Using a TDI camera in vibration conditions with nonzero viewing angles for surface inspection

Jari Miettinen, Heikki J. Ailisto

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

A variety of Time Delay and Integration (TDI) arrays have been developed. The TDI image sensor offers significant improvement in performance over a linear CCD-sensor with respect to sensitivity. This is particularly significant in low light level operation since the effective exposure time is increased by a factor which is equal to the number of the TDI stages in the sensor. Our previous work has indicated that the TDI camera can be used with viewing angles up to 30 degrees from the surface normal. The effects caused by vibration of the viewed surface become critical when using a TDI camera at non-zero viewing angles. For this rfeason, a study was made on the vibration effects. This paper reports this study, concentrating on the relation between the vibration of the inspected surface and the sharpness of the image. The contrast perceived by the TDI camera as a function of the vibration amplitude and frequency is measured. The measurements are performed using a special test pattern in a dynamic situation. The results based on the contrast modulation function (CMF) in the vertical and horizontal directions are reported. A hypothesis of the effect of vibration on the CMF was formulated as a rule, which was then tested with measured data. Tentative result support the hypothesis.

Original languageEnglish
Title of host publicationNew Image Processing Techniques and Applications: Algorithms, Methods, and Components II
EditorsPhilippe Refregier, Rolf-Juergen Ahlers
Pages111-118
Number of pages8
DOIs
Publication statusPublished - 1 Dec 1997
MoE publication typeA4 Article in a conference publication
EventNew Image Processing Techniques and Applications: Algorithms, Methods, and Components II - Munich, Ger
Duration: 18 Jun 199719 Jun 1997

Publication series

NameProceedings of SPIE
Volume3101

Conference

ConferenceNew Image Processing Techniques and Applications: Algorithms, Methods, and Components II
CityMunich, Ger
Period18/06/9719/06/97

Fingerprint

inspection
Time delay
time lag
Inspection
Cameras
cameras
vibration
sensors
Modulation
vibration effects
modulation
sharpness
concentrating
Sensors
Charge coupled devices
Image sensors
charge coupled devices
sensitivity

Cite this

Miettinen, J., & Ailisto, H. J. (1997). Using a TDI camera in vibration conditions with nonzero viewing angles for surface inspection. In P. Refregier, & R-J. Ahlers (Eds.), New Image Processing Techniques and Applications: Algorithms, Methods, and Components II (pp. 111-118). Proceedings of SPIE, Vol.. 3101 https://doi.org/10.1117/12.281300
Miettinen, Jari ; Ailisto, Heikki J. / Using a TDI camera in vibration conditions with nonzero viewing angles for surface inspection. New Image Processing Techniques and Applications: Algorithms, Methods, and Components II. editor / Philippe Refregier ; Rolf-Juergen Ahlers. 1997. pp. 111-118 (Proceedings of SPIE, Vol. 3101).
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Miettinen, J & Ailisto, HJ 1997, Using a TDI camera in vibration conditions with nonzero viewing angles for surface inspection. in P Refregier & R-J Ahlers (eds), New Image Processing Techniques and Applications: Algorithms, Methods, and Components II. Proceedings of SPIE, vol. 3101, pp. 111-118, New Image Processing Techniques and Applications: Algorithms, Methods, and Components II, Munich, Ger, 18/06/97. https://doi.org/10.1117/12.281300

Using a TDI camera in vibration conditions with nonzero viewing angles for surface inspection. / Miettinen, Jari; Ailisto, Heikki J.

New Image Processing Techniques and Applications: Algorithms, Methods, and Components II. ed. / Philippe Refregier; Rolf-Juergen Ahlers. 1997. p. 111-118 (Proceedings of SPIE, Vol. 3101).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Miettinen J, Ailisto HJ. Using a TDI camera in vibration conditions with nonzero viewing angles for surface inspection. In Refregier P, Ahlers R-J, editors, New Image Processing Techniques and Applications: Algorithms, Methods, and Components II. 1997. p. 111-118. (Proceedings of SPIE, Vol. 3101). https://doi.org/10.1117/12.281300