Ultrathin MEMS pressure sensor and readout ASIC

Jaakko Saarilahti; David Gomes Martins; Anu Kärkkäinen; Gao Feng; Jukka Kyynäräinen; Heikki Kuisma

Ultrathin MEMS pressure sensor and readout ASIC

Jaakko Saarilahti
, David Gomes Martins
, Anu Kärkkäinen
, Gao Feng
, Jukka Kyynäräinen
, Heikki Kuisma

Murata Electronics Oy

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Abstract

We report a new capacitive pressure sensor and a read-out circuit to be integrated in a FFR catheter. The novelty presented in this work is based on two new components: (1) VTT ultra thin and narrow MEMS pressure sensor element and (2) a surface area optimized ASIC designed and implemented for pressure sensor readout and AD-Conversion. The laboratory measurement results of the MEMS pressure sensor with the ASIC correlate well with the calculated and simulated results.

Original language	English
Title of host publication	DMD Europe 2017
Subtitle of host publication	Micro-fabrication for medical devices: Abstracts and program
Publisher	Delft Technical University
Pages	33
Number of pages	1
Publication status	Published - 2017
MoE publication type	Not Eligible
Event	Design of Medical Devices Conference, DMD Europe 2017, Micro-fabrication for medical devices - Eindhoven, Netherlands Duration: 14 Nov 2017 → 15 Nov 2017

Conference

Conference	Design of Medical Devices Conference, DMD Europe 2017, Micro-fabrication for medical devices
Country/Territory	Netherlands
City	Eindhoven
Period	14/11/17 → 15/11/17

Keywords

FFR catheter
ultrathin
MEMS
ASIC
pressure sensor
OtaNano

OtaNano
VTT Technical Research Centre of Finland
Facility/equipment: Facility

Cite this

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title = "Ultrathin MEMS pressure sensor and readout ASIC",

abstract = "We report a new capacitive pressure sensor and a read-out circuit to be integrated in a FFR catheter. The novelty presented in this work is based on two new components: (1) VTT ultra thin and narrow MEMS pressure sensor element and (2) a surface area optimized ASIC designed and implemented for pressure sensor readout and AD-Conversion. The laboratory measurement results of the MEMS pressure sensor with the ASIC correlate well with the calculated and simulated results.",

keywords = "FFR catheter, ultrathin, MEMS, ASIC, pressure sensor, OtaNano",

author = "Jaakko Saarilahti and \{Gomes Martins\}, David and Anu K{\"a}rkk{\"a}inen and Gao Feng and Jukka Kyyn{\"a}r{\"a}inen and Heikki Kuisma",

note = "Project code: 101248; Design of Medical Devices Conference, DMD Europe 2017, Micro-fabrication for medical devices ; Conference date: 14-11-2017 Through 15-11-2017",

year = "2017",

language = "English",

pages = "33",

booktitle = "DMD Europe 2017",

publisher = "Delft Technical University",

address = "Netherlands",

}

Saarilahti, J, Gomes Martins, D , Kärkkäinen, A, Feng, G, Kyynäräinen, J & Kuisma, H 2017, Ultrathin MEMS pressure sensor and readout ASIC. in DMD Europe 2017: Micro-fabrication for medical devices: Abstracts and program. Delft Technical University, pp. 33, Design of Medical Devices Conference, DMD Europe 2017, Micro-fabrication for medical devices, Eindhoven, Netherlands, 14/11/17.

TY - CHAP

T1 - Ultrathin MEMS pressure sensor and readout ASIC

AU - Saarilahti, Jaakko

AU - Gomes Martins, David

AU - Kärkkäinen, Anu

AU - Feng, Gao

AU - Kyynäräinen, Jukka

AU - Kuisma, Heikki

N1 - Project code: 101248

PY - 2017

Y1 - 2017

N2 - We report a new capacitive pressure sensor and a read-out circuit to be integrated in a FFR catheter. The novelty presented in this work is based on two new components: (1) VTT ultra thin and narrow MEMS pressure sensor element and (2) a surface area optimized ASIC designed and implemented for pressure sensor readout and AD-Conversion. The laboratory measurement results of the MEMS pressure sensor with the ASIC correlate well with the calculated and simulated results.

AB - We report a new capacitive pressure sensor and a read-out circuit to be integrated in a FFR catheter. The novelty presented in this work is based on two new components: (1) VTT ultra thin and narrow MEMS pressure sensor element and (2) a surface area optimized ASIC designed and implemented for pressure sensor readout and AD-Conversion. The laboratory measurement results of the MEMS pressure sensor with the ASIC correlate well with the calculated and simulated results.

KW - FFR catheter

KW - ultrathin

KW - MEMS

KW - ASIC

KW - pressure sensor

KW - OtaNano

M3 - Conference abstract in proceedings

SP - 33

BT - DMD Europe 2017

PB - Delft Technical University

T2 - Design of Medical Devices Conference, DMD Europe 2017, Micro-fabrication for medical devices

Y2 - 14 November 2017 through 15 November 2017

ER -

Ultrathin MEMS pressure sensor and readout ASIC

Abstract

Conference

Keywords

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Equipment

OtaNano

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