Use of ALD thin film Bragg mirror stacks in tuneable visible light MEMS Fabry-Perot interferometers

Anna Rissanen, Riikka Puurunen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

7 Citations (Scopus)

Abstract

This paper discusses the use of ALD thin films as Bragg mirror structure materials in MEMS Fabry-Perot interferometers in the visible spectral range. Utilizing polyimide sacrificial layer in the FPI fabrication process is also presented as an alternative method to allow higher temperature (T= 300 °C) ALD FPI processing. ALD Al2O3 and TiO2 thin films grown at T= 110 °C are optically characterized to determine their performance in the UV - visible range (λ>200nm) and effects of the ALD temperature on the thin film stacks and the FPI process is discussed. Optically simulated 5-layer Bragg mirror stacks consisting of ALD Al2O3 and TiO2 for wavelengths between 420 nm and 1000 nm are presented and corresponding MEMS mirror membrane structures are fabricated at T= 110 °C and tested for their release yield properties. As a result, the applicable wavelength range of the low-temperature ALD FPI technology can be defined.
Original languageEnglish
Title of host publicationProceedings SPIE 8249
Subtitle of host publicationAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics V
EditorsWinston V. Schoenfeld
PublisherInternational Society for Optics and Photonics SPIE
Number of pages9
ISBN (Print)978-0-8194-8892-3
DOIs
Publication statusPublished - 2012
MoE publication typeNot Eligible
EventAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics V - San Francisco, United States
Duration: 24 Jan 201225 Jan 2012

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume8249
ISSN (Print)0277-786X

Conference

ConferenceAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics V
CountryUnited States
CitySan Francisco
Period24/01/1225/01/12

Fingerprint

Fabry-Perot interferometers
Bragg reflectors
microelectromechanical systems
thin films
membrane structures
polyimides
wavelengths
mirrors
fabrication
temperature

Cite this

Rissanen, A., & Puurunen, R. (2012). Use of ALD thin film Bragg mirror stacks in tuneable visible light MEMS Fabry-Perot interferometers. In W. V. Schoenfeld (Ed.), Proceedings SPIE 8249 : Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V [82491A] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 8249 https://doi.org/10.1117/12.905084
Rissanen, Anna ; Puurunen, Riikka. / Use of ALD thin film Bragg mirror stacks in tuneable visible light MEMS Fabry-Perot interferometers. Proceedings SPIE 8249 : Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V. editor / Winston V. Schoenfeld. International Society for Optics and Photonics SPIE, 2012. (Proceedings of SPIE, Vol. 8249).
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abstract = "This paper discusses the use of ALD thin films as Bragg mirror structure materials in MEMS Fabry-Perot interferometers in the visible spectral range. Utilizing polyimide sacrificial layer in the FPI fabrication process is also presented as an alternative method to allow higher temperature (T= 300 °C) ALD FPI processing. ALD Al2O3 and TiO2 thin films grown at T= 110 °C are optically characterized to determine their performance in the UV - visible range (λ>200nm) and effects of the ALD temperature on the thin film stacks and the FPI process is discussed. Optically simulated 5-layer Bragg mirror stacks consisting of ALD Al2O3 and TiO2 for wavelengths between 420 nm and 1000 nm are presented and corresponding MEMS mirror membrane structures are fabricated at T= 110 °C and tested for their release yield properties. As a result, the applicable wavelength range of the low-temperature ALD FPI technology can be defined.",
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Rissanen, A & Puurunen, R 2012, Use of ALD thin film Bragg mirror stacks in tuneable visible light MEMS Fabry-Perot interferometers. in WV Schoenfeld (ed.), Proceedings SPIE 8249 : Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V., 82491A, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, San Francisco, United States, 24/01/12. https://doi.org/10.1117/12.905084

Use of ALD thin film Bragg mirror stacks in tuneable visible light MEMS Fabry-Perot interferometers. / Rissanen, Anna; Puurunen, Riikka.

Proceedings SPIE 8249 : Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V. ed. / Winston V. Schoenfeld. International Society for Optics and Photonics SPIE, 2012. 82491A (Proceedings of SPIE, Vol. 8249).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AB - This paper discusses the use of ALD thin films as Bragg mirror structure materials in MEMS Fabry-Perot interferometers in the visible spectral range. Utilizing polyimide sacrificial layer in the FPI fabrication process is also presented as an alternative method to allow higher temperature (T= 300 °C) ALD FPI processing. ALD Al2O3 and TiO2 thin films grown at T= 110 °C are optically characterized to determine their performance in the UV - visible range (λ>200nm) and effects of the ALD temperature on the thin film stacks and the FPI process is discussed. Optically simulated 5-layer Bragg mirror stacks consisting of ALD Al2O3 and TiO2 for wavelengths between 420 nm and 1000 nm are presented and corresponding MEMS mirror membrane structures are fabricated at T= 110 °C and tested for their release yield properties. As a result, the applicable wavelength range of the low-temperature ALD FPI technology can be defined.

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Rissanen A, Puurunen R. Use of ALD thin film Bragg mirror stacks in tuneable visible light MEMS Fabry-Perot interferometers. In Schoenfeld WV, editor, Proceedings SPIE 8249 : Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V. International Society for Optics and Photonics SPIE. 2012. 82491A. (Proceedings of SPIE, Vol. 8249). https://doi.org/10.1117/12.905084