Using a 5:1 wafer stepper in patterning large area devices

Kari Leinonen

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	16th Nordic Semiconductor Meeting
Subtitle of host publication	Abstracts
Place of Publication	Reykjavík
Publisher	University of Iceland
Publication status	Published - 1994
MoE publication type	Not Eligible
Event	16th Nordic Semiconductor Meeting - Laugarvatn, Iceland Duration: 12 Jun 1994 → 15 Jun 1994

Conference	16th Nordic Semiconductor Meeting
Country/Territory	Iceland
City	Laugarvatn
Period	12/06/94 → 15/06/94

Cite this

@inbook{94a0ed0c6a624bf3aa163149cd574fe6,

title = "Using a 5:1 wafer stepper in patterning large area devices",

author = "Kari Leinonen",

year = "1994",

language = "English",

booktitle = "16th Nordic Semiconductor Meeting",

publisher = "University of Iceland",

address = "Iceland",

note = "16th Nordic Semiconductor Meeting ; Conference date: 12-06-1994 Through 15-06-1994",

}