Vacuum package design for a MEMS based IR detector array

Jyrki Ollila, M. F. Toy, O. Ferhanoglu, Pentti Karioja, H. Urey

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)
    Original languageEnglish
    Title of host publication16th European Microelectronics and Packaging Conference and Exhibition 2007
    Subtitle of host publicationEMPC 2007
    PublisherCurran Associates Inc.
    Pages294- 297
    ISBN (Print)978-1-62276-466-2
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication
    Event16th European Microelectronics and Packaging Conference and Exhibition - Oulu, Finland
    Duration: 17 Jun 200720 Jun 2007
    Conference number: 16

    Conference

    Conference16th European Microelectronics and Packaging Conference and Exhibition
    Abbreviated titleEMPC 2007
    CountryFinland
    CityOulu
    Period17/06/0720/06/07

    Cite this

    Ollila, J., Toy, M. F., Ferhanoglu, O., Karioja, P., & Urey, H. (2007). Vacuum package design for a MEMS based IR detector array. In 16th European Microelectronics and Packaging Conference and Exhibition 2007: EMPC 2007 (pp. 294- 297). Curran Associates Inc..