Ultrasensitive string-based temperature sensors

T. Larsen (Corresponding Author), S. Schmid, Leif Grönberg, A. O. Niskanen, Juha Hassel, S. Dohn, A. Boisen

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    48 Citations (Scopus)

    Abstract

    Resonant strings are a promising concept for ultra sensitive temperature detection. We present an analytical model for the sensitivity with which we optimize the temperature response of resonant strings by varying geometry and material. The temperature sensitivity of silicon nitride and aluminum microstrings was measured. The relative change in resonant frequency per temperature change of −1.74±0.04%/°C of the aluminum strings is more than one order of magnitude higher than of the silicon nitride strings and of comparable state-of-the-art AuPd strings.
    Original languageEnglish
    Article number121901
    JournalApplied Physics Letters
    Volume98
    Issue number12
    DOIs
    Publication statusPublished - 2011
    MoE publication typeA1 Journal article-refereed

    Keywords

    • Temperature sensors

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  • Cite this

    Larsen, T., Schmid, S., Grönberg, L., Niskanen, A. O., Hassel, J., Dohn, S., & Boisen, A. (2011). Ultrasensitive string-based temperature sensors. Applied Physics Letters, 98(12), [121901]. https://doi.org/10.1063/1.3567012