Ultra-thin free-standing single crystalline silicon membranes with strain control

Andrey Shchepetov, Mika Prunnila, F. Alzina, L. Schneider, J. Cuffe, H. Jiang, E.I. Kauppinen, C.M. Sotomayor Torres, Jouni Ahopelto (Corresponding Author)

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    47 Citations (Scopus)

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    Physics & Astronomy