Vacuum package design for a MEMS based IR detector array

Jyrki Ollila, M. F. Toy, O. Ferhanoglu, Pentti Karioja, H. Urey

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publication16th European Microelectronics and Packaging Conference and Exhibition 2007
Subtitle of host publicationEMPC 2007
PublisherCurran Associates Inc.
Pages294- 297
ISBN (Print)978-1-62276-466-2
Publication statusPublished - 2007
MoE publication typeA4 Article in a conference publication
Event16th European Microelectronics and Packaging Conference and Exhibition - Oulu, Finland
Duration: 17 Jun 200720 Jun 2007
Conference number: 16

Conference

Conference16th European Microelectronics and Packaging Conference and Exhibition
Abbreviated titleEMPC 2007
CountryFinland
CityOulu
Period17/06/0720/06/07

Cite this

Ollila, J., Toy, M. F., Ferhanoglu, O., Karioja, P., & Urey, H. (2007). Vacuum package design for a MEMS based IR detector array. In 16th European Microelectronics and Packaging Conference and Exhibition 2007: EMPC 2007 (pp. 294- 297). Curran Associates Inc..
Ollila, Jyrki ; Toy, M. F. ; Ferhanoglu, O. ; Karioja, Pentti ; Urey, H. / Vacuum package design for a MEMS based IR detector array. 16th European Microelectronics and Packaging Conference and Exhibition 2007: EMPC 2007. Curran Associates Inc., 2007. pp. 294- 297
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title = "Vacuum package design for a MEMS based IR detector array",
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year = "2007",
language = "English",
isbn = "978-1-62276-466-2",
pages = "294-- 297",
booktitle = "16th European Microelectronics and Packaging Conference and Exhibition 2007",
publisher = "Curran Associates Inc.",
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}

Ollila, J, Toy, MF, Ferhanoglu, O, Karioja, P & Urey, H 2007, Vacuum package design for a MEMS based IR detector array. in 16th European Microelectronics and Packaging Conference and Exhibition 2007: EMPC 2007. Curran Associates Inc., pp. 294- 297, 16th European Microelectronics and Packaging Conference and Exhibition, Oulu, Finland, 17/06/07.

Vacuum package design for a MEMS based IR detector array. / Ollila, Jyrki; Toy, M. F.; Ferhanoglu, O.; Karioja, Pentti; Urey, H.

16th European Microelectronics and Packaging Conference and Exhibition 2007: EMPC 2007. Curran Associates Inc., 2007. p. 294- 297.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Vacuum package design for a MEMS based IR detector array

AU - Ollila, Jyrki

AU - Toy, M. F.

AU - Ferhanoglu, O.

AU - Karioja, Pentti

AU - Urey, H.

PY - 2007

Y1 - 2007

M3 - Conference article in proceedings

SN - 978-1-62276-466-2

SP - 294

EP - 297

BT - 16th European Microelectronics and Packaging Conference and Exhibition 2007

PB - Curran Associates Inc.

ER -

Ollila J, Toy MF, Ferhanoglu O, Karioja P, Urey H. Vacuum package design for a MEMS based IR detector array. In 16th European Microelectronics and Packaging Conference and Exhibition 2007: EMPC 2007. Curran Associates Inc. 2007. p. 294- 297