Use of Electromechanical Feedback in MEMS for Suppressing Electronics Noise

Panu Helistö (Corresponding Author), Hannu Sipola, Heikki Seppä

Research output: Contribution to journalArticleScientificpeer-review

Abstract

At the pull-in point, a capacitive MEMS sensor becomes infinitely sensitive to applied force as the effective spring constant goes to zero because of electromechanical feedback We show that this phenomenon can be used to fully eliminate the noise contribution of readout electronics. Experimentally, we show that the electronics noise and interference contribution to system resolution could be suppressed by an order of magnitude, reaching the intrinsic resolution of the MEMS microphone. Experiments are in good agreement with a theory based on a small signal model of a harmonic MEMS oscillator. The technique allows the use of standard integrated electronics with noise-critical MEMS sensors, such as microphones, pressure sensors and accelerometers.
Original languageEnglish
Pages (from-to)1013-1016
Number of pages3
JournalProcedia Engineering
Volume47
DOIs
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed
Event26th European Conference on Solid-State Transducers, EUROSENSORS 2012. Krakow, 9 - 12 Sept. 2012 -
Duration: 1 Jan 2012 → …

Fingerprint

MEMS
Electronic equipment
Feedback
Microphones
Sensors
Pressure sensors
Accelerometers
Experiments

Keywords

  • MEMS sensor
  • Readout noise
  • Pull-in

Cite this

@article{8cef14e0d1d249168e85b1f9f9ef0a1a,
title = "Use of Electromechanical Feedback in MEMS for Suppressing Electronics Noise",
abstract = "At the pull-in point, a capacitive MEMS sensor becomes infinitely sensitive to applied force as the effective spring constant goes to zero because of electromechanical feedback We show that this phenomenon can be used to fully eliminate the noise contribution of readout electronics. Experimentally, we show that the electronics noise and interference contribution to system resolution could be suppressed by an order of magnitude, reaching the intrinsic resolution of the MEMS microphone. Experiments are in good agreement with a theory based on a small signal model of a harmonic MEMS oscillator. The technique allows the use of standard integrated electronics with noise-critical MEMS sensors, such as microphones, pressure sensors and accelerometers.",
keywords = "MEMS sensor, Readout noise, Pull-in",
author = "Panu Helist{\"o} and Hannu Sipola and Heikki Sepp{\"a}",
year = "2012",
doi = "10.1016/j.proeng.2012.09.319",
language = "English",
volume = "47",
pages = "1013--1016",
journal = "Procedia Engineering",
issn = "1877-7058",
publisher = "Elsevier",

}

Use of Electromechanical Feedback in MEMS for Suppressing Electronics Noise. / Helistö, Panu (Corresponding Author); Sipola, Hannu; Seppä, Heikki.

In: Procedia Engineering, Vol. 47, 2012, p. 1013-1016.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Use of Electromechanical Feedback in MEMS for Suppressing Electronics Noise

AU - Helistö, Panu

AU - Sipola, Hannu

AU - Seppä, Heikki

PY - 2012

Y1 - 2012

N2 - At the pull-in point, a capacitive MEMS sensor becomes infinitely sensitive to applied force as the effective spring constant goes to zero because of electromechanical feedback We show that this phenomenon can be used to fully eliminate the noise contribution of readout electronics. Experimentally, we show that the electronics noise and interference contribution to system resolution could be suppressed by an order of magnitude, reaching the intrinsic resolution of the MEMS microphone. Experiments are in good agreement with a theory based on a small signal model of a harmonic MEMS oscillator. The technique allows the use of standard integrated electronics with noise-critical MEMS sensors, such as microphones, pressure sensors and accelerometers.

AB - At the pull-in point, a capacitive MEMS sensor becomes infinitely sensitive to applied force as the effective spring constant goes to zero because of electromechanical feedback We show that this phenomenon can be used to fully eliminate the noise contribution of readout electronics. Experimentally, we show that the electronics noise and interference contribution to system resolution could be suppressed by an order of magnitude, reaching the intrinsic resolution of the MEMS microphone. Experiments are in good agreement with a theory based on a small signal model of a harmonic MEMS oscillator. The technique allows the use of standard integrated electronics with noise-critical MEMS sensors, such as microphones, pressure sensors and accelerometers.

KW - MEMS sensor

KW - Readout noise

KW - Pull-in

U2 - 10.1016/j.proeng.2012.09.319

DO - 10.1016/j.proeng.2012.09.319

M3 - Article

VL - 47

SP - 1013

EP - 1016

JO - Procedia Engineering

JF - Procedia Engineering

SN - 1877-7058

ER -