Ultrathin MEMS pressure sensor and readout ASIC

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    We report a new capacitive pressure sensor and a read-out circuit to be integrated in a FFR catheter. The novelty presented in this work is based on two new components: (1) VTT ultra thin and narrow MEMS pressure sensor element and (2) a surface area optimized ASIC designed and implemented for pressure sensor readout and AD-Conversion. The laboratory measurement results of the MEMS pressure sensor with the ASIC correlate well with the calculated and simulated results.
    Original languageEnglish
    Title of host publicationDMD Europe 2017
    Subtitle of host publicationMicro-fabrication for medical devices: Abstracts and program
    Pages33
    Number of pages1
    Publication statusPublished - 2017
    MoE publication typeA4 Article in a conference publication
    EventDesign of Medical Devices Conference, DMD Europe 2017, Micro-fabrication for medical devices - Eindhoven, Netherlands
    Duration: 14 Nov 201715 Nov 2017

    Conference

    ConferenceDesign of Medical Devices Conference, DMD Europe 2017, Micro-fabrication for medical devices
    CountryNetherlands
    CityEindhoven
    Period14/11/1715/11/17

      Fingerprint

    Keywords

    • FFR catheter
    • ultrathin
    • MEMS
    • ASIC
    • pressure sensor
    • OtaNano

    Cite this

    Saarilahti, J., Gomes Martins, D., Kärkkäinen, A., Feng, G., Kyynäräinen, J., & Kuisma, H. (2017). Ultrathin MEMS pressure sensor and readout ASIC. In DMD Europe 2017: Micro-fabrication for medical devices: Abstracts and program (pp. 33)