Ultra-thin free-standing single crystalline silicon membranes with strain control

Andrey Shchepetov, Mika Prunnila, F. Alzina, L. Schneider, J. Cuffe, H. Jiang, E.I. Kauppinen, C.M. Sotomayor Torres, Jouni Ahopelto (Corresponding Author)

    Research output: Contribution to journalArticleScientificpeer-review

    44 Citations (Scopus)

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    Physics & Astronomy