Use of Electromechanical Feedback in MEMS for Suppressing Electronics Noise

Panu Helistö (Corresponding Author), Hannu Sipola, Heikki Seppä

    Research output: Contribution to journalArticleScientificpeer-review

    Abstract

    At the pull-in point, a capacitive MEMS sensor becomes infinitely sensitive to applied force as the effective spring constant goes to zero because of electromechanical feedback We show that this phenomenon can be used to fully eliminate the noise contribution of readout electronics. Experimentally, we show that the electronics noise and interference contribution to system resolution could be suppressed by an order of magnitude, reaching the intrinsic resolution of the MEMS microphone. Experiments are in good agreement with a theory based on a small signal model of a harmonic MEMS oscillator. The technique allows the use of standard integrated electronics with noise-critical MEMS sensors, such as microphones, pressure sensors and accelerometers.
    Original languageEnglish
    Pages (from-to)1013-1016
    Number of pages3
    JournalProcedia Engineering
    Volume47
    DOIs
    Publication statusPublished - 2012
    MoE publication typeA1 Journal article-refereed
    Event26th European Conference on Solid-State Transducers, EUROSENSORS 2012. Krakow, 9 - 12 Sept. 2012 -
    Duration: 1 Jan 2012 → …

    Fingerprint

    MEMS
    Electronic equipment
    Feedback
    Microphones
    Sensors
    Pressure sensors
    Accelerometers
    Experiments

    Keywords

    • MEMS sensor
    • Readout noise
    • Pull-in

    Cite this

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    title = "Use of Electromechanical Feedback in MEMS for Suppressing Electronics Noise",
    abstract = "At the pull-in point, a capacitive MEMS sensor becomes infinitely sensitive to applied force as the effective spring constant goes to zero because of electromechanical feedback We show that this phenomenon can be used to fully eliminate the noise contribution of readout electronics. Experimentally, we show that the electronics noise and interference contribution to system resolution could be suppressed by an order of magnitude, reaching the intrinsic resolution of the MEMS microphone. Experiments are in good agreement with a theory based on a small signal model of a harmonic MEMS oscillator. The technique allows the use of standard integrated electronics with noise-critical MEMS sensors, such as microphones, pressure sensors and accelerometers.",
    keywords = "MEMS sensor, Readout noise, Pull-in",
    author = "Panu Helist{\"o} and Hannu Sipola and Heikki Sepp{\"a}",
    year = "2012",
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    Use of Electromechanical Feedback in MEMS for Suppressing Electronics Noise. / Helistö, Panu (Corresponding Author); Sipola, Hannu; Seppä, Heikki.

    In: Procedia Engineering, Vol. 47, 2012, p. 1013-1016.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Use of Electromechanical Feedback in MEMS for Suppressing Electronics Noise

    AU - Helistö, Panu

    AU - Sipola, Hannu

    AU - Seppä, Heikki

    PY - 2012

    Y1 - 2012

    N2 - At the pull-in point, a capacitive MEMS sensor becomes infinitely sensitive to applied force as the effective spring constant goes to zero because of electromechanical feedback We show that this phenomenon can be used to fully eliminate the noise contribution of readout electronics. Experimentally, we show that the electronics noise and interference contribution to system resolution could be suppressed by an order of magnitude, reaching the intrinsic resolution of the MEMS microphone. Experiments are in good agreement with a theory based on a small signal model of a harmonic MEMS oscillator. The technique allows the use of standard integrated electronics with noise-critical MEMS sensors, such as microphones, pressure sensors and accelerometers.

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    KW - MEMS sensor

    KW - Readout noise

    KW - Pull-in

    U2 - 10.1016/j.proeng.2012.09.319

    DO - 10.1016/j.proeng.2012.09.319

    M3 - Article

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    JF - Procedia Engineering

    SN - 1877-7058

    ER -