Ultrathin MEMS pressure sensor and readout ASIC

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

We report a new capacitive pressure sensor and a read-out circuit to be integrated in a FFR catheter. The novelty presented in this work is based on two new components: (1) VTT ultra thin and narrow MEMS pressure sensor element and (2) a surface area optimized ASIC designed and implemented for pressure sensor readout and AD-Conversion. The laboratory measurement results of the MEMS pressure sensor with the ASIC correlate well with the calculated and simulated results.
Original languageEnglish
Title of host publicationDMD Europe 2017
Subtitle of host publicationMicro-fabrication for medical devices: Abstracts and program
Pages33
Number of pages1
Publication statusPublished - 2017
MoE publication typeA4 Article in a conference publication
EventDesign of Medical Devices Conference, DMD Europe 2017, Micro-fabrication for medical devices - Eindhoven, Netherlands
Duration: 14 Nov 201715 Nov 2017

Conference

ConferenceDesign of Medical Devices Conference, DMD Europe 2017, Micro-fabrication for medical devices
CountryNetherlands
CityEindhoven
Period14/11/1715/11/17

Fingerprint

Pressure sensors
Application specific integrated circuits
MEMS
Capacitive sensors
Catheters
Networks (circuits)

Keywords

  • FFR catheter
  • ultrathin
  • MEMS
  • ASIC
  • pressure sensor

Cite this

Saarilahti, J., Gomes Martins, D., Kärkkäinen, A., Feng, G., Kyynäräinen, J., & Kuisma, H. (2017). Ultrathin MEMS pressure sensor and readout ASIC. In DMD Europe 2017: Micro-fabrication for medical devices: Abstracts and program (pp. 33)
Saarilahti, Jaakko ; Gomes Martins, David ; Kärkkäinen, Anu ; Feng, Gao ; Kyynäräinen, Jukka ; Kuisma, Heikki. / Ultrathin MEMS pressure sensor and readout ASIC. DMD Europe 2017: Micro-fabrication for medical devices: Abstracts and program. 2017. pp. 33
@inproceedings{5205bc713afa47f2a8926e09dbe12256,
title = "Ultrathin MEMS pressure sensor and readout ASIC",
abstract = "We report a new capacitive pressure sensor and a read-out circuit to be integrated in a FFR catheter. The novelty presented in this work is based on two new components: (1) VTT ultra thin and narrow MEMS pressure sensor element and (2) a surface area optimized ASIC designed and implemented for pressure sensor readout and AD-Conversion. The laboratory measurement results of the MEMS pressure sensor with the ASIC correlate well with the calculated and simulated results.",
keywords = "FFR catheter, ultrathin, MEMS, ASIC, pressure sensor",
author = "Jaakko Saarilahti and {Gomes Martins}, David and Anu K{\"a}rkk{\"a}inen and Gao Feng and Jukka Kyyn{\"a}r{\"a}inen and Heikki Kuisma",
note = "Project code: 101248",
year = "2017",
language = "English",
pages = "33",
booktitle = "DMD Europe 2017",

}

Saarilahti, J, Gomes Martins, D, Kärkkäinen, A, Feng, G, Kyynäräinen, J & Kuisma, H 2017, Ultrathin MEMS pressure sensor and readout ASIC. in DMD Europe 2017: Micro-fabrication for medical devices: Abstracts and program. pp. 33, Design of Medical Devices Conference, DMD Europe 2017, Micro-fabrication for medical devices, Eindhoven, Netherlands, 14/11/17.

Ultrathin MEMS pressure sensor and readout ASIC. / Saarilahti, Jaakko; Gomes Martins, David; Kärkkäinen, Anu; Feng, Gao; Kyynäräinen, Jukka; Kuisma, Heikki.

DMD Europe 2017: Micro-fabrication for medical devices: Abstracts and program. 2017. p. 33.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Ultrathin MEMS pressure sensor and readout ASIC

AU - Saarilahti, Jaakko

AU - Gomes Martins, David

AU - Kärkkäinen, Anu

AU - Feng, Gao

AU - Kyynäräinen, Jukka

AU - Kuisma, Heikki

N1 - Project code: 101248

PY - 2017

Y1 - 2017

N2 - We report a new capacitive pressure sensor and a read-out circuit to be integrated in a FFR catheter. The novelty presented in this work is based on two new components: (1) VTT ultra thin and narrow MEMS pressure sensor element and (2) a surface area optimized ASIC designed and implemented for pressure sensor readout and AD-Conversion. The laboratory measurement results of the MEMS pressure sensor with the ASIC correlate well with the calculated and simulated results.

AB - We report a new capacitive pressure sensor and a read-out circuit to be integrated in a FFR catheter. The novelty presented in this work is based on two new components: (1) VTT ultra thin and narrow MEMS pressure sensor element and (2) a surface area optimized ASIC designed and implemented for pressure sensor readout and AD-Conversion. The laboratory measurement results of the MEMS pressure sensor with the ASIC correlate well with the calculated and simulated results.

KW - FFR catheter

KW - ultrathin

KW - MEMS

KW - ASIC

KW - pressure sensor

M3 - Conference article in proceedings

SP - 33

BT - DMD Europe 2017

ER -

Saarilahti J, Gomes Martins D, Kärkkäinen A, Feng G, Kyynäräinen J, Kuisma H. Ultrathin MEMS pressure sensor and readout ASIC. In DMD Europe 2017: Micro-fabrication for medical devices: Abstracts and program. 2017. p. 33