Ultrasensitive string-based temperature sensors

T. Larsen (Corresponding Author), S. Schmid, Leif Grönberg, A. O. Niskanen, Juha Hassel, S. Dohn, A. Boisen

Research output: Contribution to journalArticleScientificpeer-review

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Abstract

Resonant strings are a promising concept for ultra sensitive temperature detection. We present an analytical model for the sensitivity with which we optimize the temperature response of resonant strings by varying geometry and material. The temperature sensitivity of silicon nitride and aluminum microstrings was measured. The relative change in resonant frequency per temperature change of −1.74±0.04%/°C of the aluminum strings is more than one order of magnitude higher than of the silicon nitride strings and of comparable state-of-the-art AuPd strings.
Original languageEnglish
Article number121901
JournalApplied Physics Letters
Volume98
Issue number12
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

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temperature sensors
strings
silicon nitrides
aluminum
temperature
resonant frequencies
sensitivity
geometry

Keywords

  • Temperature sensors

Cite this

Larsen, T., Schmid, S., Grönberg, L., Niskanen, A. O., Hassel, J., Dohn, S., & Boisen, A. (2011). Ultrasensitive string-based temperature sensors. Applied Physics Letters, 98(12), [121901]. https://doi.org/10.1063/1.3567012
Larsen, T. ; Schmid, S. ; Grönberg, Leif ; Niskanen, A. O. ; Hassel, Juha ; Dohn, S. ; Boisen, A. / Ultrasensitive string-based temperature sensors. In: Applied Physics Letters. 2011 ; Vol. 98, No. 12.
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Larsen, T, Schmid, S, Grönberg, L, Niskanen, AO, Hassel, J, Dohn, S & Boisen, A 2011, 'Ultrasensitive string-based temperature sensors', Applied Physics Letters, vol. 98, no. 12, 121901. https://doi.org/10.1063/1.3567012

Ultrasensitive string-based temperature sensors. / Larsen, T. (Corresponding Author); Schmid, S.; Grönberg, Leif; Niskanen, A. O.; Hassel, Juha; Dohn, S.; Boisen, A.

In: Applied Physics Letters, Vol. 98, No. 12, 121901, 2011.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Ultrasensitive string-based temperature sensors

AU - Larsen, T.

AU - Schmid, S.

AU - Grönberg, Leif

AU - Niskanen, A. O.

AU - Hassel, Juha

AU - Dohn, S.

AU - Boisen, A.

N1 - Project code: 30356

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N2 - Resonant strings are a promising concept for ultra sensitive temperature detection. We present an analytical model for the sensitivity with which we optimize the temperature response of resonant strings by varying geometry and material. The temperature sensitivity of silicon nitride and aluminum microstrings was measured. The relative change in resonant frequency per temperature change of −1.74±0.04%/°C of the aluminum strings is more than one order of magnitude higher than of the silicon nitride strings and of comparable state-of-the-art AuPd strings.

AB - Resonant strings are a promising concept for ultra sensitive temperature detection. We present an analytical model for the sensitivity with which we optimize the temperature response of resonant strings by varying geometry and material. The temperature sensitivity of silicon nitride and aluminum microstrings was measured. The relative change in resonant frequency per temperature change of −1.74±0.04%/°C of the aluminum strings is more than one order of magnitude higher than of the silicon nitride strings and of comparable state-of-the-art AuPd strings.

KW - Temperature sensors

U2 - 10.1063/1.3567012

DO - 10.1063/1.3567012

M3 - Article

VL - 98

JO - Applied Physics Letters

JF - Applied Physics Letters

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M1 - 121901

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Larsen T, Schmid S, Grönberg L, Niskanen AO, Hassel J, Dohn S et al. Ultrasensitive string-based temperature sensors. Applied Physics Letters. 2011;98(12). 121901. https://doi.org/10.1063/1.3567012