Vacuum package design for a MEMS based IR detector array

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

1 Citation (Scopus)

Original language	English
Title of host publication	16th European Microelectronics and Packaging Conference and Exhibition 2007
Subtitle of host publication	EMPC 2007
Publisher	Curran Associates Inc.
Pages	294- 297
ISBN (Print)	978-1-62276-466-2
Publication status	Published - 2007
MoE publication type	A4 Article in a conference publication
Event	16th European Microelectronics and Packaging Conference and Exhibition - Oulu, Finland Duration: 17 Jun 2007 → 20 Jun 2007 Conference number: 16

Conference	16th European Microelectronics and Packaging Conference and Exhibition
Abbreviated title	EMPC 2007
Country/Territory	Finland
City	Oulu
Period	17/06/07 → 20/06/07

Cite this

@inproceedings{0344af020afa4abcafd6a96beefebebb,

title = "Vacuum package design for a MEMS based IR detector array",

author = "Jyrki Ollila and Toy, \{M. F.\} and O. Ferhanoglu and Pentti Karioja and H. Urey",

year = "2007",

language = "English",

isbn = "978-1-62276-466-2",

pages = "294-- 297",

booktitle = "16th European Microelectronics and Packaging Conference and Exhibition 2007",

publisher = "Curran Associates Inc.",

address = "United States",

note = "16th European Microelectronics and Packaging Conference and Exhibition, EMPC 2007 ; Conference date: 17-06-2007 Through 20-06-2007",

}

TY - GEN

T1 - Vacuum package design for a MEMS based IR detector array

AU - Ollila, Jyrki

AU - Toy, M. F.

AU - Ferhanoglu, O.

AU - Karioja, Pentti

AU - Urey, H.

N1 - Conference code: 16

PY - 2007

Y1 - 2007

M3 - Conference article in proceedings

SN - 978-1-62276-466-2

SP - 294

EP - 297

BT - 16th European Microelectronics and Packaging Conference and Exhibition 2007

PB - Curran Associates Inc.

T2 - 16th European Microelectronics and Packaging Conference and Exhibition

Y2 - 17 June 2007 through 20 June 2007

ER -