@inproceedings{c40748585d5142b19e5f92ca37bdd300,
title = "Use of ALD thin film Bragg mirror stacks in tuneable visible light MEMS Fabry-Perot interferometers",
abstract = "This paper discusses the use of ALD thin films as Bragg mirror structure materials in MEMS Fabry-Perot interferometers in the visible spectral range. Utilizing polyimide sacrificial layer in the FPI fabrication process is also presented as an alternative method to allow higher temperature (T= 300 °C) ALD FPI processing. ALD Al2O3 and TiO2 thin films grown at T= 110 °C are optically characterized to determine their performance in the UV - visible range (λ>200nm) and effects of the ALD temperature on the thin film stacks and the FPI process is discussed. Optically simulated 5-layer Bragg mirror stacks consisting of ALD Al2O3 and TiO2 for wavelengths between 420 nm and 1000 nm are presented and corresponding MEMS mirror membrane structures are fabricated at T= 110 °C and tested for their release yield properties. As a result, the applicable wavelength range of the low-temperature ALD FPI technology can be defined.",
author = "Anna Rissanen and Riikka Puurunen",
note = "CA2: TK610 SDA: MEL PGN: 9 p.; Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V ; Conference date: 24-01-2012 Through 25-01-2012",
year = "2012",
doi = "10.1117/12.905084",
language = "English",
isbn = "978-0-8194-8892-3",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
editor = "Schoenfeld, {Winston V.}",
booktitle = "Proceedings SPIE 8249",
address = "United States",
}