Ultraviolet photoresponse of ZnO nanostructured AlGaN/GaN HEMTs

Salahuddin Dogar, Waqar Khan, Sam Dong Kim*

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

26 Citations (Scopus)

Abstract

We present the first active visible blind ultraviolet (UV) photodetector based on zinc oxide (ZnO) nanostructured AlGaN/GaN high electron mobility transistors (HEMTs). The ZnO nanorods (NRs) are selectively grown on the gate area by using hydrothermal method. It is shown that ZnO nanorod (NR)-gated UV detectors exhibit much superior performance in terms of response speed and recovery time to those of seed-layer-gated detectors. It is also found that the best response speed (∼10 and∼190 ms) and responsivity (~1.1×105 A/W) were observed from detectors of the shortest gate length of 2 μm among our NR-gated devices of three different gate dimensions, and this responsivity is about one order higher than the best performance of ZnO NR-based UV detectors reported to date.

Original languageEnglish
Pages (from-to)71-77
JournalMaterials Science in Semiconductor Processing
Volume44
DOIs
Publication statusPublished - 15 Mar 2016
MoE publication typeA1 Journal article-refereed

Funding

This work was supported by the basic science research program (grant number 2012001298) through the National Research foundation of Korea funded by Ministry of Education. The Authors would like to thank Dr. Soo Min Kim, Sujeong Jeong and professor Dong Hwan Kim at Korea University for their support to measure the spectral responses of the devices.

Keywords

  • AlGaN/GaN HEMT
  • Gate length effect
  • High responsivity
  • Response speed
  • UV detector
  • ZnO nanorods

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