Abstract
We present the first active visible blind ultraviolet (UV) photodetector based on zinc oxide (ZnO) nanostructured AlGaN/GaN high electron mobility transistors (HEMTs). The ZnO nanorods (NRs) are selectively grown on the gate area by using hydrothermal method. It is shown that ZnO nanorod (NR)-gated UV detectors exhibit much superior performance in terms of response speed and recovery time to those of seed-layer-gated detectors. It is also found that the best response speed (∼10 and∼190 ms) and responsivity (~1.1×105 A/W) were observed from detectors of the shortest gate length of 2 μm among our NR-gated devices of three different gate dimensions, and this responsivity is about one order higher than the best performance of ZnO NR-based UV detectors reported to date.
Original language | English |
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Pages (from-to) | 71-77 |
Journal | Materials Science in Semiconductor Processing |
Volume | 44 |
DOIs | |
Publication status | Published - 15 Mar 2016 |
MoE publication type | A1 Journal article-refereed |
Funding
This work was supported by the basic science research program (grant number 2012001298) through the National Research foundation of Korea funded by Ministry of Education. The Authors would like to thank Dr. Soo Min Kim, Sujeong Jeong and professor Dong Hwan Kim at Korea University for their support to measure the spectral responses of the devices.
Keywords
- AlGaN/GaN HEMT
- Gate length effect
- High responsivity
- Response speed
- UV detector
- ZnO nanorods