Equipment
- 1 results
Ultrathin MEMS pressure sensor and readout ASIC
- Jaakko Saarilahti
- , David Gomes Martins
- , Anu Kärkkäinen
- , Gao Feng
- , Jukka Kyynäräinen
- , Heikki Kuisma
- Murata Electronics Oy
Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific