Ultrathin MEMS pressure sensor and readout ASIC

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    We report a new capacitive pressure sensor and a read-out circuit to be integrated in a FFR catheter. The novelty presented in this work is based on two new components: (1) VTT ultra thin and narrow MEMS pressure sensor element and (2) a surface area optimized ASIC designed and implemented for pressure sensor readout and AD-Conversion. The laboratory measurement results of the MEMS pressure sensor with the ASIC correlate well with the calculated and simulated results.
    Original languageEnglish
    Title of host publicationDMD Europe 2017
    Subtitle of host publicationMicro-fabrication for medical devices: Abstracts and program
    Pages33
    Number of pages1
    Publication statusPublished - 2017
    MoE publication typeA4 Article in a conference publication
    EventDesign of Medical Devices Conference, DMD Europe 2017, Micro-fabrication for medical devices - Eindhoven, Netherlands
    Duration: 14 Nov 201715 Nov 2017

    Conference

    ConferenceDesign of Medical Devices Conference, DMD Europe 2017, Micro-fabrication for medical devices
    CountryNetherlands
    CityEindhoven
    Period14/11/1715/11/17

    Fingerprint

    Pressure sensors
    Application specific integrated circuits
    MEMS
    Capacitive sensors
    Catheters
    Networks (circuits)

    Keywords

    • FFR catheter
    • ultrathin
    • MEMS
    • ASIC
    • pressure sensor

    Cite this

    Saarilahti, J., Gomes Martins, D., Kärkkäinen, A., Feng, G., Kyynäräinen, J., & Kuisma, H. (2017). Ultrathin MEMS pressure sensor and readout ASIC. In DMD Europe 2017: Micro-fabrication for medical devices: Abstracts and program (pp. 33)
    Saarilahti, Jaakko ; Gomes Martins, David ; Kärkkäinen, Anu ; Feng, Gao ; Kyynäräinen, Jukka ; Kuisma, Heikki. / Ultrathin MEMS pressure sensor and readout ASIC. DMD Europe 2017: Micro-fabrication for medical devices: Abstracts and program. 2017. pp. 33
    @inproceedings{5205bc713afa47f2a8926e09dbe12256,
    title = "Ultrathin MEMS pressure sensor and readout ASIC",
    abstract = "We report a new capacitive pressure sensor and a read-out circuit to be integrated in a FFR catheter. The novelty presented in this work is based on two new components: (1) VTT ultra thin and narrow MEMS pressure sensor element and (2) a surface area optimized ASIC designed and implemented for pressure sensor readout and AD-Conversion. The laboratory measurement results of the MEMS pressure sensor with the ASIC correlate well with the calculated and simulated results.",
    keywords = "FFR catheter, ultrathin, MEMS, ASIC, pressure sensor",
    author = "Jaakko Saarilahti and {Gomes Martins}, David and Anu K{\"a}rkk{\"a}inen and Gao Feng and Jukka Kyyn{\"a}r{\"a}inen and Heikki Kuisma",
    note = "Project code: 101248",
    year = "2017",
    language = "English",
    pages = "33",
    booktitle = "DMD Europe 2017",

    }

    Saarilahti, J, Gomes Martins, D, Kärkkäinen, A, Feng, G, Kyynäräinen, J & Kuisma, H 2017, Ultrathin MEMS pressure sensor and readout ASIC. in DMD Europe 2017: Micro-fabrication for medical devices: Abstracts and program. pp. 33, Design of Medical Devices Conference, DMD Europe 2017, Micro-fabrication for medical devices, Eindhoven, Netherlands, 14/11/17.

    Ultrathin MEMS pressure sensor and readout ASIC. / Saarilahti, Jaakko; Gomes Martins, David; Kärkkäinen, Anu; Feng, Gao; Kyynäräinen, Jukka; Kuisma, Heikki.

    DMD Europe 2017: Micro-fabrication for medical devices: Abstracts and program. 2017. p. 33.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    TY - GEN

    T1 - Ultrathin MEMS pressure sensor and readout ASIC

    AU - Saarilahti, Jaakko

    AU - Gomes Martins, David

    AU - Kärkkäinen, Anu

    AU - Feng, Gao

    AU - Kyynäräinen, Jukka

    AU - Kuisma, Heikki

    N1 - Project code: 101248

    PY - 2017

    Y1 - 2017

    N2 - We report a new capacitive pressure sensor and a read-out circuit to be integrated in a FFR catheter. The novelty presented in this work is based on two new components: (1) VTT ultra thin and narrow MEMS pressure sensor element and (2) a surface area optimized ASIC designed and implemented for pressure sensor readout and AD-Conversion. The laboratory measurement results of the MEMS pressure sensor with the ASIC correlate well with the calculated and simulated results.

    AB - We report a new capacitive pressure sensor and a read-out circuit to be integrated in a FFR catheter. The novelty presented in this work is based on two new components: (1) VTT ultra thin and narrow MEMS pressure sensor element and (2) a surface area optimized ASIC designed and implemented for pressure sensor readout and AD-Conversion. The laboratory measurement results of the MEMS pressure sensor with the ASIC correlate well with the calculated and simulated results.

    KW - FFR catheter

    KW - ultrathin

    KW - MEMS

    KW - ASIC

    KW - pressure sensor

    M3 - Conference article in proceedings

    SP - 33

    BT - DMD Europe 2017

    ER -

    Saarilahti J, Gomes Martins D, Kärkkäinen A, Feng G, Kyynäräinen J, Kuisma H. Ultrathin MEMS pressure sensor and readout ASIC. In DMD Europe 2017: Micro-fabrication for medical devices: Abstracts and program. 2017. p. 33