity surface-micromachined capacitive differential pressure sensor and capacitance bridge readout circuit, with amplitude balancing for differential low-pressure gas measurement applications, was designed, fabricated, and characterized. The sensor membrane has a diameter of 800μm with a thickness of 1μm and the chip size is 1.5× 2×0.6mm3. The characterized sensor pressure range is 0-2000 Pa, with a full-scale capacitance difference span of 0.95 pF. Typical pressure error within the pressure range of 0-2000 Pa is ±0.5%, and the temperature coefficient is 0.044%/°C, both respectively from the pressure reading.

AB - An ultra-high sensitivity surface-micromachined capacitive differential pressure sensor and capacitance bridge readout circuit, with amplitude balancing for differential low-pressure gas measurement applications, was designed, fabricated, and characterized. The sensor membrane has a diameter of 800μm with a thickness of 1μm and the chip size is 1.5× 2×0.6mm3. The characterized sensor pressure range is 0-2000 Pa, with a full-scale capacitance difference span of 0.95 pF. Typical pressure error within the pressure range of 0-2000 Pa is ±0.5%, and the temperature coefficient is 0.044%/°C, both respectively from the pressure reading.

KW - Bridge circuits

KW - Capacitance

KW - capacitive

KW - differential

KW - high sensitivity

KW - low pressure

KW - MEMS

KW - Micromechanical devices

KW - Pressure sensors

KW - Sensitivity

KW - Silicon

KW - Temperature measurement

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DO - 10.1109/JMEMS.2022.3218857

M3 - Article

AN - SCOPUS:85141603359

SN - 1057-7157

VL - 32

SP - 74

EP - 81

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

IS - 1

ER -

Ultra-High Sensitivity Surface-Micromachined Capacitive Differential Pressure Sensor for Low-Pressure Applications

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Ultra-High Sensitivity Surface-Micromachined Capacitive Differential Pressure Sensor for Low-Pressure Applications

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