Use of Electromechanical Feedback in MEMS for Suppressing Electronics Noise

Panu Helistö (Corresponding Author), Hannu Sipola, Heikki Seppä

    Research output: Contribution to journalArticleScientificpeer-review

    Abstract

    At the pull-in point, a capacitive MEMS sensor becomes infinitely sensitive to applied force as the effective spring constant goes to zero because of electromechanical feedback We show that this phenomenon can be used to fully eliminate the noise contribution of readout electronics. Experimentally, we show that the electronics noise and interference contribution to system resolution could be suppressed by an order of magnitude, reaching the intrinsic resolution of the MEMS microphone. Experiments are in good agreement with a theory based on a small signal model of a harmonic MEMS oscillator. The technique allows the use of standard integrated electronics with noise-critical MEMS sensors, such as microphones, pressure sensors and accelerometers.
    Original languageEnglish
    Pages (from-to)1013-1016
    Number of pages3
    JournalProcedia Engineering
    Volume47
    DOIs
    Publication statusPublished - 2012
    MoE publication typeA1 Journal article-refereed
    Event26th European Conference on Solid-State Transducers, EUROSENSORS 2012. Krakow, 9 - 12 Sept. 2012 -
    Duration: 1 Jan 2012 → …

    Keywords

    • MEMS sensor
    • Readout noise
    • Pull-in

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