Using TDI-camerawith non-zero viewing angles for surface inspection

Jari Miettinen, Heikki Ailisto

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publicationOptica Day '97. Tampere, Finland, 21 Feb. 1997
Subtitle of host publicationProceedings
Place of PublicationTampere
Publication statusPublished - 1997
MoE publication typeA4 Article in a conference publication

Publication series

SeriesTampere University of Technology: Institute of Physics. Physics Series Report
Number3-97
ISSN0359-811X

Cite this

Miettinen, J., & Ailisto, H. (1997). Using TDI-camerawith non-zero viewing angles for surface inspection. In Optica Day '97. Tampere, Finland, 21 Feb. 1997: Proceedings [23]. Tampere University of Technology: Institute of Physics. Physics Series Report, No. 3-97