Using a 5:1 wafer stepper in patterning large area devices

Kari Leinonen

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publication16th Nordic Semiconductor Meeting
Subtitle of host publicationAbstracts
Place of PublicationReykjavík
PublisherUniversity of Iceland
Publication statusPublished - 1994
MoE publication typeNot Eligible
Event16th Nordic Semiconductor Meeting - Laugarvatn, Iceland
Duration: 12 Jun 199415 Jun 1994

Conference

Conference16th Nordic Semiconductor Meeting
CountryIceland
CityLaugarvatn
Period12/06/9415/06/94

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