Vacuum package design for a MEMS based IR detector array

Jyrki Ollila, M. F. Toy, O. Ferhanoglu, Pentti Karioja, H. Urey

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)
    Original languageEnglish
    Title of host publication16th European Microelectronics and Packaging Conference and Exhibition 2007
    Subtitle of host publicationEMPC 2007
    PublisherCurran Associates Inc.
    Pages294- 297
    ISBN (Print)978-1-62276-466-2
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication
    Event16th European Microelectronics and Packaging Conference and Exhibition - Oulu, Finland
    Duration: 17 Jun 200720 Jun 2007
    Conference number: 16

    Conference

    Conference16th European Microelectronics and Packaging Conference and Exhibition
    Abbreviated titleEMPC 2007
    CountryFinland
    CityOulu
    Period17/06/0720/06/07

    Cite this

    Ollila, J., Toy, M. F., Ferhanoglu, O., Karioja, P., & Urey, H. (2007). Vacuum package design for a MEMS based IR detector array. In 16th European Microelectronics and Packaging Conference and Exhibition 2007: EMPC 2007 (pp. 294- 297). Curran Associates Inc..
    Ollila, Jyrki ; Toy, M. F. ; Ferhanoglu, O. ; Karioja, Pentti ; Urey, H. / Vacuum package design for a MEMS based IR detector array. 16th European Microelectronics and Packaging Conference and Exhibition 2007: EMPC 2007. Curran Associates Inc., 2007. pp. 294- 297
    @inproceedings{0344af020afa4abcafd6a96beefebebb,
    title = "Vacuum package design for a MEMS based IR detector array",
    author = "Jyrki Ollila and Toy, {M. F.} and O. Ferhanoglu and Pentti Karioja and H. Urey",
    year = "2007",
    language = "English",
    isbn = "978-1-62276-466-2",
    pages = "294-- 297",
    booktitle = "16th European Microelectronics and Packaging Conference and Exhibition 2007",
    publisher = "Curran Associates Inc.",
    address = "United States",

    }

    Ollila, J, Toy, MF, Ferhanoglu, O, Karioja, P & Urey, H 2007, Vacuum package design for a MEMS based IR detector array. in 16th European Microelectronics and Packaging Conference and Exhibition 2007: EMPC 2007. Curran Associates Inc., pp. 294- 297, 16th European Microelectronics and Packaging Conference and Exhibition, Oulu, Finland, 17/06/07.

    Vacuum package design for a MEMS based IR detector array. / Ollila, Jyrki; Toy, M. F.; Ferhanoglu, O.; Karioja, Pentti; Urey, H.

    16th European Microelectronics and Packaging Conference and Exhibition 2007: EMPC 2007. Curran Associates Inc., 2007. p. 294- 297.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    TY - GEN

    T1 - Vacuum package design for a MEMS based IR detector array

    AU - Ollila, Jyrki

    AU - Toy, M. F.

    AU - Ferhanoglu, O.

    AU - Karioja, Pentti

    AU - Urey, H.

    PY - 2007

    Y1 - 2007

    M3 - Conference article in proceedings

    SN - 978-1-62276-466-2

    SP - 294

    EP - 297

    BT - 16th European Microelectronics and Packaging Conference and Exhibition 2007

    PB - Curran Associates Inc.

    ER -

    Ollila J, Toy MF, Ferhanoglu O, Karioja P, Urey H. Vacuum package design for a MEMS based IR detector array. In 16th European Microelectronics and Packaging Conference and Exhibition 2007: EMPC 2007. Curran Associates Inc. 2007. p. 294- 297